waveguide_material
stringclasses 5
values | cladding_material
stringclasses 2
values | waveguide_width
float32 0.5
2
| waveguide_height
float32 0.2
1
| temperature_min
float32 -50
20
| temperature_max
float32 80
200
| temperature_step
float32 1
10
| thermal_expansion_coefficient
float32 0
0
| thermal_conductivity
float32 0.15
20
| refractive_index_core
float32 1.4
2
| refractive_index_cladding
float32 1
1.5
| propagation_loss_min
float32 0.1
3
| propagation_loss_max
float32 0.21
4.5
| effective_index_min
float32 1.4
2
| effective_index_max
float32 1.4
2.01
| dn_dT
float32 0
0
| thermal_tuning_efficiency
float32 50
90
| thermal_stress
float32 10
100
| strain_rate
float32 0
0
| optical_power_input
float32 0.5
10
| optical_power_output_min
float32 0
9.89
| optical_power_output_max
float32 0
9.89
| wavelength_min
float32 1.26k
1.26k
| wavelength_max
float32 1.63k
1.63k
| simulation_model
stringclasses 2
values | measurement_uncertainty
float32 0.1
5
|
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 0.912 | 0.569 | 17.700001 | 187.800003 | 5 | 0.000013 | 0.24 | 1.78304 | 1.44602 | 0.596 | 1.307 | 1.6533 | 1.65829 | 0.000029 | 85.480003 | 89.959999 | 0.000001 | 5.91 | 5.81 | 5.55 | 1,260 | 1,625 | FDTD | 1.13 |
SU-8 | Silicon Dioxide (SiO₂) | 1.649 | 0.36 | 12.7 | 171 | 1 | 0.000009 | 0.27 | 1.45083 | 1.07795 | 1.764 | 2.636 | 1.74149 | 1.74993 | 0.000053 | 55.23 | 75.370003 | 0.000001 | 8.91 | 8.47 | 8.49 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.74 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.11 | 0.738 | -17.299999 | 82.400002 | 10 | 0.000011 | 0.23 | 1.60667 | 1.11259 | 2.171 | 3.515 | 1.83521 | 1.84271 | 0.000075 | 65.209999 | 37.68 | 0.000001 | 5.73 | 5.38 | 5.52 | 1,260 | 1,625 | FDTD | 0.18 |
Polymethyl Methacrylate (PMMA) | Air | 1.353 | 0.255 | -29.9 | 156.300003 | 10 | 0.000011 | 0.2 | 1.47388 | 1.36772 | 1.627 | 2.352 | 1.53064 | 1.53555 | 0.000026 | 54.720001 | 74.059998 | 0.000002 | 7.93 | 7.57 | 7.58 | 1,260 | 1,625 | FDTD | 0.23 |
SU-8 | Silicon Dioxide (SiO₂) | 0.684 | 0.872 | -46.400002 | 194.800003 | 1 | 0.000008 | 0.23 | 1.45615 | 1.38356 | 2.427 | 3.539 | 1.70546 | 1.71502 | 0.00004 | 60.93 | 79.25 | 0.000003 | 4.37 | 4.25 | 4.07 | 1,260 | 1,625 | FDTD | 1.11 |
SU-8 | Air | 0.543 | 0.99 | -40.700001 | 80.699997 | 1 | 0.000009 | 0.24 | 1.46882 | 1.40873 | 2.078 | 2.987 | 1.58243 | 1.58653 | 0.000034 | 68.980003 | 69.309998 | 0.000002 | 0.8 | 0.43 | 0.64 | 1,260 | 1,625 | FDTD | 0.81 |
Silicon Nitride (Si₃N₄) | Air | 1.033 | 0.876 | 8.3 | 172 | 5 | 0.000003 | 15.71 | 1.85936 | 1.28679 | 1.221 | 1.84 | 1.59592 | 1.59848 | 0.000016 | 79.059998 | 42.34 | 0.000004 | 7.79 | 7.56 | 7.4 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.23 |
Polymethyl Methacrylate (PMMA) | Air | 0.575 | 0.939 | -35.200001 | 185.300003 | 10 | 0.000014 | 0.21 | 1.69925 | 1.25883 | 1.293 | 2.656 | 1.77295 | 1.77914 | 0.000028 | 79.220001 | 21.33 | 0.000002 | 8.37 | 8.09 | 8.11 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.23 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 0.986 | 0.66 | 17.200001 | 87.199997 | 10 | 0.000014 | 0.25 | 1.81026 | 1.37545 | 2.29 | 2.429 | 1.73449 | 1.74371 | 0.000132 | 50.869999 | 76.720001 | 0.000004 | 8.45 | 8.03 | 8.27 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.42 |
