waveguide_material
stringclasses 5
values | cladding_material
stringclasses 2
values | waveguide_width
float32 0.5
2
| waveguide_height
float32 0.2
1
| temperature_min
float32 -50
20
| temperature_max
float32 80
200
| temperature_step
float32 1
10
| thermal_expansion_coefficient
float32 0
0
| thermal_conductivity
float32 0.15
20
| refractive_index_core
float32 1.4
2
| refractive_index_cladding
float32 1
1.5
| propagation_loss_min
float32 0.1
3
| propagation_loss_max
float32 0.21
4.5
| effective_index_min
float32 1.4
2
| effective_index_max
float32 1.4
2.01
| dn_dT
float32 0
0
| thermal_tuning_efficiency
float32 50
90
| thermal_stress
float32 10
100
| strain_rate
float32 0
0
| optical_power_input
float32 0.5
10
| optical_power_output_min
float32 0
9.89
| optical_power_output_max
float32 0
9.89
| wavelength_min
float32 1.26k
1.26k
| wavelength_max
float32 1.63k
1.63k
| simulation_model
stringclasses 2
values | measurement_uncertainty
float32 0.1
5
|
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
Polymethyl Methacrylate (PMMA) | Air | 1.946 | 0.783 | -0.5 | 143.300003 | 5 | 0.000007 | 0.24 | 1.4037 | 1.23423 | 1.816 | 2.616 | 1.45284 | 1.45541 | 0.000018 | 54.48 | 50.419998 | 0.000002 | 4.17 | 3.79 | 3.71 | 1,260 | 1,625 | FDTD | 4.63 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.979 | 0.42 | -41.200001 | 160.300003 | 5 | 0.000135 | 0.19 | 1.77472 | 1.15462 | 2.629 | 3.691 | 1.4644 | 1.47146 | 0.000035 | 89.260002 | 78.07 | 0.000004 | 8.43 | 8.21 | 8.06 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.99 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.569 | 0.646 | 6.4 | 84.5 | 1 | 0.000001 | 1.34 | 1.42622 | 1.41953 | 1.051 | 1.81 | 1.55079 | 1.55574 | 0.000063 | 56.310001 | 33.349998 | 0.000001 | 7.43 | 7 | 7.05 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.66 |
Polydimethylsiloxane (PDMS) | Air | 1.492 | 0.428 | -46.599998 | 171.100006 | 10 | 0.000298 | 0.16 | 1.74861 | 1.37394 | 0.191 | 0.695 | 1.90512 | 1.90772 | 0.000012 | 85.32 | 22.09 | 0.000001 | 6.53 | 6.13 | 6.22 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.91 |
SU-8 | Silicon Dioxide (SiO₂) | 0.684 | 0.9 | -5.7 | 101.099998 | 1 | 0.00001 | 0.26 | 1.51371 | 1.15588 | 0.605 | 1.682 | 1.81676 | 1.82142 | 0.000044 | 52.790001 | 93.419998 | 0.000002 | 4.06 | 3.94 | 3.91 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.54 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 0.531 | 0.924 | -18.5 | 86.400002 | 1 | 0.000267 | 0.17 | 1.90368 | 1.14411 | 1.728 | 2.765 | 1.96004 | 1.96903 | 0.000086 | 53.18 | 77.360001 | 0.000003 | 6.64 | 6.43 | 6.31 | 1,260 | 1,625 | FDTD | 4.38 |
Polymethyl Methacrylate (PMMA) | Air | 1.404 | 0.688 | 16.5 | 121.5 | 1 | 0.000013 | 0.22 | 1.67683 | 1.21018 | 0.91 | 2.142 | 1.87622 | 1.87777 | 0.000015 | 80.75 | 41.07 | 0.000004 | 9.95 | 9.82 | 9.54 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.99 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.381 | 0.82 | -33.700001 | 117.400002 | 5 | 0.000142 | 0.17 | 1.48882 | 1.2271 | 0.988 | 2.382 | 1.90764 | 1.91517 | 0.00005 | 80.720001 | 63.59 | 0 | 5.7 | 5.23 | 5.23 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.58 |
