waveguide_material
stringclasses 5
values | cladding_material
stringclasses 2
values | waveguide_width
float32 0.5
2
| waveguide_height
float32 0.2
1
| temperature_min
float32 -50
20
| temperature_max
float32 80
200
| temperature_step
float32 1
10
| thermal_expansion_coefficient
float32 0
0
| thermal_conductivity
float32 0.15
20
| refractive_index_core
float32 1.4
2
| refractive_index_cladding
float32 1
1.5
| propagation_loss_min
float32 0.1
3
| propagation_loss_max
float32 0.21
4.5
| effective_index_min
float32 1.4
2
| effective_index_max
float32 1.4
2.01
| dn_dT
float32 0
0
| thermal_tuning_efficiency
float32 50
90
| thermal_stress
float32 10
100
| strain_rate
float32 0
0
| optical_power_input
float32 0.5
10
| optical_power_output_min
float32 0
9.89
| optical_power_output_max
float32 0
9.89
| wavelength_min
float32 1.26k
1.26k
| wavelength_max
float32 1.63k
1.63k
| simulation_model
stringclasses 2
values | measurement_uncertainty
float32 0.1
5
|
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
Polymethyl Methacrylate (PMMA) | Air | 1.415 | 0.44 | -32.400002 | 167.800003 | 10 | 0.000012 | 0.23 | 1.96328 | 1.40428 | 1.783 | 2.422 | 1.91922 | 1.92356 | 0.000022 | 87.510002 | 39.639999 | 0.000005 | 9.7 | 9.56 | 9.57 | 1,260 | 1,625 | FDTD | 2.36 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.493 | 0.339 | 4 | 137.5 | 10 | 0.000003 | 18.17 | 1.85855 | 1.4841 | 2.782 | 3.91 | 1.54502 | 1.55406 | 0.000068 | 59.439999 | 67.370003 | 0.000002 | 3.46 | 3.07 | 3.22 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.08 |
Polymethyl Methacrylate (PMMA) | Air | 1.793 | 0.342 | -33.900002 | 136.199997 | 1 | 0.000014 | 0.21 | 1.71199 | 1.45112 | 2.385 | 3.073 | 1.55355 | 1.5635 | 0.000059 | 68.779999 | 22.690001 | 0.000005 | 3.86 | 3.68 | 3.47 | 1,260 | 1,625 | FDTD | 0.69 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.509 | 0.462 | 7.2 | 138.699997 | 5 | 0.000003 | 16.450001 | 1.68847 | 1.25539 | 1.164 | 1.438 | 1.47899 | 1.48817 | 0.00007 | 81.300003 | 98.910004 | 0.000003 | 4.16 | 4.03 | 3.81 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.12 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.39 | 0.87 | 12.2 | 109.699997 | 5 | 0.000207 | 0.17 | 1.81777 | 1.44824 | 2.094 | 2.873 | 1.57128 | 1.58003 | 0.00009 | 62.790001 | 34.209999 | 0.000004 | 5.33 | 4.96 | 5.1 | 1,260 | 1,625 | FDTD | 3.25 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.535 | 0.308 | 3.3 | 184.5 | 5 | 0.000108 | 0.19 | 1.75267 | 1.49496 | 0.935 | 1.346 | 1.79061 | 1.79784 | 0.00004 | 65.919998 | 51.599998 | 0.000001 | 0.86 | 0.43 | 0.5 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.72 |
SU-8 | Silicon Dioxide (SiO₂) | 1.025 | 0.398 | -28.4 | 196.5 | 10 | 0.000009 | 0.27 | 1.821 | 1.35807 | 1.498 | 2.63 | 1.43595 | 1.43947 | 0.000016 | 82.629997 | 79.120003 | 0.000004 | 7.56 | 7.2 | 7.33 | 1,260 | 1,625 | FDTD | 2.65 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.306 | 0.551 | -41.400002 | 117 | 5 | 0.000003 | 19.4 | 1.92639 | 1.23253 | 0.555 | 1.118 | 1.93129 | 1.93301 | 0.000011 | 77.160004 | 26.360001 | 0.000003 | 9.12 | 8.69 | 8.84 | 1,260 | 1,625 | FDTD | 3.96 |
Polydimethylsiloxane (PDMS) | Air | 0.668 | 0.815 | -12.7 | 139.699997 | 5 | 0.000278 | 0.18 | 1.47803 | 1.43398 | 2.061 | 3.528 | 1.97337 | 1.97498 | 0.000011 | 66.129997 | 87.860001 | 0 | 1.9 | 1.61 | 1.74 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.2 |