Polymethyl Methacrylate (PMMA) | Air | 1.044 | 0.884 | -39.400002 | 193.899994 | 5 | 0.000008 | 0.22 | 1.51515 | 1.48766 | 0.925 | 1.324 | 1.67855 | 1.68746 | 0.000038 | 60.57 | 97.089996 | 0.000004 | 3.87 | 3.63 | 3.41 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.95 |
Polymethyl Methacrylate (PMMA) | Air | 1.293 | 0.227 | 2.7 | 173 | 10 | 0.000008 | 0.24 | 1.5831 | 1.2976 | 0.654 | 1.219 | 1.92122 | 1.92269 | 0.000009 | 58.419998 | 36.73 | 0.000004 | 1.91 | 1.49 | 1.72 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.72 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.595 | 0.597 | -9.8 | 121.400002 | 1 | 0.000001 | 1.34 | 1.85795 | 1.1291 | 0.274 | 1.576 | 1.60325 | 1.61106 | 0.00006 | 62.91 | 88.949997 | 0 | 4.17 | 3.87 | 3.8 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.36 |
Polydimethylsiloxane (PDMS) | Air | 1.941 | 0.389 | -32.099998 | 100.800003 | 1 | 0.000263 | 0.16 | 1.77547 | 1.2234 | 2.408 | 3.773 | 1.7246 | 1.73265 | 0.000061 | 67.919998 | 50.82 | 0.000002 | 2.29 | 2.01 | 2.16 | 1,260 | 1,625 | FDTD | 1.51 |
SU-8 | Air | 1.794 | 0.234 | -37.299999 | 188.800003 | 5 | 0.000007 | 0.25 | 1.97883 | 1.23608 | 1.355 | 2.594 | 1.92617 | 1.92869 | 0.000011 | 80.360001 | 69.730003 | 0.000001 | 1.78 | 1.63 | 1.39 | 1,260 | 1,625 | FDTD | 0.14 |
Polydimethylsiloxane (PDMS) | Air | 1.604 | 0.991 | -39.200001 | 83.900002 | 5 | 0.000102 | 0.2 | 1.5436 | 1.18114 | 0.912 | 1.819 | 1.58861 | 1.59158 | 0.000024 | 70.639999 | 26.93 | 0.000005 | 8.74 | 8.41 | 8.34 | 1,260 | 1,625 | FDTD | 3.48 |
Silicon Nitride (Si₃N₄) | Air | 1.82 | 0.734 | -23.1 | 159.5 | 1 | 0.000003 | 15.38 | 1.79805 | 1.3934 | 1.814 | 2.111 | 1.93027 | 1.93613 | 0.000032 | 64.089996 | 69.849998 | 0.000004 | 4.44 | 4.2 | 4.18 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.8 |
Silicon Dioxide (SiO₂) | Air | 0.796 | 0.754 | 10.3 | 184.199997 | 5 | 0.000001 | 1.44 | 1.49649 | 1.48491 | 2.261 | 2.786 | 1.5271 | 1.5332 | 0.000035 | 87.68 | 52.790001 | 0.000003 | 9.76 | 9.57 | 9.6 | 1,260 | 1,625 | FDTD | 4.25 |
SU-8 | Silicon Dioxide (SiO₂) | 1.362 | 0.605 | -6.6 | 187 | 1 | 0.000009 | 0.24 | 1.76413 | 1.15881 | 1.979 | 3.366 | 1.82328 | 1.8309 | 0.000039 | 58.98 | 66.839996 | 0.000001 | 9.79 | 9.37 | 9.39 | 1,260 | 1,625 | FDTD | 0.42 |
Silicon Nitride (Si₃N₄) | Air | 1.686 | 0.365 | -5.6 | 129.199997 | 10 | 0.000003 | 16.09 | 1.54749 | 1.37977 | 0.524 | 1.95 | 1.88911 | 1.89412 | 0.000037 | 57.709999 | 52.52 | 0.000002 | 3.55 | 3.1 | 3.26 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.91 |
SU-8 | Silicon Dioxide (SiO₂) | 1.345 | 0.927 | 7.4 | 94.300003 | 10 | 0.000008 | 0.23 | 1.65146 | 1.2708 | 1.487 | 2.542 | 1.85564 | 1.85991 | 0.000049 | 88.379997 | 71.309998 | 0.000003 | 8.21 | 7.91 | 7.99 | 1,260 | 1,625 | FDTD | 0.34 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.854 | 0.797 | -46 | 179 | 5 | 0.00022 | 0.15 | 1.73652 | 1.08448 | 2.162 | 2.533 | 1.85732 | 1.86637 | 0.00004 | 69.510002 | 40.279999 | 0.000005 | 8.34 | 8.01 | 8.22 | 1,260 | 1,625 | Finite Element Method (FEM) | 5 |
Polymethyl Methacrylate (PMMA) | Air | 0.977 | 0.373 | 12.5 | 110.900002 | 5 | 0.000008 | 0.21 | 1.8659 | 1.38499 | 2.168 | 2.369 | 1.6523 | 1.65962 | 0.000074 | 68.809998 | 26.040001 | 0.000001 | 0.62 | 0.48 | 0.49 | 1,260 | 1,625 | FDTD | 2.59 |