SU-8 | Silicon Dioxide (SiO₂) | 1.381 | 0.871 | -26.299999 | 160.300003 | 5 | 0.000006 | 0.26 | 1.7439 | 1.24836 | 2.721 | 3.232 | 1.44501 | 1.44916 | 0.000022 | 75.449997 | 27.799999 | 0 | 6.88 | 6.55 | 6.49 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.21 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.452 | 0.939 | -45.900002 | 105.099998 | 10 | 0.000003 | 19.49 | 1.85415 | 1.31598 | 1.37 | 2.086 | 1.42095 | 1.42631 | 0.000036 | 84.5 | 54.560001 | 0.000001 | 2.41 | 2.23 | 2.19 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.03 |
Polydimethylsiloxane (PDMS) | Air | 0.921 | 0.336 | -32.299999 | 156.100006 | 1 | 0.000104 | 0.17 | 1.46129 | 1.12979 | 0.475 | 1.644 | 1.99898 | 2.00289 | 0.000021 | 77.010002 | 91.239998 | 0.000004 | 4.44 | 4.08 | 4.2 | 1,260 | 1,625 | FDTD | 0.2 |
SU-8 | Air | 0.897 | 0.553 | -42.200001 | 158.800003 | 1 | 0.00001 | 0.27 | 1.56297 | 1.43584 | 2.756 | 3.069 | 1.64489 | 1.64612 | 0.000006 | 80 | 81.93 | 0.000005 | 8.21 | 7.8 | 7.9 | 1,260 | 1,625 | FDTD | 4.84 |
Polydimethylsiloxane (PDMS) | Air | 0.987 | 0.427 | -46.400002 | 165.100006 | 1 | 0.000127 | 0.18 | 1.77281 | 1.46561 | 0.973 | 2.076 | 1.69921 | 1.70919 | 0.000047 | 53.48 | 14.94 | 0.000004 | 1.24 | 0.78 | 1.12 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.16 |
Silicon Dioxide (SiO₂) | Air | 1.863 | 0.285 | -14 | 197.699997 | 10 | 0.000001 | 1.4 | 1.67956 | 1.14525 | 0.587 | 1.241 | 1.74526 | 1.75046 | 0.000025 | 86.800003 | 38.560001 | 0.000002 | 6.41 | 6.12 | 6.19 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.75 |
Polymethyl Methacrylate (PMMA) | Air | 1.264 | 0.904 | -28.799999 | 122.199997 | 5 | 0.000012 | 0.19 | 1.48805 | 1.0093 | 1.021 | 1.346 | 1.51232 | 1.52101 | 0.000058 | 83.879997 | 72.699997 | 0.000001 | 6.26 | 6 | 6.15 | 1,260 | 1,625 | FDTD | 2.3 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.574 | 0.505 | -1.6 | 176.199997 | 5 | 0.000003 | 17 | 1.40222 | 1.08912 | 0.104 | 0.906 | 1.96772 | 1.97461 | 0.000039 | 68.910004 | 28.5 | 0.000004 | 3.17 | 2.76 | 2.98 | 1,260 | 1,625 | FDTD | 2.25 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.553 | 0.364 | -18.700001 | 198.300003 | 5 | 0.000013 | 0.2 | 1.55789 | 1.15628 | 1.335 | 1.529 | 1.82938 | 1.83428 | 0.000023 | 55.860001 | 38.32 | 0.000002 | 4.53 | 4.1 | 4.13 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.91 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.562 | 0.415 | -27.200001 | 180.800003 | 10 | 0.000003 | 16.530001 | 1.65682 | 1.23752 | 0.249 | 1.597 | 1.7671 | 1.77462 | 0.000036 | 82.269997 | 89.489998 | 0.000003 | 5.08 | 4.74 | 4.86 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.49 |
Silicon Dioxide (SiO₂) | Air | 1.261 | 0.92 | -13 | 129.100006 | 5 | 0.000001 | 1.37 | 1.65534 | 1.19094 | 2.489 | 3.844 | 1.66243 | 1.66772 | 0.000037 | 76.129997 | 88.150002 | 0.000002 | 3.63 | 3.45 | 3.37 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.66 |
Silicon Dioxide (SiO₂) | Air | 1.029 | 0.86 | -14.2 | 99.5 | 5 | 0.000001 | 1.47 | 1.47548 | 1.40304 | 0.214 | 1.595 | 1.51657 | 1.52521 | 0.000076 | 87.489998 | 56.130001 | 0.000002 | 2.15 | 1.88 | 1.96 | 1,260 | 1,625 | FDTD | 1.12 |
SU-8 | Silicon Dioxide (SiO₂) | 0.984 | 0.669 | -29.299999 | 104.400002 | 5 | 0.000007 | 0.25 | 1.84087 | 1.20775 | 1.788 | 2.41 | 1.65884 | 1.66029 | 0.000011 | 60.32 | 90.68 | 0.000001 | 3.22 | 3.02 | 2.86 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.63 |
SU-8 | Air | 0.623 | 0.922 | -21.700001 | 137 | 5 | 0.000007 | 0.27 | 1.76882 | 1.2635 | 0.269 | 1.66 | 1.6595 | 1.66928 | 0.000062 | 65 | 41.009998 | 0.000002 | 8.91 | 8.55 | 8.74 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.46 |
