waveguide_material
stringclasses 5
values | cladding_material
stringclasses 2
values | waveguide_width
float32 0.5
2
| waveguide_height
float32 0.2
1
| temperature_min
float32 -50
20
| temperature_max
float32 80
200
| temperature_step
float32 1
10
| thermal_expansion_coefficient
float32 0
0
| thermal_conductivity
float32 0.15
20
| refractive_index_core
float32 1.4
2
| refractive_index_cladding
float32 1
1.5
| propagation_loss_min
float32 0.1
3
| propagation_loss_max
float32 0.21
4.5
| effective_index_min
float32 1.4
2
| effective_index_max
float32 1.4
2.01
| dn_dT
float32 0
0
| thermal_tuning_efficiency
float32 50
90
| thermal_stress
float32 10
100
| strain_rate
float32 0
0
| optical_power_input
float32 0.5
10
| optical_power_output_min
float32 0
9.89
| optical_power_output_max
float32 0
9.89
| wavelength_min
float32 1.26k
1.26k
| wavelength_max
float32 1.63k
1.63k
| simulation_model
stringclasses 2
values | measurement_uncertainty
float32 0.1
5
|
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
Silicon Dioxide (SiO₂) | Air | 1.724 | 0.672 | 1.7 | 139.5 | 1 | 0.000001 | 1.35 | 1.57824 | 1.00638 | 1.075 | 2.283 | 1.54539 | 1.54803 | 0.000019 | 59.360001 | 42.560001 | 0.000001 | 5.91 | 5.6 | 5.44 | 1,260 | 1,625 | FDTD | 0.51 |
Polydimethylsiloxane (PDMS) | Air | 1.753 | 0.723 | -7.4 | 113.300003 | 5 | 0.000112 | 0.19 | 1.57402 | 1.26475 | 1.477 | 2.886 | 1.63942 | 1.64789 | 0.00007 | 72.410004 | 96.050003 | 0 | 9.67 | 9.41 | 9.3 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.94 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.764 | 0.505 | -31.9 | 137.300003 | 5 | 0.000003 | 19.48 | 1.88945 | 1.35691 | 2.05 | 3.315 | 1.83717 | 1.84044 | 0.000019 | 81.989998 | 64.400002 | 0.000001 | 9.97 | 9.47 | 9.47 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.85 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 0.577 | 0.686 | -46.900002 | 161.699997 | 5 | 0.000164 | 0.15 | 1.86557 | 1.14497 | 1.998 | 3.381 | 1.40059 | 1.40663 | 0.000029 | 52.040001 | 86.849998 | 0.000004 | 9.46 | 9.11 | 9.15 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.8 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.889 | 0.718 | 18.5 | 143.5 | 10 | 0.000003 | 17.709999 | 1.68864 | 1.35085 | 1.074 | 1.406 | 1.91282 | 1.91968 | 0.000055 | 54.759998 | 36.049999 | 0.000002 | 4.15 | 3.67 | 3.92 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.88 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.899 | 0.866 | -21.200001 | 134.5 | 10 | 0.000003 | 16.719999 | 1.74187 | 1.08516 | 0.62 | 1.363 | 1.63131 | 1.63455 | 0.000021 | 71.629997 | 71.010002 | 0.000003 | 5.95 | 5.8 | 5.53 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.01 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.93 | 0.223 | -21.700001 | 139.399994 | 10 | 0.000001 | 1.31 | 1.56222 | 1.46409 | 2.103 | 3.259 | 1.84137 | 1.84238 | 0.000006 | 56.349998 | 62.150002 | 0.000004 | 4.28 | 4.08 | 3.97 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.33 |