SU-8 | Air | 0.523 | 0.906 | -1.5 | 182.199997 | 5 | 0.000009 | 0.29 | 1.90196 | 1.4874 | 0.252 | 0.512 | 1.78079 | 1.78901 | 0.000045 | 74.970001 | 45.16 | 0.000002 | 2.33 | 1.96 | 2.19 | 1,260 | 1,625 | FDTD | 3.38 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.207 | 0.646 | -13.4 | 173.199997 | 1 | 0.000206 | 0.18 | 1.95268 | 1.10507 | 2.879 | 3.541 | 1.48237 | 1.49027 | 0.000042 | 63.02 | 26.76 | 0.000002 | 9.45 | 9.15 | 9.3 | 1,260 | 1,625 | FDTD | 2.23 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.989 | 0.298 | -29.1 | 117.800003 | 10 | 0.000003 | 18.950001 | 1.50647 | 1.19985 | 2.115 | 3.433 | 1.76791 | 1.7694 | 0.00001 | 86.010002 | 20.91 | 0.000002 | 6.52 | 6.09 | 6.13 | 1,260 | 1,625 | FDTD | 2.16 |
SU-8 | Silicon Dioxide (SiO₂) | 1.733 | 0.871 | -7.7 | 182.899994 | 1 | 0.000009 | 0.22 | 1.90472 | 1.17157 | 0.776 | 1.516 | 1.67718 | 1.68614 | 0.000047 | 85.82 | 43.540001 | 0.000002 | 0.54 | 0.36 | 0.19 | 1,260 | 1,625 | FDTD | 4.3 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.521 | 0.736 | -26.4 | 89.900002 | 10 | 0.00028 | 0.2 | 1.56135 | 1.24353 | 1.185 | 2.658 | 1.91985 | 1.92346 | 0.000031 | 78.080002 | 36.790001 | 0.000002 | 8.13 | 7.78 | 7.81 | 1,260 | 1,625 | FDTD | 1.7 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.746 | 0.974 | 13.6 | 99.199997 | 1 | 0.000003 | 15.45 | 1.73157 | 1.2277 | 1.209 | 2.33 | 1.91018 | 1.91617 | 0.00007 | 52.200001 | 20.42 | 0.000004 | 4.14 | 4 | 3.69 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.84 |
Polydimethylsiloxane (PDMS) | Air | 1.392 | 0.864 | -26.200001 | 191.300003 | 10 | 0.000116 | 0.15 | 1.66446 | 1.32715 | 0.61 | 1.257 | 1.63068 | 1.63897 | 0.000038 | 76.050003 | 90.610001 | 0.000001 | 8.23 | 8.13 | 7.95 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.79 |
Polydimethylsiloxane (PDMS) | Air | 0.932 | 0.245 | -42.900002 | 134.199997 | 1 | 0.000283 | 0.17 | 1.80097 | 1.48096 | 2.718 | 3.039 | 1.93825 | 1.943 | 0.000027 | 67.779999 | 31.25 | 0.000004 | 2.26 | 1.96 | 2.05 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.76 |
Silicon Dioxide (SiO₂) | Air | 0.858 | 0.916 | 6.3 | 101.900002 | 5 | 0.000001 | 1.5 | 1.78284 | 1.45141 | 1.301 | 2.393 | 1.6811 | 1.68397 | 0.00003 | 62.77 | 52.889999 | 0.000001 | 1.99 | 1.87 | 1.83 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.91 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.193 | 0.805 | -44.799999 | 85.099998 | 5 | 0.000003 | 17.799999 | 1.55818 | 1.12364 | 0.176 | 0.76 | 1.55108 | 1.55386 | 0.000021 | 70.889999 | 80.769997 | 0.000002 | 0.89 | 0.4 | 0.48 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.1 |
Polydimethylsiloxane (PDMS) | Air | 1.961 | 0.689 | -20.700001 | 171.5 | 10 | 0.000159 | 0.19 | 1.83548 | 1.15048 | 0.859 | 1.632 | 1.85529 | 1.85818 | 0.000015 | 80.980003 | 67.669998 | 0 | 9.4 | 9.01 | 9.12 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.29 |
Polydimethylsiloxane (PDMS) | Air | 0.888 | 0.348 | -28.200001 | 118.699997 | 10 | 0.000255 | 0.17 | 1.96297 | 1.00713 | 2.87 | 3.118 | 1.47726 | 1.47964 | 0.000016 | 73 | 23.780001 | 0.000003 | 6.48 | 6 | 6.17 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.27 |
SU-8 | Silicon Dioxide (SiO₂) | 1.409 | 0.478 | 6.9 | 95.099998 | 10 | 0.000011 | 0.22 | 1.70908 | 1.13658 | 1.596 | 2.586 | 1.50306 | 1.51118 | 0.000092 | 87.629997 | 54.169998 | 0 | 3.89 | 3.45 | 3.5 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.49 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 0.732 | 0.904 | 14.2 | 87.800003 | 10 | 0.000014 | 0.24 | 1.47816 | 1.32877 | 1.599 | 2.277 | 1.99805 | 2.0064 | 0.000113 | 64.400002 | 37.279999 | 0.000001 | 6.8 | 6.68 | 6.3 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.26 |