SU-8 | Air | 0.628 | 0.792 | 3.4 | 148.800003 | 1 | 0.000011 | 0.24 | 1.94494 | 1.43489 | 0.947 | 2.28 | 1.81567 | 1.81801 | 0.000016 | 81.660004 | 73.93 | 0.000004 | 4.82 | 4.64 | 4.54 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.92 |
Silicon Dioxide (SiO₂) | Air | 0.694 | 0.75 | -9 | 83.800003 | 10 | 0 | 1.31 | 1.61453 | 1.39473 | 1.336 | 2.345 | 1.55142 | 1.55416 | 0.00003 | 89.709999 | 50.779999 | 0.000004 | 2.35 | 1.87 | 2.16 | 1,260 | 1,625 | FDTD | 1.22 |
Polymethyl Methacrylate (PMMA) | Air | 1.941 | 0.923 | 13.3 | 175.899994 | 1 | 0.000007 | 0.22 | 1.43428 | 1.38694 | 0.382 | 1.256 | 1.99314 | 1.99795 | 0.00003 | 87.910004 | 39.5 | 0.000001 | 9.43 | 8.94 | 8.96 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.41 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.497 | 0.768 | -1.5 | 180.100006 | 5 | 0.000177 | 0.19 | 1.92656 | 1.35663 | 2.977 | 3.939 | 1.74876 | 1.75653 | 0.000043 | 83.389999 | 64.610001 | 0.000002 | 8.86 | 8.42 | 8.41 | 1,260 | 1,625 | FDTD | 3.25 |
Silicon Nitride (Si₃N₄) | Air | 1.16 | 0.578 | -30.4 | 97.400002 | 1 | 0.000003 | 16.48 | 1.72347 | 1.1933 | 2.295 | 2.744 | 1.83312 | 1.838 | 0.000038 | 77.980003 | 89.160004 | 0.000001 | 9.58 | 9.2 | 9.14 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.36 |
SU-8 | Silicon Dioxide (SiO₂) | 0.949 | 0.967 | -31.9 | 126.099998 | 10 | 0.000008 | 0.29 | 1.54095 | 1.32496 | 1.533 | 2.448 | 1.6522 | 1.65491 | 0.000017 | 88.779999 | 65.610001 | 0.000003 | 2.79 | 2.54 | 2.62 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.8 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.586 | 0.645 | -17.1 | 132.699997 | 1 | 0.000008 | 0.24 | 1.85548 | 1.29982 | 0.892 | 1.571 | 1.65301 | 1.66286 | 0.000066 | 80.690002 | 59.880001 | 0.000004 | 0.78 | 0.65 | 0.65 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.27 |
Polymethyl Methacrylate (PMMA) | Air | 1.201 | 0.546 | -9 | 87.099998 | 1 | 0.000013 | 0.2 | 1.92855 | 1.4705 | 2.142 | 3.411 | 1.92479 | 1.92878 | 0.000042 | 74.970001 | 27.969999 | 0.000003 | 7.87 | 7.44 | 7.39 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.88 |
SU-8 | Silicon Dioxide (SiO₂) | 1.693 | 0.835 | 9.2 | 162.600006 | 1 | 0.000012 | 0.21 | 1.90803 | 1.42082 | 1.5 | 1.662 | 1.53005 | 1.53831 | 0.000054 | 63.59 | 26.43 | 0.000004 | 3.65 | 3.23 | 3.51 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.22 |
SU-8 | Air | 1.996 | 0.958 | -6.3 | 124.599998 | 1 | 0.000011 | 0.27 | 1.80091 | 1.10318 | 1.49 | 1.703 | 1.71202 | 1.71591 | 0.00003 | 58.48 | 52.68 | 0.000003 | 0.72 | 0.52 | 0.3 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.63 |
Polydimethylsiloxane (PDMS) | Air | 0.929 | 0.467 | 19.4 | 151 | 10 | 0.000254 | 0.18 | 1.86046 | 1.37614 | 1.452 | 1.655 | 1.61705 | 1.6194 | 0.000018 | 75.040001 | 65.709999 | 0.000001 | 3.43 | 3.33 | 3.13 | 1,260 | 1,625 | FDTD | 3.62 |
SU-8 | Air | 1.209 | 0.787 | -46.900002 | 106.099998 | 10 | 0.00001 | 0.25 | 1.95651 | 1.39932 | 1.301 | 2.174 | 1.70408 | 1.7071 | 0.00002 | 57.650002 | 22.07 | 0.000003 | 3.73 | 3.42 | 3.62 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.16 |
Polymethyl Methacrylate (PMMA) | Air | 1.111 | 0.693 | -8.5 | 86.099998 | 10 | 0.000013 | 0.19 | 1.50346 | 1.27698 | 2.421 | 2.951 | 1.56433 | 1.57412 | 0.000103 | 81.040001 | 47.48 | 0.000002 | 3.74 | 3.28 | 3.4 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.48 |