Silicon Dioxide (SiO₂) | Air | 1.067 | 0.489 | 18.9 | 121.5 | 5 | 0.000001 | 1.47 | 1.484 | 1.47103 | 0.419 | 0.525 | 1.56081 | 1.56277 | 0.000019 | 50.139999 | 85.699997 | 0.000005 | 0.63 | 0.43 | 0.19 | 1,260 | 1,625 | FDTD | 4.04 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.3 | 0.288 | -30.299999 | 112.900002 | 1 | 0.000013 | 0.23 | 1.88559 | 1.26169 | 1.343 | 1.932 | 1.44492 | 1.44975 | 0.000034 | 51.060001 | 92.889999 | 0.000002 | 1.72 | 1.27 | 1.36 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.04 |
SU-8 | Silicon Dioxide (SiO₂) | 0.53 | 0.575 | -41.900002 | 176.5 | 1 | 0.00001 | 0.24 | 1.67988 | 1.11183 | 1.503 | 2.888 | 1.42621 | 1.42978 | 0.000016 | 64.620003 | 12.97 | 0.000003 | 2.16 | 1.79 | 2.01 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.99 |
SU-8 | Silicon Dioxide (SiO₂) | 1.787 | 0.816 | -31.5 | 121.800003 | 10 | 0.00001 | 0.28 | 1.87915 | 1.19256 | 2.393 | 3.776 | 1.71539 | 1.72222 | 0.000045 | 79.900002 | 78.389999 | 0.000004 | 8.13 | 7.8 | 7.89 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.03 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.959 | 0.817 | -22.200001 | 126.5 | 10 | 0.000163 | 0.17 | 1.74458 | 1.27871 | 1.951 | 2.744 | 1.59568 | 1.59707 | 0.000009 | 64 | 29.690001 | 0.000001 | 7.18 | 6.85 | 7.06 | 1,260 | 1,625 | FDTD | 1.11 |
Polydimethylsiloxane (PDMS) | Air | 1.91 | 0.814 | -28.4 | 122.699997 | 5 | 0.000137 | 0.16 | 1.54658 | 1.25644 | 1.471 | 2.632 | 1.89317 | 1.9004 | 0.000048 | 66.879997 | 54.360001 | 0.000005 | 3.84 | 3.66 | 3.6 | 1,260 | 1,625 | FDTD | 0.94 |
SU-8 | Silicon Dioxide (SiO₂) | 0.597 | 0.702 | -23.1 | 197.199997 | 5 | 0.00001 | 0.25 | 1.86792 | 1.48573 | 2.281 | 2.471 | 1.69465 | 1.70261 | 0.000036 | 76.370003 | 51.299999 | 0.000004 | 7.87 | 7.65 | 7.44 | 1,260 | 1,625 | FDTD | 0.34 |
SU-8 | Air | 1.929 | 0.703 | -6.6 | 166.300003 | 10 | 0.000011 | 0.29 | 1.52667 | 1.21939 | 2.576 | 3.684 | 1.51685 | 1.52658 | 0.000056 | 84.610001 | 37.799999 | 0.000005 | 1.32 | 0.96 | 0.87 | 1,260 | 1,625 | FDTD | 2.43 |
Silicon Dioxide (SiO₂) | Air | 0.605 | 0.984 | 13.8 | 147.800003 | 1 | 0.000001 | 1.34 | 1.67554 | 1.02649 | 1.788 | 2.361 | 1.72623 | 1.73216 | 0.000044 | 72.400002 | 45.25 | 0.000004 | 2.32 | 1.95 | 2.06 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.57 |
Silicon Nitride (Si₃N₄) | Air | 1.745 | 0.507 | 15.6 | 185.100006 | 10 | 0.000003 | 15.6 | 1.58492 | 1.37016 | 2.34 | 3.549 | 1.51299 | 1.52058 | 0.000045 | 56.380001 | 47.419998 | 0.000002 | 8.54 | 8.32 | 8.42 | 1,260 | 1,625 | FDTD | 1.05 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 0.71 | 0.834 | 15.8 | 186.399994 | 10 | 0.000001 | 1.33 | 1.94004 | 1.18715 | 1.221 | 2.332 | 1.4265 | 1.43398 | 0.000044 | 77.169998 | 51.650002 | 0.000004 | 4.75 | 4.53 | 4.64 | 1,260 | 1,625 | FDTD | 0.8 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 0.874 | 0.963 | -21.299999 | 140.5 | 10 | 0.00001 | 0.19 | 1.48269 | 1.03102 | 0.377 | 1.11 | 1.88894 | 1.89091 | 0.000012 | 79.25 | 92.18 | 0.000005 | 5.06 | 4.82 | 4.71 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.46 |