Polymethyl Methacrylate (PMMA) | Air | 0.967 | 0.71 | -22.200001 | 144.800003 | 10 | 0.000015 | 0.23 | 1.91625 | 1.32784 | 1.975 | 2.472 | 1.45295 | 1.46291 | 0.00006 | 54.130001 | 35.57 | 0.000003 | 3.99 | 3.68 | 3.8 | 1,260 | 1,625 | FDTD | 1.75 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 0.926 | 0.7 | -44 | 194.899994 | 10 | 0.000276 | 0.19 | 1.80658 | 1.2061 | 0.923 | 1.343 | 1.9258 | 1.93411 | 0.000035 | 68.050003 | 65.860001 | 0.000001 | 1.13 | 0.64 | 0.9 | 1,260 | 1,625 | FDTD | 1.98 |
Silicon Dioxide (SiO₂) | Air | 0.612 | 0.478 | -7.5 | 161.300003 | 5 | 0.000001 | 1.37 | 1.75248 | 1.08825 | 2.734 | 3.392 | 1.70032 | 1.70911 | 0.000052 | 69.940002 | 70.360001 | 0.000004 | 3.94 | 3.63 | 3.72 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.17 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.665 | 0.807 | -14.1 | 149.199997 | 5 | 0.000003 | 19.719999 | 1.41756 | 1.39815 | 1.135 | 2.327 | 1.44812 | 1.45174 | 0.000022 | 68.470001 | 67.529999 | 0.000002 | 5.2 | 4.99 | 4.93 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.68 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.354 | 0.931 | -43.900002 | 118.599998 | 5 | 0.000008 | 0.19 | 1.50433 | 1.21112 | 1.501 | 2.594 | 1.89505 | 1.90028 | 0.000032 | 80.010002 | 30.91 | 0 | 3.26 | 2.81 | 2.78 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.2 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 0.623 | 0.231 | 11.9 | 155.199997 | 1 | 0.000001 | 1.49 | 1.82837 | 1.19088 | 1.924 | 2.445 | 1.52195 | 1.52499 | 0.000021 | 73.449997 | 71 | 0.000005 | 3.81 | 3.44 | 3.45 | 1,260 | 1,625 | FDTD | 1.31 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.876 | 0.791 | 16.700001 | 91.300003 | 10 | 0.000001 | 1.36 | 1.97515 | 1.23726 | 0.321 | 1.112 | 1.5922 | 1.59568 | 0.000047 | 81.489998 | 27.040001 | 0.000004 | 7.07 | 6.75 | 6.74 | 1,260 | 1,625 | FDTD | 4 |
Silicon Dioxide (SiO₂) | Air | 1.836 | 0.868 | 17.799999 | 83.800003 | 5 | 0.000001 | 1.42 | 1.99764 | 1.27297 | 2.362 | 3.391 | 1.84065 | 1.84603 | 0.000082 | 63.75 | 11.38 | 0.000003 | 1.98 | 1.59 | 1.76 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.49 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.491 | 0.834 | 8.3 | 80.599998 | 1 | 0.000246 | 0.17 | 1.84443 | 1.04331 | 2.326 | 2.984 | 1.70955 | 1.71949 | 0.000137 | 69.25 | 14.76 | 0.000001 | 0.66 | 0.29 | 0.36 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.19 |
Polydimethylsiloxane (PDMS) | Air | 0.901 | 0.366 | -24.200001 | 86.900002 | 5 | 0.000174 | 0.2 | 1.71136 | 1.14569 | 1.07 | 1.518 | 1.60935 | 1.61423 | 0.000044 | 85.769997 | 37.700001 | 0.000004 | 8.24 | 8.09 | 7.91 | 1,260 | 1,625 | FDTD | 4.41 |
Polydimethylsiloxane (PDMS) | Air | 1.711 | 0.992 | -20.700001 | 170.399994 | 10 | 0.00017 | 0.19 | 1.64924 | 1.09211 | 0.281 | 1.64 | 1.6476 | 1.65028 | 0.000014 | 81.849998 | 85.620003 | 0 | 0.64 | 0.17 | 0.25 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.64 |
Polydimethylsiloxane (PDMS) | Air | 1.317 | 0.4 | -9.8 | 107.099998 | 10 | 0.000242 | 0.16 | 1.7038 | 1.3657 | 1.37 | 2.253 | 1.60187 | 1.60685 | 0.000043 | 70.400002 | 11.1 | 0.000003 | 2.79 | 2.46 | 2.51 | 1,260 | 1,625 | FDTD | 4.69 |