Polydimethylsiloxane (PDMS) | Air | 1.127 | 0.319 | -27.799999 | 188.399994 | 10 | 0.000116 | 0.2 | 1.83416 | 1.31519 | 2.303 | 2.51 | 1.52124 | 1.52853 | 0.000034 | 81.839996 | 90.709999 | 0 | 4.06 | 3.79 | 3.73 | 1,260 | 1,625 | FDTD | 4.25 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.601 | 0.778 | -22 | 143.199997 | 10 | 0.000003 | 17.049999 | 1.41584 | 1.02577 | 0.295 | 0.554 | 1.80812 | 1.81128 | 0.000019 | 60.759998 | 24.16 | 0.000001 | 2.91 | 2.74 | 2.61 | 1,260 | 1,625 | FDTD | 0.89 |
SU-8 | Air | 1.924 | 0.884 | 1 | 142.899994 | 10 | 0.000009 | 0.24 | 1.48806 | 1.08996 | 2.7 | 3.878 | 1.73389 | 1.74102 | 0.00005 | 77.879997 | 86.690002 | 0.000001 | 0.88 | 0.44 | 0.41 | 1,260 | 1,625 | FDTD | 3.89 |
Polymethyl Methacrylate (PMMA) | Air | 1.537 | 0.94 | -21 | 188.100006 | 10 | 0.000009 | 0.24 | 1.795 | 1.41823 | 0.417 | 0.893 | 1.45354 | 1.45617 | 0.000013 | 66.209999 | 26.18 | 0.000004 | 7.45 | 7.09 | 7.2 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.65 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.902 | 0.42 | 6.4 | 184.300003 | 10 | 0.000014 | 0.23 | 1.47637 | 1.13578 | 1.777 | 3.054 | 1.54957 | 1.55141 | 0.00001 | 81.860001 | 30.190001 | 0.000005 | 1.54 | 1.43 | 1.11 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.15 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.093 | 0.938 | -17.5 | 117.400002 | 1 | 0.00001 | 0.22 | 1.5382 | 1.10899 | 2.195 | 2.469 | 1.43932 | 1.44528 | 0.000044 | 51.52 | 40.09 | 0.000005 | 0.7 | 0.5 | 0.34 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.41 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.082 | 0.866 | -34.400002 | 154.5 | 10 | 0.000152 | 0.17 | 1.6206 | 1.39165 | 2.25 | 2.465 | 1.74863 | 1.75094 | 0.000012 | 58.419998 | 24.5 | 0.000001 | 8.59 | 8.13 | 8.31 | 1,260 | 1,625 | FDTD | 3.56 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.164 | 0.44 | -5.8 | 125.5 | 5 | 0.000007 | 0.21 | 1.5014 | 1.19198 | 2.371 | 3.704 | 1.72669 | 1.72922 | 0.000019 | 83.989998 | 22.09 | 0.000004 | 2.6 | 2.21 | 2.16 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.65 |
Polydimethylsiloxane (PDMS) | Air | 1.799 | 0.964 | -17.1 | 194.300003 | 5 | 0.000165 | 0.2 | 1.90254 | 1.43171 | 0.556 | 0.694 | 1.53923 | 1.54266 | 0.000016 | 50.669998 | 60.720001 | 0.000001 | 1.46 | 1.31 | 1.18 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.41 |
Polymethyl Methacrylate (PMMA) | Air | 1.156 | 0.849 | -4.6 | 92 | 1 | 0.000013 | 0.21 | 1.95784 | 1.41597 | 1.201 | 2.091 | 1.48317 | 1.48636 | 0.000033 | 55.66 | 34.59 | 0.000003 | 2.46 | 1.99 | 2.04 | 1,260 | 1,625 | FDTD | 2.16 |
SU-8 | Silicon Dioxide (SiO₂) | 0.54 | 0.414 | -38.700001 | 110.5 | 1 | 0.000007 | 0.28 | 1.4908 | 1.01882 | 0.236 | 1.031 | 1.95184 | 1.9563 | 0.00003 | 79.209999 | 99.910004 | 0.000002 | 2.71 | 2.56 | 2.53 | 1,260 | 1,625 | FDTD | 3.82 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 0.518 | 0.724 | 15.6 | 91.400002 | 5 | 0.000001 | 1.48 | 1.81618 | 1.02489 | 1.107 | 2.585 | 1.51377 | 1.5207 | 0.000091 | 77.830002 | 61.75 | 0.000004 | 4.46 | 3.96 | 4.22 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.69 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.576 | 0.428 | 7.5 | 160.899994 | 1 | 0.000003 | 19.299999 | 1.72905 | 1.28008 | 0.69 | 2.035 | 1.43981 | 1.44209 | 0.000015 | 53.939999 | 43.52 | 0.000001 | 2.62 | 2.43 | 2.34 | 1,260 | 1,625 | FDTD | 0.49 