SU-8 | Air | 1.333 | 0.526 | 10.3 | 143 | 1 | 0.000009 | 0.26 | 1.50729 | 1.34851 | 2.696 | 4.176 | 1.48365 | 1.49149 | 0.000059 | 81.040001 | 21.01 | 0.000001 | 9.36 | 8.94 | 8.9 | 1,260 | 1,625 | FDTD | 4.29 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.302 | 0.226 | 3.4 | 146.300003 | 10 | 0.000215 | 0.18 | 1.53504 | 1.30428 | 2.756 | 3.753 | 1.94568 | 1.947 | 0.000009 | 55.060001 | 26.209999 | 0.000002 | 1.06 | 0.72 | 0.84 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.46 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.836 | 0.997 | -48 | 90.5 | 10 | 0.000003 | 19.879999 | 1.90496 | 1.1293 | 0.73 | 1.909 | 1.75933 | 1.76782 | 0.000061 | 67.779999 | 87.769997 | 0.000004 | 0.86 | 0.74 | 0.57 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.79 |
SU-8 | Air | 1.899 | 0.286 | -33 | 174.199997 | 1 | 0.00001 | 0.2 | 1.78943 | 1.49748 | 1.869 | 2.476 | 1.98708 | 1.98822 | 0.000006 | 67.220001 | 96.57 | 0.000001 | 9.56 | 9.2 | 9.41 | 1,260 | 1,625 | FDTD | 0.27 |
Polydimethylsiloxane (PDMS) | Air | 1.901 | 0.243 | -40.599998 | 149.399994 | 1 | 0.000103 | 0.19 | 1.68976 | 1.45015 | 0.426 | 1.174 | 1.82982 | 1.83839 | 0.000045 | 89.730003 | 52.25 | 0.000002 | 6.41 | 6.04 | 6.28 | 1,260 | 1,625 | FDTD | 1.12 |
Polydimethylsiloxane (PDMS) | Air | 1.062 | 0.577 | -15.6 | 123.300003 | 5 | 0.000179 | 0.15 | 1.58914 | 1.48461 | 2.098 | 3.106 | 1.51558 | 1.52384 | 0.000059 | 87.209999 | 30.25 | 0.000004 | 5.65 | 5.36 | 5.16 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.4 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.424 | 0.212 | 16.299999 | 90.300003 | 5 | 0.000136 | 0.2 | 1.41651 | 1.27573 | 2.801 | 3.619 | 1.79337 | 1.79466 | 0.000017 | 75.349998 | 58.169998 | 0.000003 | 5.23 | 4.8 | 4.84 | 1,260 | 1,625 | FDTD | 1.43 |
Polydimethylsiloxane (PDMS) | Air | 1.089 | 0.972 | -36.900002 | 115 | 10 | 0.000265 | 0.2 | 1.79317 | 1.04401 | 2.312 | 3.094 | 1.67641 | 1.68055 | 0.000027 | 70.93 | 51.799999 | 0.000003 | 4.5 | 4.4 | 4.18 | 1,260 | 1,625 | FDTD | 0.36 |
Polymethyl Methacrylate (PMMA) | Air | 1.099 | 0.927 | 3.5 | 101.400002 | 10 | 0.000008 | 0.21 | 1.43001 | 1.00527 | 1.739 | 2.453 | 1.95986 | 1.96359 | 0.000038 | 82.709999 | 95.160004 | 0.000003 | 2.48 | 2.32 | 2.02 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.65 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 0.59 | 0.236 | 6.1 | 158.600006 | 1 | 0.000001 | 1.44 | 1.79547 | 1.11526 | 1.76 | 1.975 | 1.44851 | 1.44984 | 0.000009 | 68.349998 | 16.370001 | 0.000001 | 5.36 | 5.15 | 4.94 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.49 |
Polymethyl Methacrylate (PMMA) | Air | 1.611 | 0.585 | -16.5 | 85.900002 | 10 | 0.000013 | 0.22 | 1.9305 | 1.05149 | 1.665 | 2.575 | 1.87922 | 1.88878 | 0.000093 | 53.630001 | 93.940002 | 0.000003 | 9.39 | 9.26 | 8.93 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.28 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.896 | 0.46 | 5 | 196.800003 | 10 | 0.000001 | 1.36 | 1.51824 | 1.02747 | 1.128 | 1.419 | 1.92202 | 1.92968 | 0.00004 | 54.459999 | 83.080002 | 0.000004 | 2.82 | 2.39 | 2.33 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.45 |
SU-8 | Air | 0.757 | 0.717 | -31.700001 | 187.199997 | 5 | 0.000008 | 0.23 | 1.92612 | 1.19322 | 2.232 | 3.307 | 1.43194 | 1.43376 | 0.000008 | 86.690002 | 69.699997 | 0.000002 | 8.65 | 8.24 | 8.39 | 1,260 | 1,625 | FDTD | 1.24 |