SU-8 | Silicon Dioxide (SiO₂) | 1.752 | 0.461 | -7.4 | 88.5 | 5 | 0.000009 | 0.28 | 1.91749 | 1.25823 | 1.205 | 1.517 | 1.92291 | 1.92928 | 0.000066 | 55.48 | 42.68 | 0 | 7.73 | 7.42 | 7.62 | 1,260 | 1,625 | FDTD | 4.79 |
Silicon Nitride (Si₃N₄) | Air | 1.194 | 0.884 | 2.3 | 111 | 10 | 0.000003 | 17.5 | 1.92342 | 1.20312 | 0.962 | 1.439 | 1.78153 | 1.78492 | 0.000031 | 77.580002 | 26.129999 | 0.000001 | 7.92 | 7.51 | 7.77 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.5 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.087 | 0.207 | -19.299999 | 117 | 10 | 0.000146 | 0.19 | 1.66663 | 1.47362 | 1.131 | 1.929 | 1.96554 | 1.96933 | 0.000028 | 60.27 | 62.990002 | 0.000003 | 9.59 | 9.16 | 9.31 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.28 |
SU-8 | Silicon Dioxide (SiO₂) | 1.89 | 0.639 | -25.200001 | 128.399994 | 10 | 0.000007 | 0.25 | 1.70292 | 1.24924 | 2.767 | 3.299 | 1.43096 | 1.43753 | 0.000043 | 86.330002 | 82.639999 | 0.000003 | 4.02 | 3.9 | 3.81 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.09 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.305 | 0.582 | -29.299999 | 178.199997 | 1 | 0.000278 | 0.18 | 1.79647 | 1.13583 | 0.606 | 1.794 | 1.48893 | 1.49433 | 0.000026 | 77.93 | 68.68 | 0.000005 | 4.89 | 4.65 | 4.74 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.91 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.41 | 0.356 | -12 | 183.199997 | 5 | 0.00001 | 0.23 | 1.96555 | 1.21736 | 1.691 | 2.935 | 1.81455 | 1.82163 | 0.000036 | 82.410004 | 30.440001 | 0.000005 | 8.75 | 8.44 | 8.59 | 1,260 | 1,625 | FDTD | 3.61 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.864 | 0.616 | 3.3 | 159.699997 | 10 | 0.000003 | 17.48 | 1.62443 | 1.13542 | 2.217 | 3.38 | 1.50277 | 1.50414 | 0.000009 | 82.110001 | 52.169998 | 0 | 9.8 | 9.66 | 9.69 | 1,260 | 1,625 | FDTD | 1.72 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.92 | 0.403 | -40 | 98 | 5 | 0.000003 | 17.5 | 1.54269 | 1.22778 | 2.317 | 2.541 | 1.86765 | 1.87141 | 0.000027 | 59.34 | 64.050003 | 0.000005 | 5.19 | 5.01 | 4.7 | 1,260 | 1,625 | FDTD | 2.75 |
Polydimethylsiloxane (PDMS) | Air | 0.58 | 0.811 | -46.799999 | 161.600006 | 1 | 0.000221 | 0.19 | 1.88981 | 1.20979 | 0.915 | 1.059 | 1.81995 | 1.82624 | 0.00003 | 65.709999 | 63.43 | 0.000003 | 4.82 | 4.65 | 4.58 | 1,260 | 1,625 | FDTD | 3.11 |
SU-8 | Air | 0.636 | 0.518 | -26.299999 | 103 | 5 | 0.000012 | 0.24 | 1.65538 | 1.19836 | 1.438 | 2.429 | 1.82754 | 1.82921 | 0.000013 | 87.82 | 92.970001 | 0.000002 | 7.62 | 7.14 | 7.23 | 1,260 | 1,625 | FDTD | 2.29 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.344 | 0.51 | 11.2 | 179.5 | 1 | 0.000001 | 1.3 | 1.90968 | 1.32631 | 0.646 | 1.967 | 1.73559 | 1.73678 | 0.000007 | 57.25 | 55.759998 | 0.000003 | 9.98 | 9.87 | 9.72 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.36 |