Polydimethylsiloxane (PDMS) | Air | 2 | 0.76 | -45.5 | 85.099998 | 5 | 0.000197 | 0.17 | 1.59423 | 1.3138 | 1.532 | 1.735 | 1.95525 | 1.96518 | 0.000076 | 60.02 | 72.010002 | 0.000002 | 1.36 | 1.14 | 1.17 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.97 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.867 | 0.802 | 7.2 | 174.699997 | 5 | 0.000277 | 0.16 | 1.74626 | 1.28306 | 2.525 | 2.915 | 1.55936 | 1.56296 | 0.000021 | 53.02 | 32.98 | 0.000002 | 6.31 | 6.11 | 5.98 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.49 |
SU-8 | Air | 1.909 | 0.796 | 9.9 | 139.300003 | 1 | 0.000009 | 0.28 | 1.52473 | 1.27386 | 2.089 | 3.564 | 1.73086 | 1.73813 | 0.000056 | 67.400002 | 92.099998 | 0.000003 | 7.75 | 7.47 | 7.41 | 1,260 | 1,625 | FDTD | 2.88 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.697 | 0.822 | -5.1 | 119.599998 | 10 | 0.000013 | 0.21 | 1.90796 | 1.05177 | 2.411 | 3.663 | 1.70756 | 1.71553 | 0.000064 | 59.639999 | 24.610001 | 0.000001 | 3.28 | 3.02 | 3.03 | 1,260 | 1,625 | FDTD | 2.32 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.886 | 0.807 | -28.700001 | 156.699997 | 1 | 0.000267 | 0.19 | 1.84961 | 1.31254 | 2.028 | 2.798 | 1.74142 | 1.74603 | 0.000025 | 52.650002 | 15.58 | 0.000002 | 7.88 | 7.58 | 7.67 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.9 |
SU-8 | Silicon Dioxide (SiO₂) | 0.553 | 0.654 | -17.1 | 92.300003 | 1 | 0.00001 | 0.3 | 1.66239 | 1.05292 | 0.959 | 1.95 | 1.49839 | 1.50803 | 0.000088 | 77.519997 | 91.860001 | 0 | 1.84 | 1.52 | 1.7 | 1,260 | 1,625 | FDTD | 2.35 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.721 | 0.902 | -47.400002 | 130.699997 | 1 | 0.000009 | 0.22 | 1.58423 | 1.11671 | 1.249 | 2.062 | 1.86851 | 1.87149 | 0.000017 | 83.239998 | 96.75 | 0.000001 | 8.23 | 7.76 | 7.96 | 1,260 | 1,625 | FDTD | 3.28 |
Silicon Dioxide (SiO₂) | Air | 0.651 | 0.935 | -1.6 | 92.699997 | 10 | 0.000001 | 1.36 | 1.62959 | 1.48348 | 2.775 | 3.213 | 1.46647 | 1.46805 | 0.000017 | 61.310001 | 19.1 | 0.000001 | 3.58 | 3.1 | 3.33 | 1,260 | 1,625 | FDTD | 4.18 |
Silicon Dioxide (SiO₂) | Air | 1.027 | 0.796 | 12 | 106.099998 | 1 | 0.000001 | 1.37 | 1.45302 | 1.19237 | 0.553 | 2.041 | 1.45265 | 1.45617 | 0.000037 | 59.549999 | 47.369999 | 0.000003 | 8.02 | 7.91 | 7.91 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.68 |
SU-8 | Silicon Dioxide (SiO₂) | 1.019 | 0.705 | -28.1 | 165.199997 | 1 | 0.000011 | 0.24 | 1.53309 | 1.29658 | 1.49 | 2.757 | 1.85341 | 1.85677 | 0.000017 | 70.75 | 27.73 | 0 | 5.98 | 5.84 | 5.51 | 1,260 | 1,625 | FDTD | 1.93 |
Polymethyl Methacrylate (PMMA) | Air | 1.184 | 0.305 | 17 | 94.199997 | 1 | 0.000013 | 0.2 | 1.97685 | 1.3593 | 2.06 | 2.419 | 1.50053 | 1.50606 | 0.000072 | 66.540001 | 80.82 | 0.000004 | 5.67 | 5.33 | 5.5 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.35 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.855 | 0.722 | -38.700001 | 155.399994 | 10 | 0.000265 | 0.15 | 1.42179 | 1.29103 | 1.039 | 1.394 | 1.81523 | 1.81839 | 0.000016 | 82.82 | 97.199997 | 0.000003 | 9.24 | 8.98 | 9.08 | 1,260 | 1,625 | FDTD | 4.33 |