SU-8 | Air | 0.644 | 0.727 | -48.299999 | 98.400002 | 1 | 0.000007 | 0.29 | 1.88527 | 1.13436 | 1.894 | 2.923 | 1.86663 | 1.87103 | 0.00003 | 89.790001 | 92.290001 | 0.000001 | 7.4 | 7.19 | 7.02 | 1,260 | 1,625 | FDTD | 4.54 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 0.58 | 0.947 | -29.299999 | 154.399994 | 5 | 0.000008 | 0.21 | 1.87991 | 1.05452 | 0.676 | 1.34 | 1.69859 | 1.70227 | 0.00002 | 70.220001 | 51.66 | 0.000005 | 3.8 | 3.58 | 3.64 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.31 |
Polymethyl Methacrylate (PMMA) | Air | 1.682 | 0.817 | -20.5 | 141.199997 | 1 | 0.000014 | 0.2 | 1.60671 | 1.45905 | 2.485 | 2.787 | 1.7654 | 1.76968 | 0.000026 | 54.220001 | 48.349998 | 0.000004 | 2.48 | 2.38 | 2.13 | 1,260 | 1,625 | FDTD | 3.24 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.773 | 0.597 | -4.7 | 88.099998 | 1 | 0.000003 | 17.52 | 1.60667 | 1.15107 | 0.645 | 1.407 | 1.66136 | 1.66704 | 0.000061 | 82.279999 | 97.760002 | 0.000005 | 6.27 | 6.01 | 6.02 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.45 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.699 | 0.389 | 7 | 154.899994 | 1 | 0.000001 | 1.49 | 1.50028 | 1.39008 | 0.788 | 1.543 | 1.74799 | 1.7531 | 0.000035 | 80.400002 | 61.759998 | 0.000001 | 1.06 | 0.92 | 0.58 | 1,260 | 1,625 | FDTD | 2.38 |
Silicon Nitride (Si₃N₄) | Air | 1.993 | 0.638 | -15.8 | 99.5 | 5 | 0.000003 | 18.059999 | 1.92422 | 1.25881 | 1.725 | 2.798 | 1.91704 | 1.92265 | 0.000049 | 83.07 | 54.040001 | 0.000002 | 2.45 | 2.19 | 2.23 | 1,260 | 1,625 | FDTD | 0.73 |
Polymethyl Methacrylate (PMMA) | Air | 1.882 | 0.246 | -38.599998 | 171.5 | 5 | 0.000009 | 0.21 | 1.5137 | 1.12352 | 1.149 | 1.836 | 1.44447 | 1.44691 | 0.000012 | 50.07 | 27.34 | 0.000003 | 9.35 | 9.08 | 9.22 | 1,260 | 1,625 | FDTD | 3.41 |
Silicon Nitride (Si₃N₄) | Air | 1.735 | 0.722 | -33 | 187.600006 | 10 | 0.000003 | 19.969999 | 1.50301 | 1.05035 | 0.231 | 0.398 | 1.63527 | 1.64344 | 0.000037 | 54.950001 | 19.190001 | 0.000002 | 7.6 | 7.45 | 7.3 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.8 |
Silicon Dioxide (SiO₂) | Air | 1.245 | 0.713 | -48.099998 | 141.300003 | 1 | 0.000001 | 1.36 | 1.44488 | 1.13786 | 0.17 | 0.825 | 1.91247 | 1.91832 | 0.000031 | 89.050003 | 92.260002 | 0.000001 | 4.57 | 4.14 | 4.3 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.75 |
SU-8 | Silicon Dioxide (SiO₂) | 0.507 | 0.266 | -20.299999 | 163.600006 | 5 | 0.000009 | 0.26 | 1.93068 | 1.38588 | 1.119 | 2.517 | 1.51448 | 1.51685 | 0.000013 | 56.720001 | 79.769997 | 0.000001 | 1.38 | 0.89 | 1.09 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.22 |
Silicon Nitride (Si₃N₄) | Air | 1.726 | 0.975 | 5.7 | 126.099998 | 1 | 0.000003 | 17.190001 | 1.82415 | 1.25713 | 2.574 | 2.83 | 1.80226 | 1.81078 | 0.000071 | 66.410004 | 61.650002 | 0 | 9.46 | 9.11 | 9.19 | 1,260 | 1,625 | FDTD | 2.97 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.224 | 0.431 | -21.5 | 111.300003 | 10 | 0.000001 | 1.37 | 1.78139 | 1.40375 | 0.362 | 1.467 | 1.5249 | 1.52857 | 0.000028 | 62.240002 | 84.830002 | 0.000001 | 1.85 | 1.36 | 1.7 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.55 |
Polydimethylsiloxane (PDMS) | Air | 1.968 | 0.974 | -14.3 | 196.100006 | 5 | 0.000275 | 0.19 | 1.4734 | 1.04925 | 2.911 | 3.948 | 1.73811 | 1.73927 | 0.000006 | 77.860001 | 88.93 | 0.000003 | 8.65 | 8.29 | 8.28 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.04 |