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.068 | 0.588 | 2 | 127.099998 | 10 | 0.000249 | 0.15 | 1.41861 | 1.06026 | 0.477 | 1.251 | 1.48173 | 1.48401 | 0.000018 | 65.550003 | 41.470001 | 0.000003 | 5.12 | 4.86 | 4.78 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.61 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 0.946 | 0.806 | 6.2 | 138.600006 | 10 | 0.000189 | 0.19 | 1.80467 | 1.4775 | 2.458 | 2.845 | 1.89761 | 1.90558 | 0.00006 | 87.610001 | 31.959999 | 0.000004 | 4.29 | 3.99 | 3.97 | 1,260 | 1,625 | FDTD | 3.23 |
Polydimethylsiloxane (PDMS) | Air | 0.746 | 0.55 | -43.900002 | 106 | 10 | 0.000255 | 0.17 | 1.64853 | 1.42204 | 1.456 | 2.452 | 1.94528 | 1.95402 | 0.000058 | 58.689999 | 43.790001 | 0.000002 | 2.03 | 1.79 | 1.79 | 1,260 | 1,625 | FDTD | 3.77 |
Polymethyl Methacrylate (PMMA) | Air | 1.031 | 0.505 | -49.299999 | 168 | 1 | 0.000015 | 0.21 | 1.67317 | 1.16955 | 2.404 | 3.214 | 1.62842 | 1.63041 | 0.000009 | 57.299999 | 65.669998 | 0.000002 | 3.63 | 3.29 | 3.52 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.11 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.628 | 0.922 | -4.1 | 194.399994 | 5 | 0.000003 | 19.17 | 1.57602 | 1.35619 | 1.534 | 2.176 | 1.54367 | 1.55327 | 0.000048 | 85.459999 | 93.470001 | 0.000003 | 5.59 | 5.29 | 5.12 | 1,260 | 1,625 | FDTD | 2.35 |
Polymethyl Methacrylate (PMMA) | Air | 1.661 | 0.536 | 1.4 | 114.900002 | 10 | 0.000009 | 0.24 | 1.47434 | 1.05348 | 2.992 | 3.726 | 1.5567 | 1.56131 | 0.000041 | 61.900002 | 21.139999 | 0.000001 | 6.44 | 5.95 | 6.21 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.84 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.105 | 0.434 | 6.2 | 119.800003 | 5 | 0.000243 | 0.18 | 1.74151 | 1.24507 | 1.779 | 2.77 | 1.983 | 1.98444 | 0.000013 | 79.860001 | 71.779999 | 0.000005 | 5.11 | 4.71 | 4.99 | 1,260 | 1,625 | FDTD | 1.59 |
SU-8 | Air | 1.449 | 0.327 | -49 | 95.800003 | 10 | 0.00001 | 0.25 | 1.58996 | 1.29789 | 1.431 | 2.436 | 1.68091 | 1.68433 | 0.000024 | 71.769997 | 65.860001 | 0.000001 | 6.62 | 6.3 | 6.21 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.58 |
Silicon Nitride (Si₃N₄) | Air | 1.563 | 0.211 | -12.6 | 179.399994 | 5 | 0.000003 | 15.2 | 1.88417 | 1.16999 | 1.294 | 2.235 | 1.57701 | 1.58469 | 0.00004 | 87.870003 | 36.939999 | 0.000003 | 1.84 | 1.56 | 1.52 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.37 |
Polymethyl Methacrylate (PMMA) | Air | 1.802 | 0.87 | -17 | 119.900002 | 10 | 0.00001 | 0.23 | 1.53077 | 1.15389 | 2.62 | 3.55 | 1.55516 | 1.56016 | 0.000037 | 67.82 | 59.720001 | 0.000001 | 9.88 | 9.41 | 9.4 | 1,260 | 1,625 | FDTD | 3.91 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.818 | 0.734 | -49.5 | 167.100006 | 10 | 0.000003 | 15.5 | 1.68341 | 1.45663 | 0.46 | 1.067 | 1.57557 | 1.58484 | 0.000043 | 59.82 | 34.689999 | 0.000002 | 8.33 | 8.03 | 7.94 | 1,260 | 1,625 | FDTD | 0.32 |
Silicon Nitride (Si₃N₄) | Air | 1.059 | 0.832 | -36.599998 | 92.699997 | 1 | 0.000003 | 19.18 | 1.67407 | 1.17012 | 2.251 | 2.763 | 1.79704 | 1.80001 | 0.000023 | 82.980003 | 48.529999 | 0 | 9.21 | 8.93 | 8.87 | 1,260 | 1,625 | FDTD | 4.31 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.454 | 0.268 | -21.200001 | 106.5 | 5 | 0.00011 | 0.16 | 1.51756 | 1.35379 | 0.72 | 1.151 | 1.56405 | 1.57352 | 0.000074 | 53.599998 | 90.57 | 0.000003 | 4.65 | 4.49 | 4.15 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.56 |