Polymethyl Methacrylate (PMMA) | Air | 1.371 | 0.877 | -1.3 | 135.699997 | 10 | 0.000012 | 0.25 | 1.81563 | 1.34903 | 0.911 | 2.292 | 1.64646 | 1.65438 | 0.000058 | 53.82 | 76.68 | 0.000002 | 9.71 | 9.46 | 9.55 | 1,260 | 1,625 | FDTD | 1.83 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 0.815 | 0.5 | 4.5 | 176.399994 | 5 | 0.000166 | 0.15 | 1.46179 | 1.33535 | 1.069 | 1.709 | 1.46362 | 1.47328 | 0.000056 | 51.84 | 61.810001 | 0.000001 | 8.09 | 7.87 | 7.86 | 1,260 | 1,625 | FDTD | 3.49 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.318 | 0.21 | 13.2 | 149.600006 | 10 | 0.000001 | 1.42 | 1.55679 | 1.15123 | 2.27 | 3.203 | 1.87683 | 1.87803 | 0.000009 | 76.029999 | 12.43 | 0.000004 | 6.33 | 5.99 | 6.18 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.2 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 0.786 | 0.392 | -31.6 | 95.300003 | 5 | 0.000169 | 0.15 | 1.9797 | 1.08505 | 1.552 | 2.238 | 1.93338 | 1.93504 | 0.000013 | 53.52 | 58.639999 | 0.000002 | 8.6 | 8.13 | 8.44 | 1,260 | 1,625 | FDTD | 3.33 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.868 | 0.386 | -26.6 | 111.5 | 10 | 0.000003 | 17.48 | 1.52962 | 1.45842 | 2.852 | 4.049 | 1.98558 | 1.99418 | 0.000062 | 69.769997 | 36.41 | 0.000002 | 8.39 | 8.1 | 8.09 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.6 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.31 | 0.609 | -32.099998 | 200 | 1 | 0.000001 | 1.4 | 1.47933 | 1.32833 | 0.281 | 1.416 | 1.88154 | 1.88597 | 0.000019 | 53.189999 | 26.49 | 0.000003 | 7.81 | 7.45 | 7.54 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.25 |
Polydimethylsiloxane (PDMS) | Air | 0.919 | 0.665 | 5.5 | 140.600006 | 10 | 0.00027 | 0.19 | 1.73324 | 1.41887 | 0.736 | 0.987 | 1.83444 | 1.8438 | 0.000069 | 52.869999 | 71.480003 | 0.000001 | 3.62 | 3.22 | 3.16 | 1,260 | 1,625 | FDTD | 0.41 |
SU-8 | Silicon Dioxide (SiO₂) | 1.993 | 0.23 | -12.8 | 157 | 1 | 0.000011 | 0.2 | 1.98965 | 1.0214 | 1.327 | 1.812 | 1.87851 | 1.88592 | 0.000044 | 75.879997 | 23.440001 | 0.000005 | 5.81 | 5.38 | 5.37 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.28 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.933 | 0.887 | -43.799999 | 152.199997 | 10 | 0.000003 | 16.450001 | 1.77998 | 1.19715 | 0.803 | 1.592 | 1.55622 | 1.56146 | 0.000027 | 54.52 | 86.529999 | 0.000004 | 2.19 | 1.73 | 1.81 | 1,260 | 1,625 | FDTD | 1.87 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.23 | 0.939 | -37 | 182.199997 | 1 | 0.000105 | 0.19 | 1.45836 | 1.32905 | 0.481 | 1.898 | 1.65545 | 1.65973 | 0.00002 | 73.800003 | 52.970001 | 0 | 9.99 | 9.58 | 9.88 | 1,260 | 1,625 | FDTD | 3.92 |
SU-8 | Silicon Dioxide (SiO₂) | 1.949 | 0.502 | -13.4 | 190.5 | 5 | 0.000009 | 0.21 | 1.64296 | 1.37476 | 2.319 | 2.779 | 1.42115 | 1.42756 | 0.000031 | 85.129997 | 40.189999 | 0 | 6.78 | 6.38 | 6.41 | 1,260 | 1,625 | FDTD | 0.36 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.611 | 0.907 | 6.5 | 188 | 10 | 0.000003 | 15.83 | 1.67335 | 1.39322 | 1.405 | 1.874 | 1.871 | 1.8775 | 0.000036 | 50.700001 | 24.77 | 0.000003 | 3.65 | 3.41 | 3.48 | 1,260 | 1,625 | FDTD | 4.23 |
SU-8 | Air | 0.964 | 0.246 | 19.799999 | 171.699997 | 5 | 0.000012 | 0.21 | 1.83389 | 1.17469 | 2.116 | 3.029 | 1.61213 | 1.61746 | 0.000035 | 58.459999 | 89.550003 | 0.000004 | 6.99 | 6.79 | 6.76 | 1,260 | 1,625 | FDTD | 3.59 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.199 | 0.388 | -21.5 | 164 | 1 | 0.000003 | 17.01 | 1.74195 | 1.31107 | 0.539 | 0.672 | 1.4966 | 1.5063 | 0.000052 | 58.540001 | 69.470001 | 0.000001 | 0.54 | 0.31 | 0.43 | 1,260 | 1,625 | FDTD | 0.84 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 0.575 | 0.777 | -16.6 | 139.800003 | 5 | 0.000272 | 0.18 | 1.90791 | 1.36444 | 0.9 | 2.201 | 1.95625 | 1.96143 | 0.000033 | 68.870003 | 75.309998 | 0 | 7.32 | 7.06 | 7.14 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.25 |