Polydimethylsiloxane (PDMS) | Air | 1.605 | 0.36 | -15.3 | 155.399994 | 10 | 0.000244 | 0.19 | 1.48784 | 1.01231 | 2.381 | 2.797 | 1.93583 | 1.93706 | 0.000007 | 56.380001 | 43.139999 | 0 | 1.97 | 1.84 | 1.52 | 1,260 | 1,625 | FDTD | 1.37 |
Silicon Nitride (Si₃N₄) | Air | 1.629 | 0.943 | -17.6 | 178.399994 | 10 | 0.000003 | 15.86 | 1.85359 | 1.31751 | 1.339 | 1.897 | 1.80885 | 1.81338 | 0.000023 | 50.25 | 97.510002 | 0 | 2.53 | 2.09 | 2.41 | 1,260 | 1,625 | FDTD | 3.84 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 0.831 | 0.713 | -5.2 | 135.300003 | 10 | 0.000238 | 0.19 | 1.68094 | 1.25288 | 0.83 | 1.21 | 1.54384 | 1.55172 | 0.000056 | 62.689999 | 15.15 | 0 | 6.18 | 5.88 | 5.72 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.65 |
Silicon Dioxide (SiO₂) | Air | 1.68 | 0.325 | 6.5 | 109 | 1 | 0.000001 | 1.45 | 1.73317 | 1.40257 | 2.295 | 3.62 | 1.61253 | 1.61412 | 0.000016 | 84.220001 | 72.07 | 0.000004 | 5.52 | 5.19 | 5.37 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.4 |
Polymethyl Methacrylate (PMMA) | Air | 1.303 | 0.35 | 14.6 | 117.800003 | 1 | 0.000013 | 0.23 | 1.90747 | 1.02726 | 0.489 | 0.729 | 1.78836 | 1.79553 | 0.000069 | 56.110001 | 83.040001 | 0.000004 | 6.26 | 5.81 | 5.88 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.36 |
Silicon Dioxide (SiO₂) | Air | 1.54 | 0.777 | -35 | 114.099998 | 5 | 0.000001 | 1.31 | 1.81708 | 1.31291 | 1.058 | 2.01 | 1.82737 | 1.83356 | 0.000042 | 73.889999 | 32 | 0.000004 | 8.38 | 8.07 | 7.94 | 1,260 | 1,625 | FDTD | 2.66 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.163 | 0.275 | -47.900002 | 122.800003 | 1 | 0.000003 | 16.200001 | 1.8966 | 1.11123 | 2.179 | 2.911 | 1.62396 | 1.62856 | 0.000027 | 50.73 | 47.790001 | 0.000002 | 8.99 | 8.59 | 8.86 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.77 |
Silicon Nitride (Si₃N₄) | Air | 1.499 | 0.396 | -14.6 | 128.199997 | 5 | 0.000003 | 15.77 | 1.41008 | 1.14242 | 2.446 | 3.937 | 1.86246 | 1.86645 | 0.000028 | 87.290001 | 95.870003 | 0.000004 | 2.59 | 2.32 | 2.26 | 1,260 | 1,625 | FDTD | 0.97 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.745 | 0.698 | -44.700001 | 145.199997 | 5 | 0.000003 | 16.700001 | 1.88659 | 1.07213 | 2.404 | 3.767 | 1.73375 | 1.73931 | 0.000029 | 82.330002 | 74.800003 | 0.000001 | 6.36 | 6.07 | 5.86 | 1,260 | 1,625 | FDTD | 1.92 |
SU-8 | Air | 1.616 | 0.22 | -30.700001 | 114 | 5 | 0.000011 | 0.26 | 1.53357 | 1.12139 | 1.005 | 2.248 | 1.5374 | 1.53996 | 0.000018 | 66.550003 | 97.260002 | 0.000002 | 8.55 | 8.07 | 8.21 | 1,260 | 1,625 | FDTD | 0.88 |