SU-8 | Air | 1.42 | 0.397 | -32.599998 | 89.699997 | 5 | 0.000009 | 0.27 | 1.82918 | 1.45087 | 2.248 | 2.877 | 1.90241 | 1.90874 | 0.000052 | 57.889999 | 77.269997 | 0.000004 | 9.22 | 8.77 | 8.95 | 1,260 | 1,625 | FDTD | 1.45 |
Polymethyl Methacrylate (PMMA) | Air | 1.603 | 0.378 | -22.799999 | 121 | 5 | 0.000015 | 0.25 | 1.70724 | 1.03343 | 0.455 | 1.182 | 1.84678 | 1.85467 | 0.000055 | 66.139999 | 65.059998 | 0.000003 | 9.17 | 8.9 | 9 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.33 |
Silicon Dioxide (SiO₂) | Air | 0.838 | 0.208 | -35.5 | 84.699997 | 10 | 0.000001 | 1.36 | 1.91649 | 1.259 | 1.478 | 2.867 | 1.5745 | 1.58381 | 0.000077 | 70.580002 | 83.849998 | 0.000002 | 9.67 | 9.56 | 9.2 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.36 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.785 | 0.522 | -31.4 | 160.899994 | 5 | 0.000007 | 0.24 | 1.61918 | 1.03365 | 0.546 | 0.67 | 1.88266 | 1.88796 | 0.000028 | 68.849998 | 87.379997 | 0.000002 | 6.84 | 6.71 | 6.38 | 1,260 | 1,625 | FDTD | 2.59 |
Polydimethylsiloxane (PDMS) | Air | 1.068 | 0.645 | 19.6 | 107.800003 | 1 | 0.0001 | 0.2 | 1.71089 | 1.49675 | 2.911 | 3.868 | 1.59575 | 1.59995 | 0.000048 | 58.099998 | 11.78 | 0.000002 | 4.67 | 4.28 | 4.36 | 1,260 | 1,625 | FDTD | 2.47 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.875 | 0.28 | -31.200001 | 175.699997 | 1 | 0.000003 | 15.13 | 1.59852 | 1.40251 | 0.987 | 2.005 | 1.93369 | 1.94282 | 0.000044 | 66.419998 | 56.889999 | 0.000002 | 4.14 | 3.97 | 3.89 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.13 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.366 | 0.909 | 10.1 | 95.400002 | 10 | 0.000001 | 1.33 | 1.75436 | 1.08446 | 1.186 | 1.526 | 1.61188 | 1.61492 | 0.000036 | 59.630001 | 22.530001 | 0.000003 | 2.84 | 2.48 | 2.69 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.9 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 0.666 | 0.894 | 4.2 | 180.300003 | 10 | 0.000285 | 0.18 | 1.55704 | 1.17896 | 1.585 | 1.906 | 1.87397 | 1.88308 | 0.000052 | 65.550003 | 38.970001 | 0.000003 | 4.33 | 3.91 | 4.13 | 1,260 | 1,625 | FDTD | 3.51 |
Polymethyl Methacrylate (PMMA) | Air | 1.258 | 0.653 | -9.4 | 185.199997 | 5 | 0.000014 | 0.21 | 1.95068 | 1.34683 | 1.695 | 2.386 | 1.45107 | 1.45851 | 0.000038 | 72.709999 | 25.41 | 0.000005 | 3.94 | 3.83 | 3.78 | 1,260 | 1,625 | FDTD | 3.51 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.415 | 0.263 | 9.6 | 195 | 1 | 0.000003 | 15.27 | 1.7564 | 1.3443 | 0.515 | 1.366 | 1.8786 | 1.88185 | 0.000018 | 88.300003 | 41.82 | 0.000003 | 4.28 | 4.03 | 4 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.98 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 0.628 | 0.404 | -19.799999 | 142.199997 | 10 | 0.000001 | 1.44 | 1.97635 | 1.29013 | 0.153 | 0.569 | 1.71571 | 1.72127 | 0.000034 | 77.690002 | 54.950001 | 0.000001 | 7.24 | 6.93 | 6.77 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.5 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 0.811 | 0.357 | -45.200001 | 101.199997 | 1 | 0.000014 | 0.2 | 1.80714 | 1.19678 | 0.945 | 1.816 | 1.64356 | 1.64607 | 0.000017 | 68 | 99.150002 | 0.000003 | 5.67 | 5.49 | 5.3 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.88 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 0.627 | 0.562 | -21 | 134.399994 | 1 | 0.000111 | 0.19 | 1.68399 | 1.05492 | 1.404 | 1.821 | 1.90052 | 1.90992 | 0.00006 | 77.440002 | 53.939999 | 0.000002 | 5.65 | 5.26 | 5.41 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.35 |