SU-8 | Air | 1.757 | 0.793 | -8.1 | 193.600006 | 1 | 0.000007 | 0.24 | 1.77728 | 1.35246 | 2.707 | 3.937 | 1.41237 | 1.41695 | 0.000023 | 57.009998 | 55.599998 | 0.000004 | 3.2 | 2.98 | 2.79 | 1,260 | 1,625 | FDTD | 1.12 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 0.908 | 0.864 | 8.2 | 101.599998 | 10 | 0.000007 | 0.2 | 1.52366 | 1.31278 | 0.416 | 1.088 | 1.58876 | 1.59685 | 0.000087 | 50.32 | 58.66 | 0.000001 | 8.8 | 8.41 | 8.38 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.73 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.29 | 0.916 | 18.799999 | 91.099998 | 1 | 0.000001 | 1.41 | 1.58637 | 1.00517 | 1.622 | 1.915 | 1.40387 | 1.40807 | 0.000058 | 53.43 | 48.189999 | 0.000004 | 9.05 | 8.91 | 8.77 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.83 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.591 | 0.388 | 16.299999 | 95.699997 | 5 | 0.000003 | 17.639999 | 1.66542 | 1.00924 | 0.688 | 1.532 | 1.90939 | 1.91155 | 0.000027 | 83.360001 | 92.129997 | 0.000003 | 6.35 | 6.2 | 5.87 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.23 |
SU-8 | Silicon Dioxide (SiO₂) | 1.065 | 0.477 | -24.5 | 167.899994 | 1 | 0.000006 | 0.2 | 1.51714 | 1.22913 | 0.559 | 1.853 | 1.43832 | 1.44749 | 0.000048 | 54.209999 | 14.37 | 0.000003 | 5.04 | 4.76 | 4.73 | 1,260 | 1,625 | FDTD | 2.15 |
SU-8 | Silicon Dioxide (SiO₂) | 0.959 | 0.324 | -22.4 | 123.699997 | 1 | 0.000007 | 0.24 | 1.56752 | 1.40337 | 2.244 | 3.447 | 1.50943 | 1.51308 | 0.000025 | 81.580002 | 89.040001 | 0.000003 | 3.02 | 2.88 | 2.62 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.75 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.391 | 0.554 | -33.099998 | 147.699997 | 10 | 0.000014 | 0.22 | 1.79996 | 1.29306 | 1.615 | 1.971 | 1.44117 | 1.45089 | 0.000054 | 51.919998 | 47.169998 | 0.000004 | 4.51 | 4.41 | 4.13 | 1,260 | 1,625 | FDTD | 1.5 |
Silicon Nitride (Si₃N₄) | Air | 1.504 | 0.675 | -1.8 | 139.199997 | 5 | 0.000003 | 15.01 | 1.49879 | 1.16113 | 2.939 | 3.985 | 1.55772 | 1.56638 | 0.000061 | 89.199997 | 72.349998 | 0.000003 | 9.01 | 8.72 | 8.87 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.61 |
Silicon Nitride (Si₃N₄) | Air | 1.67 | 0.604 | 3.1 | 95 | 5 | 0.000003 | 18.459999 | 1.91778 | 1.31439 | 2.228 | 2.816 | 1.51941 | 1.52461 | 0.000057 | 55.900002 | 77.610001 | 0.000004 | 1.31 | 0.89 | 0.89 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.96 |
Silicon Dioxide (SiO₂) | Air | 0.737 | 0.208 | -36.400002 | 171.600006 | 5 | 0.000001 | 1.45 | 1.74532 | 1.07965 | 0.377 | 0.749 | 1.69289 | 1.69555 | 0.000013 | 80.269997 | 43.310001 | 0.000005 | 5.64 | 5.34 | 5.36 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.63 |
Silicon Dioxide (SiO₂) | Air | 1.791 | 0.653 | -7.5 | 150.300003 | 1 | 0.000001 | 1.3 | 1.74572 | 1.39323 | 2.845 | 3.871 | 1.7808 | 1.78537 | 0.000029 | 79.410004 | 33.450001 | 0.000003 | 9.71 | 9.29 | 9.21 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.16 |
Silicon Nitride (Si₃N₄) | Air | 0.584 | 0.382 | -47.400002 | 102.199997 | 5 | 0.000003 | 17.049999 | 1.51366 | 1.13078 | 0.697 | 1.403 | 1.66907 | 1.67547 | 0.000043 | 77.18 | 64.220001 | 0.000005 | 1 | 0.53 | 0.83 | 1,260 | 1,625 | FDTD | 4.49 |