Silicon Dioxide (SiO₂) | Air | 1.528 | 0.417 | -21.700001 | 145.199997 | 1 | 0.000001 | 1.4 | 1.80386 | 1.03649 | 1.59 | 2.942 | 1.56612 | 1.57606 | 0.00006 | 63.77 | 13.43 | 0.000005 | 2.8 | 2.41 | 2.32 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.59 |
Silicon Dioxide (SiO₂) | Air | 1.152 | 0.67 | 8 | 146.399994 | 10 | 0.000001 | 1.36 | 1.87125 | 1.10145 | 1.283 | 2.169 | 1.73683 | 1.7384 | 0.000011 | 58.48 | 23.690001 | 0.000003 | 7.8 | 7.43 | 7.63 | 1,260 | 1,625 | FDTD | 4.97 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.648 | 0.58 | -30.200001 | 90.699997 | 5 | 0.000011 | 0.19 | 1.63327 | 1.2232 | 1.051 | 1.652 | 1.42456 | 1.4259 | 0.000011 | 69.870003 | 67.25 | 0.000005 | 5.65 | 5.26 | 5.45 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.25 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.573 | 0.302 | -13.2 | 82.800003 | 10 | 0.000003 | 15.73 | 1.6197 | 1.3877 | 1.011 | 1.595 | 1.78431 | 1.78601 | 0.000018 | 88.370003 | 89.489998 | 0.000003 | 6.71 | 6.35 | 6.54 | 1,260 | 1,625 | FDTD | 4.17 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.37 | 0.845 | 14.5 | 173 | 5 | 0.000014 | 0.19 | 1.73376 | 1.44208 | 1.556 | 2.453 | 1.42597 | 1.43214 | 0.000039 | 63.810001 | 56.869999 | 0.000001 | 8.08 | 7.86 | 7.68 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.46 |
SU-8 | Air | 0.716 | 0.676 | 9.9 | 146.600006 | 1 | 0.000007 | 0.24 | 1.62879 | 1.03492 | 1.475 | 2.202 | 1.5424 | 1.54369 | 0.000009 | 53.669998 | 22.290001 | 0.000004 | 7.31 | 7.2 | 7.14 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.09 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 0.75 | 0.425 | -5.3 | 103.800003 | 1 | 0.000145 | 0.17 | 1.93923 | 1.47969 | 1.054 | 1.78 | 1.70119 | 1.70772 | 0.00006 | 81.290001 | 81.480003 | 0.000001 | 1.44 | 1.23 | 1.2 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.36 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 0.677 | 0.272 | 12.4 | 122.300003 | 10 | 0.00001 | 0.21 | 1.43173 | 1.41902 | 1.161 | 1.849 | 1.48014 | 1.48363 | 0.000032 | 80.559998 | 52.389999 | 0.000003 | 8.96 | 8.73 | 8.53 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.98 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.948 | 0.495 | 12.1 | 150.600006 | 1 | 0.000003 | 15.34 | 1.87706 | 1.33805 | 0.432 | 0.573 | 1.41103 | 1.41931 | 0.00006 | 70.959999 | 98.25 | 0.000003 | 9.08 | 8.81 | 8.89 | 1,260 | 1,625 | FDTD | 0.93 |
Polymethyl Methacrylate (PMMA) | Air | 1.89 | 0.505 | -7.1 | 155.800003 | 10 | 0.000011 | 0.22 | 1.74621 | 1.10878 | 2.684 | 2.816 | 1.51574 | 1.52243 | 0.000041 | 58.93 | 15 | 0.000003 | 3.31 | 3.18 | 2.82 | 1,260 | 1,625 | FDTD | 2.76 |
SU-8 | Air | 0.959 | 0.511 | -33.299999 | 168.699997 | 1 | 0.000012 | 0.2 | 1.47369 | 1.23482 | 0.305 | 1.675 | 1.95969 | 1.96707 | 0.000037 | 51.91 | 63.119999 | 0.000003 | 5.15 | 4.67 | 4.93 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.42 |
Polymethyl Methacrylate (PMMA) | Air | 1.029 | 0.715 | -5.8 | 171.600006 | 10 | 0.000008 | 0.21 | 1.78095 | 1.28793 | 0.975 | 2.272 | 1.972 | 1.9776 | 0.000032 | 73.639999 | 15.55 | 0.000002 | 4.64 | 4.4 | 4.19 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.34 |
Silicon Nitride (Si₃N₄) | Air | 0.822 | 0.717 | -11.8 | 84.5 | 10 | 0.000003 | 16.57 | 1.66058 | 1.09304 | 0.385 | 0.5 | 1.46678 | 1.47648 | 0.000101 | 63.200001 | 50.330002 | 0.000004 | 9.02 | 8.79 | 8.77 | 1,260 | 1,625 | FDTD | 2.64 |