Polydimethylsiloxane (PDMS) | Air | 1.734 | 0.437 | -28.5 | 82.599998 | 1 | 0.00028 | 0.18 | 1.7492 | 1.48 | 2.551 | 3.513 | 1.85055 | 1.85346 | 0.000026 | 59.639999 | 15.61 | 0.000001 | 0.76 | 0.29 | 0.36 | 1,260 | 1,625 | FDTD | 0.38 |
SU-8 | Silicon Dioxide (SiO₂) | 1.922 | 0.329 | -39.299999 | 154.199997 | 1 | 0.000009 | 0.26 | 1.72847 | 1.3337 | 2.557 | 2.811 | 1.5006 | 1.50814 | 0.000039 | 61.849998 | 69.279999 | 0.000005 | 9.22 | 8.93 | 8.99 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.35 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.899 | 0.568 | -30.4 | 195.300003 | 10 | 0.000001 | 1.33 | 1.8152 | 1.11748 | 2.363 | 2.54 | 1.44731 | 1.45728 | 0.000044 | 89.839996 | 77.160004 | 0.000001 | 0.99 | 0.6 | 0.52 | 1,260 | 1,625 | FDTD | 3.56 |
SU-8 | Silicon Dioxide (SiO₂) | 0.692 | 0.813 | -15.4 | 114.699997 | 10 | 0.00001 | 0.25 | 1.63488 | 1.33158 | 1.863 | 2.033 | 1.7875 | 1.79084 | 0.000026 | 60.950001 | 45.970001 | 0.000002 | 7.55 | 7.28 | 7.31 | 1,260 | 1,625 | FDTD | 3.6 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.563 | 0.785 | 10.3 | 161.899994 | 10 | 0.000003 | 17.68 | 1.57747 | 1.0231 | 1.52 | 2.779 | 1.50508 | 1.50926 | 0.000028 | 52.970001 | 60.119999 | 0.000001 | 2.1 | 1.85 | 1.87 | 1,260 | 1,625 | FDTD | 1.91 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.725 | 0.349 | 9.1 | 175.800003 | 1 | 0.000256 | 0.19 | 1.67882 | 1.29666 | 2.057 | 2.297 | 1.86113 | 1.86528 | 0.000025 | 86.510002 | 97.849998 | 0.000003 | 2.83 | 2.47 | 2.56 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.67 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.56 | 0.832 | 14.2 | 161.5 | 1 | 0.00001 | 0.19 | 1.76572 | 1.14609 | 0.554 | 1.584 | 1.77603 | 1.78526 | 0.000063 | 57.990002 | 43.540001 | 0.000003 | 7.47 | 6.99 | 7.04 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.47 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.076 | 0.391 | -30.5 | 192.5 | 1 | 0.000201 | 0.17 | 1.88516 | 1.2562 | 0.79 | 2.19 | 1.61671 | 1.62646 | 0.000044 | 73.279999 | 80.480003 | 0.000001 | 7.91 | 7.73 | 7.52 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.21 |
Polymethyl Methacrylate (PMMA) | Air | 1.696 | 0.376 | 14.1 | 151.100006 | 10 | 0.000013 | 0.21 | 1.86066 | 1.13033 | 1.397 | 1.644 | 1.68888 | 1.6931 | 0.000031 | 88.760002 | 69.529999 | 0.000003 | 1.56 | 1.07 | 1.32 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.98 |
Silicon Dioxide (SiO₂) | Air | 1.083 | 0.725 | 18.5 | 98.5 | 10 | 0.000001 | 1.34 | 1.54089 | 1.25111 | 2.128 | 3.125 | 1.86977 | 1.87462 | 0.000061 | 88.290001 | 99.879997 | 0.000003 | 7.47 | 7.3 | 7.36 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.76 |
Silicon Nitride (Si₃N₄) | Air | 0.961 | 0.343 | 11.3 | 123.900002 | 5 | 0.000003 | 19.620001 | 1.8698 | 1.02983 | 1.435 | 2.369 | 1.85605 | 1.86028 | 0.000038 | 82.580002 | 90 | 0.000003 | 6.29 | 5.86 | 5.88 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.47 |
SU-8 | Air | 0.974 | 0.347 | 2 | 120.699997 | 10 | 0.000012 | 0.29 | 1.40037 | 1.33435 | 0.121 | 1.424 | 1.42391 | 1.42974 | 0.000049 | 63.830002 | 82.099998 | 0.000002 | 5.97 | 5.53 | 5.8 | 1,260 | 1,625 | FDTD | 2.81 |
SU-8 | Silicon Dioxide (SiO₂) | 1.923 | 0.256 | -19.6 | 177.399994 | 10 | 0.000007 | 0.27 | 1.99028 | 1.05025 | 0.654 | 1.928 | 1.94341 | 1.95188 | 0.000043 | 62.849998 | 96.019997 | 0.000002 | 9.65 | 9.46 | 9.43 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.91 |