Silicon Dioxide (SiO₂) | Air | 0.71 | 0.976 | -17 | 187.600006 | 1 | 0.000001 | 1.42 | 1.67968 | 1.32712 | 0.363 | 1.039 | 1.92333 | 1.92492 | 0.000008 | 76.120003 | 42.360001 | 0.000004 | 4.71 | 4.31 | 4.48 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.67 |
Polymethyl Methacrylate (PMMA) | Air | 1.569 | 0.697 | -19.200001 | 81.5 | 1 | 0.000011 | 0.19 | 1.69783 | 1.42592 | 1.059 | 2.16 | 1.90187 | 1.9072 | 0.000053 | 51.919998 | 57.68 | 0.000005 | 4.56 | 4.16 | 4.45 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.53 |
Silicon Nitride (Si₃N₄) | Air | 1.167 | 0.641 | -36.799999 | 189.699997 | 5 | 0.000003 | 18.639999 | 1.41985 | 1.05449 | 2.702 | 4.054 | 1.77443 | 1.77837 | 0.000017 | 54.84 | 96.400002 | 0.000004 | 6.49 | 6.23 | 6.18 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.53 |
SU-8 | Air | 0.542 | 0.759 | -23.200001 | 87.5 | 10 | 0.000011 | 0.21 | 1.72574 | 1.39607 | 0.845 | 1.942 | 1.72739 | 1.73014 | 0.000025 | 65.650002 | 41.43 | 0.000002 | 4.03 | 3.84 | 3.55 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.36 |
Polydimethylsiloxane (PDMS) | Air | 1.028 | 0.68 | -30.6 | 101 | 10 | 0.000107 | 0.18 | 1.91628 | 1.0104 | 0.485 | 0.985 | 1.88118 | 1.89086 | 0.000074 | 68.949997 | 57.959999 | 0.000002 | 7.11 | 6.83 | 6.61 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.79 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.238 | 0.694 | -28 | 133.399994 | 5 | 0.000003 | 19.879999 | 1.88475 | 1.01725 | 1.546 | 2.646 | 1.40173 | 1.40773 | 0.000037 | 65.110001 | 83.620003 | 0.000003 | 3.04 | 2.69 | 2.55 | 1,260 | 1,625 | FDTD | 4.22 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.753 | 0.21 | 9.8 | 150 | 5 | 0.000001 | 1.34 | 1.78146 | 1.22517 | 2.166 | 3.597 | 1.55022 | 1.55852 | 0.000059 | 50.52 | 50.5 | 0.000003 | 5.9 | 5.49 | 5.65 | 1,260 | 1,625 | FDTD | 0.24 |
Polydimethylsiloxane (PDMS) | Air | 0.532 | 0.411 | -22.4 | 109.800003 | 1 | 0.000238 | 0.19 | 1.76724 | 1.14537 | 0.435 | 1.52 | 1.78243 | 1.78641 | 0.00003 | 86.639999 | 26.469999 | 0.000001 | 7.37 | 6.93 | 7.15 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.97 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.164 | 0.21 | -44.900002 | 88.300003 | 5 | 0.000001 | 1.38 | 1.91006 | 1.13782 | 2.624 | 3.998 | 1.62513 | 1.63366 | 0.000064 | 68.089996 | 62.869999 | 0.000004 | 6.62 | 6.19 | 6.12 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.92 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.19 | 0.832 | -17.700001 | 136.199997 | 1 | 0.000013 | 0.23 | 1.99793 | 1.0596 | 2.784 | 4.267 | 1.85923 | 1.86673 | 0.000049 | 79.660004 | 11.76 | 0.000003 | 8.63 | 8.38 | 8.38 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.53 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.286 | 0.489 | -49 | 122.199997 | 5 | 0.000001 | 1.41 | 1.55928 | 1.0526 | 1.489 | 2.844 | 1.94206 | 1.94729 | 0.000031 | 54.139999 | 67.800003 | 0.000003 | 2.1 | 1.73 | 1.91 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.11 |