SU-8 | Silicon Dioxide (SiO₂) | 1.551 | 0.823 | 6 | 92.900002 | 10 | 0.000011 | 0.3 | 1.98385 | 1.17274 | 1.967 | 2.852 | 1.77753 | 1.78729 | 0.000112 | 75.580002 | 91.669998 | 0.000004 | 4.25 | 4.07 | 4.14 | 1,260 | 1,625 | FDTD | 0.47 |
Silicon Nitride (Si₃N₄) | Air | 0.51 | 0.386 | -17.9 | 121.900002 | 1 | 0.000003 | 16.99 | 1.47246 | 1.14125 | 1.443 | 2.024 | 1.46051 | 1.46814 | 0.000055 | 52.919998 | 99.470001 | 0.000002 | 5.5 | 5.06 | 5.25 | 1,260 | 1,625 | FDTD | 2.21 |
SU-8 | Air | 1.134 | 0.263 | -38.700001 | 141.300003 | 10 | 0.000008 | 0.21 | 1.52899 | 1.37444 | 1.394 | 2.634 | 1.95887 | 1.96611 | 0.00004 | 59.110001 | 16.129999 | 0 | 6.86 | 6.38 | 6.67 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.02 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.774 | 0.211 | 13.4 | 146.199997 | 10 | 0.000003 | 17.58 | 1.40405 | 1.01645 | 2.865 | 3.515 | 1.44924 | 1.45891 | 0.000073 | 50.68 | 16.049999 | 0.000001 | 4.32 | 3.89 | 4.21 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.33 |
SU-8 | Air | 1.64 | 0.87 | -30.4 | 172.199997 | 5 | 0.000007 | 0.22 | 1.93687 | 1.49384 | 2.095 | 2.733 | 1.58561 | 1.58893 | 0.000016 | 81.870003 | 16.959999 | 0.000003 | 4.83 | 4.47 | 4.72 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.99 |
Silicon Dioxide (SiO₂) | Air | 1.344 | 0.879 | 14.7 | 121.099998 | 5 | 0.000001 | 1.48 | 1.61933 | 1.29269 | 2.312 | 2.447 | 1.77368 | 1.77708 | 0.000032 | 74.080002 | 83.260002 | 0.000005 | 4.64 | 4.32 | 4.38 | 1,260 | 1,625 | FDTD | 1.92 |
Polymethyl Methacrylate (PMMA) | Air | 0.561 | 0.877 | -21.200001 | 176.800003 | 1 | 0.000008 | 0.24 | 1.66878 | 1.05618 | 2.954 | 3.498 | 1.51579 | 1.52101 | 0.000026 | 74.150002 | 10.09 | 0.000001 | 0.94 | 0.84 | 0.56 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.61 |
Silicon Dioxide (SiO₂) | Air | 1.333 | 0.358 | -45.599998 | 186.199997 | 5 | 0.000001 | 1.44 | 1.57404 | 1.11947 | 1.106 | 2.572 | 1.45826 | 1.46792 | 0.000042 | 79.32 | 63.490002 | 0.000003 | 0.7 | 0.51 | 0.26 | 1,260 | 1,625 | FDTD | 3.18 |
Silicon Nitride (Si₃N₄) | Air | 1.013 | 0.611 | -17.200001 | 184.699997 | 10 | 0.000003 | 17.530001 | 1.53805 | 1.16785 | 1.186 | 1.602 | 1.50736 | 1.51022 | 0.000014 | 70.040001 | 32.150002 | 0.000003 | 8.16 | 7.99 | 7.67 | 1,260 | 1,625 | FDTD | 4.95 |
Silicon Dioxide (SiO₂) | Air | 1.005 | 0.468 | -18.1 | 103.900002 | 1 | 0.000001 | 1.46 | 1.48786 | 1.02045 | 1.849 | 2.053 | 1.82361 | 1.82781 | 0.000034 | 59 | 88.5 | 0.000004 | 1.98 | 1.62 | 1.53 | 1,260 | 1,625 | FDTD | 0.44 |
SU-8 | Air | 1.7 | 0.431 | 13.4 | 171.100006 | 5 | 0.000009 | 0.25 | 1.48135 | 1.29657 | 0.295 | 0.529 | 1.57527 | 1.58274 | 0.000047 | 65 | 76.43 | 0.000001 | 6.17 | 5.77 | 5.71 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.56 |
Polymethyl Methacrylate (PMMA) | Air | 1.663 | 0.444 | -38.900002 | 185.699997 | 5 | 0.000008 | 0.22 | 1.45754 | 1.19908 | 1.29 | 1.544 | 1.57907 | 1.58651 | 0.000033 | 52.279999 | 69.18 | 0.000003 | 8.57 | 8.42 | 8.28 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.05 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.637 | 0.987 | -34.5 | 119.599998 | 1 | 0.000003 | 18.790001 | 1.87728 | 1.30851 | 1.718 | 1.924 | 1.8764 | 1.88413 | 0.00005 | 68.889999 | 58.43 | 0.000002 | 5.99 | 5.83 | 5.54 | 1,260 | 1,625 | FDTD | 1.04 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.758 | 0.236 | -43.200001 | 81.099998 | 10 | 0.000015 | 0.24 | 1.57605 | 1.21973 | 0.205 | 1.349 | 1.78768 | 1.79725 | 0.000077 | 74.919998 | 81.730003 | 0.000004 | 6.36 | 6.06 | 5.98 | 1,260 | 1,625 | FDTD | 2.88 |