Silicon Dioxide (SiO₂) | Air | 1.187 | 0.704 | -20.4 | 96.599998 | 10 | 0.000001 | 1.36 | 1.89471 | 1.33151 | 0.324 | 0.474 | 1.40529 | 1.41128 | 0.000051 | 86.919998 | 26.98 | 0.000002 | 5.17 | 4.76 | 4.84 | 1,260 | 1,625 | FDTD | 0.28 |
Silicon Dioxide (SiO₂) | Air | 1.383 | 0.469 | -5.6 | 105.599998 | 1 | 0.000001 | 1.42 | 1.84072 | 1.25523 | 1.255 | 2.298 | 1.86214 | 1.86507 | 0.000026 | 55.029999 | 91.379997 | 0.000001 | 0.53 | 0.34 | 0.34 | 1,260 | 1,625 | FDTD | 0.3 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.726 | 0.412 | 19.799999 | 99.400002 | 10 | 0.000013 | 0.23 | 1.96449 | 1.31555 | 1.647 | 2.276 | 1.66497 | 1.67045 | 0.000069 | 86.720001 | 29.75 | 0.000001 | 7.14 | 6.65 | 6.78 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.89 |
SU-8 | Air | 0.831 | 0.452 | -17.799999 | 129.199997 | 10 | 0.000008 | 0.22 | 1.84499 | 1.40773 | 1.195 | 1.552 | 1.5057 | 1.50717 | 0.00001 | 56.540001 | 10.2 | 0 | 3.29 | 2.96 | 2.93 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.98 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 0.531 | 0.492 | -35.700001 | 188.399994 | 10 | 0.000001 | 1.42 | 1.72931 | 1.15721 | 0.925 | 2.013 | 1.95285 | 1.95538 | 0.000011 | 88.309998 | 40.959999 | 0.000002 | 7.38 | 7.05 | 6.92 | 1,260 | 1,625 | Finite Element Method (FEM) | 4 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.806 | 0.431 | 0.3 | 80.199997 | 1 | 0.000003 | 19.860001 | 1.53962 | 1.26171 | 2.504 | 3.216 | 1.53885 | 1.54058 | 0.000022 | 76.75 | 98.370003 | 0.000002 | 5.54 | 5.32 | 5.06 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.42 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.27 | 0.703 | -33.900002 | 156 | 10 | 0.000217 | 0.16 | 1.60528 | 1.21568 | 0.141 | 0.982 | 1.73092 | 1.73864 | 0.000041 | 62.09 | 55.279999 | 0.000004 | 6.03 | 5.91 | 5.86 | 1,260 | 1,625 | FDTD | 0.57 |
Polydimethylsiloxane (PDMS) | Air | 1.522 | 0.386 | -16 | 120.099998 | 5 | 0.000243 | 0.2 | 1.57113 | 1.21342 | 1.875 | 2.731 | 1.8062 | 1.80791 | 0.000013 | 63.080002 | 67.150002 | 0.000001 | 3.55 | 3.07 | 3.35 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.72 |
Polydimethylsiloxane (PDMS) | Air | 0.698 | 0.467 | 7.4 | 117.199997 | 10 | 0.000169 | 0.2 | 1.83103 | 1.40549 | 1.88 | 2.031 | 1.4094 | 1.4146 | 0.000047 | 54.880001 | 36.950001 | 0.000002 | 5.53 | 5.26 | 5.4 | 1,260 | 1,625 | FDTD | 4.21 |
Polymethyl Methacrylate (PMMA) | Air | 1.593 | 0.517 | -9.6 | 140.600006 | 5 | 0.000012 | 0.23 | 1.82791 | 1.38792 | 1.549 | 1.787 | 1.93298 | 1.93409 | 0.000007 | 77.040001 | 70.190002 | 0.000005 | 2.75 | 2.6 | 2.6 | 1,260 | 1,625 | FDTD | 2.86 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.767 | 0.891 | -37.400002 | 171 | 10 | 0.000003 | 18.469999 | 1.90661 | 1.1725 | 1.803 | 2.952 | 1.68687 | 1.68799 | 0.000005 | 53.709999 | 58.790001 | 0.000005 | 4.28 | 4.17 | 3.91 | 1,260 | 1,625 | FDTD | 0.93 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.302 | 0.633 | -26.5 | 182.300003 | 5 | 0.000001 | 1.45 | 1.59265 | 1.14905 | 2.948 | 3.907 | 1.72366 | 1.72854 | 0.000023 | 51.490002 | 18.24 | 0.000002 | 1.73 | 1.35 | 1.57 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.36 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.095 | 0.988 | -45.299999 | 189.800003 | 5 | 0.000003 | 15.75 | 1.99542 | 1.04756 | 0.422 | 1.556 | 1.83928 | 1.84547 | 0.000026 | 89.5 | 83.040001 | 0.000001 | 7.78 | 7.67 | 7.39 | 1,260 | 1,625 | FDTD | 3.71 |