SU-8 | Air | 1.329 | 0.987 | -12.7 | 126.300003 | 10 | 0.000007 | 0.23 | 1.44127 | 1.08204 | 0.471 | 1.345 | 1.43825 | 1.44003 | 0.000013 | 79.830002 | 52.040001 | 0.000002 | 9.67 | 9.32 | 9.2 | 1,260 | 1,625 | FDTD | 0.63 |
Polydimethylsiloxane (PDMS) | Air | 1.294 | 0.697 | -15.4 | 162.5 | 1 | 0.000207 | 0.17 | 1.56397 | 1.42525 | 2.286 | 2.776 | 1.46228 | 1.46723 | 0.000028 | 61.240002 | 12.6 | 0.000004 | 1.68 | 1.36 | 1.55 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.6 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.973 | 0.959 | -37.299999 | 144.399994 | 10 | 0.000003 | 16.219999 | 1.68379 | 1.37247 | 2.11 | 3.575 | 1.90086 | 1.90722 | 0.000035 | 77.169998 | 79.220001 | 0.000001 | 1.72 | 1.42 | 1.32 | 1,260 | 1,625 | FDTD | 1.79 |
SU-8 | Silicon Dioxide (SiO₂) | 1.951 | 0.629 | -4.1 | 129 | 5 | 0.000007 | 0.22 | 1.82298 | 1.27117 | 2.583 | 3.608 | 1.76179 | 1.76807 | 0.000047 | 88.050003 | 17.75 | 0.000003 | 1.5 | 1.35 | 1.16 | 1,260 | 1,625 | FDTD | 3.9 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.7 | 0.466 | 15.2 | 188.100006 | 5 | 0.000001 | 1.31 | 1.46 | 1.24981 | 1.04 | 1.387 | 1.89833 | 1.90432 | 0.000035 | 73.360001 | 69.029999 | 0.000002 | 4.21 | 4.03 | 4.1 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.75 |
Silicon Dioxide (SiO₂) | Air | 1.83 | 0.298 | 7 | 113.900002 | 10 | 0.000001 | 1.43 | 1.60478 | 1.08792 | 0.102 | 0.29 | 1.75205 | 1.76152 | 0.000089 | 88.879997 | 52.43 | 0.000001 | 8.8 | 8.52 | 8.65 | 1,260 | 1,625 | FDTD | 2.86 |
Polymethyl Methacrylate (PMMA) | Air | 1.647 | 0.646 | -25.9 | 159.800003 | 1 | 0.000012 | 0.23 | 1.47726 | 1.13401 | 1.718 | 2.196 | 1.70046 | 1.70992 | 0.000051 | 88.080002 | 91.339996 | 0.000003 | 2.05 | 1.74 | 1.64 | 1,260 | 1,625 | FDTD | 3.14 |
SU-8 | Air | 0.638 | 0.805 | -35.799999 | 84.5 | 5 | 0.000008 | 0.26 | 1.57223 | 1.09252 | 0.64 | 0.883 | 1.77668 | 1.78579 | 0.000076 | 74.760002 | 66.43 | 0.000003 | 7.66 | 7.28 | 7.34 | 1,260 | 1,625 | FDTD | 3.49 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.292 | 0.236 | -7.1 | 142.100006 | 5 | 0.000227 | 0.16 | 1.43679 | 1.13985 | 0.114 | 1.244 | 1.51679 | 1.51808 | 0.000009 | 85.870003 | 73.139999 | 0.000004 | 2.08 | 1.68 | 1.75 | 1,260 | 1,625 | FDTD | 0.31 |
SU-8 | Silicon Dioxide (SiO₂) | 0.805 | 0.56 | -13.8 | 135 | 10 | 0.00001 | 0.26 | 1.52762 | 1.37203 | 2.408 | 3.16 | 1.99991 | 2.00823 | 0.000056 | 63.43 | 81.699997 | 0.000003 | 0.71 | 0.29 | 0.55 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.78 |
Polymethyl Methacrylate (PMMA) | Air | 1.698 | 0.65 | -28 | 107.699997 | 5 | 0.000008 | 0.2 | 1.52476 | 1.13822 | 1.038 | 1.991 | 1.98155 | 1.98296 | 0.00001 | 74.269997 | 49.490002 | 0.000002 | 0.94 | 0.47 | 0.81 | 1,260 | 1,625 | FDTD | 3.02 |
SU-8 | Air | 1.917 | 0.862 | -25.799999 | 86.400002 | 1 | 0.000008 | 0.3 | 1.67517 | 1.06188 | 1.469 | 2.848 | 1.92156 | 1.92802 | 0.000058 | 70.059998 | 29.809999 | 0 | 1.94 | 1.75 | 1.62 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.21 |
SU-8 | Silicon Dioxide (SiO₂) | 1.887 | 0.215 | 12 | 191.5 | 10 | 0.000007 | 0.22 | 1.82426 | 1.13499 | 2.674 | 3.648 | 1.92759 | 1.93328 | 0.000032 | 86.07 | 23.719999 | 0.000005 | 3.89 | 3.51 | 3.65 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.71 |
Subsets and Splits