Polymethyl Methacrylate (PMMA) | Air | 0.921 | 0.703 | 7.5 | 81.599998 | 5 | 0.000008 | 0.23 | 1.82061 | 1.46321 | 1.786 | 3.054 | 1.98286 | 1.99173 | 0.00012 | 70.260002 | 27.690001 | 0.000004 | 4.63 | 4.41 | 4.5 | 1,260 | 1,625 | FDTD | 4.79 |
SU-8 | Silicon Dioxide (SiO₂) | 1.006 | 0.608 | 8.2 | 175.5 | 1 | 0.000007 | 0.25 | 1.51286 | 1.31136 | 0.238 | 1.145 | 1.89825 | 1.90056 | 0.000014 | 72.059998 | 71.669998 | 0.000005 | 3.97 | 3.5 | 3.6 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.63 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.191 | 0.696 | 10.6 | 102.400002 | 1 | 0.000112 | 0.18 | 1.71634 | 1.3537 | 0.773 | 2.147 | 1.5039 | 1.51021 | 0.000069 | 67.650002 | 92.25 | 0.000004 | 6.42 | 6.11 | 6.17 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.12 |
SU-8 | Silicon Dioxide (SiO₂) | 1.763 | 0.605 | 12.9 | 117.5 | 5 | 0.000009 | 0.2 | 1.61812 | 1.20012 | 2.737 | 3.865 | 1.92348 | 1.93204 | 0.000082 | 84.949997 | 71.790001 | 0.000003 | 9.04 | 8.62 | 8.82 | 1,260 | 1,625 | FDTD | 4.95 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.457 | 0.377 | -39.799999 | 198.899994 | 5 | 0.000003 | 19.389999 | 1.60829 | 1.00755 | 1.597 | 2.597 | 1.58168 | 1.59087 | 0.000038 | 50.110001 | 81.650002 | 0 | 9.09 | 8.75 | 8.63 | 1,260 | 1,625 | FDTD | 1.26 |
SU-8 | Air | 1.058 | 0.652 | 11.2 | 169.399994 | 10 | 0.000007 | 0.28 | 1.73974 | 1.27046 | 0.645 | 1.976 | 1.99598 | 2.00255 | 0.000042 | 89.400002 | 94.760002 | 0.000004 | 5.62 | 5.28 | 5.37 | 1,260 | 1,625 | FDTD | 2.34 |
Silicon Dioxide (SiO₂) | Air | 1.553 | 0.668 | 18.9 | 157.600006 | 5 | 0.000001 | 1.32 | 1.82883 | 1.49542 | 1.331 | 1.61 | 1.74671 | 1.7492 | 0.000018 | 85.309998 | 80.290001 | 0.000002 | 8.52 | 8.12 | 8.37 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.04 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.981 | 0.764 | -22.9 | 185.399994 | 10 | 0.000003 | 19.27 | 1.98004 | 1.09642 | 2.226 | 3.355 | 1.8059 | 1.80877 | 0.000014 | 58.740002 | 71.209999 | 0.000003 | 1.01 | 0.56 | 0.71 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.99 |
Silicon Dioxide (SiO₂) | Air | 1.531 | 0.346 | 20 | 83.099998 | 1 | 0.000001 | 1.4 | 1.97729 | 1.04524 | 2.643 | 3.369 | 1.99584 | 2.00349 | 0.000121 | 51.75 | 98.769997 | 0.000002 | 6.44 | 6.23 | 6.08 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.77 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.025 | 0.423 | -35 | 184.399994 | 10 | 0.000012 | 0.23 | 1.77696 | 1.45354 | 1.723 | 3.097 | 1.47611 | 1.48484 | 0.00004 | 75.25 | 18.09 | 0 | 7.64 | 7.4 | 7.22 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.95 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.151 | 0.498 | -35.299999 | 176.800003 | 10 | 0.000003 | 18.52 | 1.57614 | 1.08238 | 2.232 | 2.737 | 1.89388 | 1.89504 | 0.000005 | 78.25 | 41.650002 | 0.000002 | 4.89 | 4.45 | 4.77 | 1,260 | 1,625 | Finite Element Method (FEM) | 1 |
Polydimethylsiloxane (PDMS) | Air | 1.379 | 0.781 | 12 | 90 | 5 | 0.000294 | 0.2 | 1.58678 | 1.19626 | 1.856 | 2.821 | 1.86652 | 1.87179 | 0.000068 | 82.830002 | 33.599998 | 0.000005 | 1.49 | 1.04 | 1.15 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.9 |
SU-8 | Silicon Dioxide (SiO₂) | 1.975 | 0.525 | -0.5 | 136.5 | 5 | 0.000006 | 0.28 | 1.58567 | 1.21926 | 1.084 | 1.347 | 1.77028 | 1.78019 | 0.000072 | 54.139999 | 14.62 | 0.000003 | 7.95 | 7.65 | 7.49 | 1,260 | 1,625 | FDTD | 0.96 |
SU-8 | Silicon Dioxide (SiO₂) | 0.913 | 0.374 | -1.1 | 153.600006 | 10 | 0.000006 | 0.27 | 1.45014 | 1.29178 | 0.721 | 1.067 | 1.5733 | 1.58153 | 0.000053 | 51.279999 | 20.040001 | 0.000003 | 6.14 | 5.67 | 5.66 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.22 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.368 | 0.978 | -45 | 96 | 1 | 0.000241 | 0.19 | 1.90448 | 1.49926 | 0.645 | 1.043 | 1.74622 | 1.75611 | 0.00007 | 87.419998 | 21.65 | 0.000002 | 1.49 | 1.15 | 1.37 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.55 |
Silicon Dioxide (SiO₂) | Air | 0.619 | 0.699 | -37.700001 | 84.699997 | 5 | 0.000001 | 1.34 | 1.92363 | 1.21958 | 2.412 | 2.608 | 1.416 | 1.42151 | 0.000045 | 63.869999 | 85.769997 | 0.000001 | 9.21 | 8.87 | 9.09 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.89 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.336 | 0.223 | -7.5 | 198.100006 | 10 | 0.000003 | 17.120001 | 1.61252 | 1.26748 | 0.815 | 1.866 | 1.47644 | 1.47958 | 0.000015 | 63.439999 | 50.91 | 0.000001 | 2.3 | 2.19 | 2.19 | 1,260 | 1,625 | FDTD | 0.32 |
SU-8 | Silicon Dioxide (SiO₂) | 1.196 | 0.586 | -44.700001 | 114.199997 | 10 | 0.000007 | 0.2 | 1.47606 | 1.05609 | 2.047 | 2.904 | 1.54725 | 1.5542 | 0.000044 | 73.190002 | 11.05 | 0.000002 | 7.28 | 7.03 | 6.93 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.25 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 0.558 | 0.355 | -15.2 | 150.5 | 5 | 0.000014 | 0.2 | 1.76057 | 1.26751 | 1.75 | 3.232 | 1.4455 | 1.4469 | 0.000008 | 65.980003 | 90.209999 | 0.000001 | 1.48 | 1.36 | 1.01 | 1,260 | 1,625 | FDTD | 1.81 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.75 | 0.886 | -33.599998 | 199.300003 | 1 | 0.000001 | 1.49 | 1.48921 | 1.44171 | 0.641 | 1.692 | 1.51003 | 1.51688 | 0.000029 | 60.139999 | 28.35 | 0 | 8.33 | 7.95 | 8.09 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.77 |
SU-8 | Silicon Dioxide (SiO₂) | 0.657 | 0.581 | -10.2 | 176.399994 | 5 | 0.000007 | 0.22 | 1.63357 | 1.18614 | 0.49 | 1.101 | 1.80906 | 1.81048 | 0.000008 | 52.740002 | 72.699997 | 0.000005 | 5.49 | 5 | 5.29 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.15 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.207 | 0.815 | -28.700001 | 164.399994 | 5 | 0.000003 | 17.23 | 1.48844 | 1.30661 | 1.183 | 1.398 | 1.4374 | 1.43887 | 0.000008 | 85.029999 | 74.290001 | 0.000001 | 9.18 | 8.85 | 8.74 | 1,260 | 1,625 | FDTD | 2.59 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.698 | 0.616 | -8.8 | 121.900002 | 5 | 0.000008 | 0.22 | 1.51039 | 1.19786 | 2.009 | 3.502 | 1.71084 | 1.72048 | 0.000074 | 87.349998 | 72.279999 | 0.000004 | 3.77 | 3.35 | 3.67 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.93 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.258 | 0.545 | 10.8 | 161.800003 | 5 | 0.000009 | 0.22 | 1.56247 | 1.07881 | 0.331 | 1.089 | 1.8874 | 1.89041 | 0.00002 | 76.059998 | 84.349998 | 0.000004 | 9.17 | 8.83 | 8.88 | 1,260 | 1,625 | FDTD | 3.55 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.467 | 0.757 | -3.2 | 187 | 10 | 0.000003 | 18.290001 | 1.73928 | 1.16093 | 2.289 | 3.569 | 1.51794 | 1.52677 | 0.000046 | 81.620003 | 31.49 | 0.000005 | 8.74 | 8.27 | 8.3 | 1,260 | 1,625 | FDTD | 4.62 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.418 | 0.526 | -43.400002 | 107 | 1 | 0.000008 | 0.22 | 1.72146 | 1.42082 | 2.519 | 3.939 | 1.4043 | 1.41243 | 0.000054 | 87.239998 | 79.849998 | 0 | 2.26 | 1.78 | 1.89 | 1,260 | 1,625 | FDTD | 2.85 |
SU-8 | Silicon Dioxide (SiO₂) | 1.791 | 0.49 | 15.8 | 199 | 5 | 0.00001 | 0.26 | 1.96601 | 1.48648 | 2.67 | 3.181 | 1.86321 | 1.8689 | 0.000031 | 70.870003 | 64.699997 | 0.000004 | 4.76 | 4.45 | 4.34 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.3 |
Polydimethylsiloxane (PDMS) | Air | 0.648 | 0.935 | -42.5 | 125.800003 | 5 | 0.000223 | 0.15 | 1.71128 | 1.41268 | 0.412 | 1.736 | 1.51138 | 1.52046 | 0.000054 | 59.599998 | 68.760002 | 0.000005 | 4.61 | 4.14 | 4.36 | 1,260 | 1,625 | FDTD | 1.26 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.971 | 0.28 | -4.1 | 199.600006 | 5 | 0.000013 | 0.25 | 1.5669 | 1.05386 | 1.153 | 2.534 | 1.61415 | 1.6182 | 0.00002 | 51.25 | 30.18 | 0.000004 | 1.17 | 1 | 0.83 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.56 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 0.81 | 0.636 | -31.299999 | 89.900002 | 1 | 0.000001 | 1.37 | 1.85962 | 1.34373 | 0.122 | 0.679 | 1.65586 | 1.66492 | 0.000075 | 74.120003 | 85.349998 | 0.000003 | 0.6 | 0.43 | 0.11 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.17 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.543 | 0.907 | -22.299999 | 181.199997 | 10 | 0.000278 | 0.18 | 1.91013 | 1.1685 | 0.281 | 1.713 | 1.94944 | 1.95368 | 0.000021 | 66.879997 | 38.470001 | 0.000002 | 1.57 | 1.37 | 1.3 | 1,260 | 1,625 | FDTD | 4.26 |
Silicon Nitride (Si₃N₄) | Air | 1.372 | 0.841 | -2.9 | 108.699997 | 10 | 0.000003 | 19.83 | 1.53119 | 1.45887 | 0.55 | 1.241 | 1.81636 | 1.81773 | 0.000012 | 54.610001 | 60.150002 | 0.000001 | 9.61 | 9.31 | 9.14 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.08 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.965 | 0.22 | -46.099998 | 158.5 | 10 | 0.000001 | 1.5 | 1.49943 | 1.27185 | 1.36 | 1.839 | 1.84364 | 1.84892 | 0.000026 | 86.080002 | 42.799999 | 0.000004 | 3.9 | 3.63 | 3.66 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.38 |
SU-8 | Silicon Dioxide (SiO₂) | 1.991 | 0.591 | -37.799999 | 123 | 5 | 0.000011 | 0.27 | 1.63638 | 1.40608 | 0.167 | 0.547 | 1.69705 | 1.70358 | 0.000041 | 81.559998 | 25.969999 | 0.000003 | 2.55 | 2.26 | 2.45 | 1,260 | 1,625 | FDTD | 0.12 |
Polymethyl Methacrylate (PMMA) | Air | 1.601 | 0.265 | -33 | 189.600006 | 1 | 0.000007 | 0.23 | 1.89103 | 1.03284 | 1.162 | 1.521 | 1.44039 | 1.44973 | 0.000042 | 72.660004 | 83.540001 | 0.000003 | 7.96 | 7.66 | 7.68 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.56 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.875 | 0.719 | 8.3 | 189.5 | 5 | 0.000012 | 0.25 | 1.81447 | 1.33896 | 1.539 | 1.902 | 1.89335 | 1.89537 | 0.000011 | 72.580002 | 68.529999 | 0.000001 | 2.8 | 2.43 | 2.43 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.38 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.172 | 0.663 | 1.4 | 151.899994 | 10 | 0.000014 | 0.22 | 1.48859 | 1.37396 | 2.176 | 3.616 | 1.87892 | 1.88843 | 0.000063 | 75.330002 | 68.900002 | 0.000002 | 3.02 | 2.72 | 2.8 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.34 |
Polymethyl Methacrylate (PMMA) | Air | 0.918 | 0.443 | -38.599998 | 189.199997 | 5 | 0.000009 | 0.22 | 1.42295 | 1.22404 | 1.718 | 2.202 | 1.99979 | 2.00318 | 0.000015 | 88.330002 | 24.309999 | 0.000002 | 3.25 | 3.02 | 2.92 | 1,260 | 1,625 | FDTD | 4.18 |
Subsets and Splits