Polymethyl Methacrylate (PMMA) | Air | 1.997 | 0.639 | -20.700001 | 99.699997 | 10 | 0.000007 | 0.2 | 1.80739 | 1.4061 | 2.944 | 3.398 | 1.68956 | 1.69441 | 0.00004 | 60.720001 | 69.349998 | 0.000001 | 1.03 | 0.69 | 0.91 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.03 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 0.958 | 0.843 | -2 | 162.699997 | 10 | 0.000014 | 0.21 | 1.83036 | 1.3329 | 1.385 | 1.865 | 1.91679 | 1.92635 | 0.000058 | 79.809998 | 74.639999 | 0.000003 | 8.1 | 7.93 | 7.73 | 1,260 | 1,625 | FDTD | 2.98 |
Polydimethylsiloxane (PDMS) | Air | 1.947 | 0.881 | 3.4 | 194.899994 | 1 | 0.000142 | 0.15 | 1.93276 | 1.09035 | 1.908 | 2.874 | 1.5199 | 1.52789 | 0.000042 | 81.860001 | 33.619999 | 0.000003 | 2.48 | 2.25 | 2.23 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.24 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.117 | 0.504 | -32.900002 | 199.5 | 5 | 0.000003 | 17.809999 | 1.7242 | 1.28166 | 0.756 | 1.349 | 1.72729 | 1.73287 | 0.000024 | 50.779999 | 32.68 | 0.000002 | 4.23 | 4.12 | 4.08 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.81 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 0.576 | 0.573 | -1.5 | 166.899994 | 5 | 0.000001 | 1.34 | 1.61971 | 1.02582 | 2.616 | 3.237 | 1.44224 | 1.44813 | 0.000035 | 66.629997 | 40.310001 | 0.000004 | 2.3 | 2.06 | 2.05 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.75 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.789 | 0.311 | -14.3 | 115.5 | 10 | 0.000238 | 0.15 | 1.50096 | 1.2871 | 0.484 | 1.439 | 1.47111 | 1.4733 | 0.000017 | 61.439999 | 92.209999 | 0.000001 | 6.17 | 5.91 | 5.84 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.95 |
SU-8 | Silicon Dioxide (SiO₂) | 1.642 | 0.327 | -45.900002 | 138.699997 | 5 | 0.000006 | 0.23 | 1.4955 | 1.03868 | 2.157 | 3.179 | 1.53665 | 1.53993 | 0.000018 | 89.519997 | 14.31 | 0.000003 | 2.38 | 1.96 | 2.16 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.92 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.194 | 0.373 | -44 | 105.5 | 10 | 0.000008 | 0.24 | 1.88903 | 1.10053 | 1.66 | 2.536 | 1.4137 | 1.41536 | 0.000011 | 88.239998 | 40.459999 | 0 | 6.62 | 6.39 | 6.36 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.64 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.541 | 0.796 | -25.1 | 169.199997 | 10 | 0.000009 | 0.21 | 1.48507 | 1.2168 | 2.96 | 3.183 | 1.79653 | 1.79754 | 0.000005 | 60.59 | 82.919998 | 0.000002 | 8.84 | 8.64 | 8.36 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.28 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 0.849 | 0.619 | -0.1 | 145.800003 | 10 | 0.000012 | 0.24 | 1.89097 | 1.43157 | 2.612 | 2.741 | 1.98342 | 1.99096 | 0.000052 | 65.839996 | 67.970001 | 0.000002 | 8.03 | 7.82 | 7.87 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.44 |
SU-8 | Silicon Dioxide (SiO₂) | 1.408 | 0.336 | -23.9 | 96.300003 | 10 | 0.000007 | 0.27 | 1.83773 | 1.2488 | 0.407 | 1.275 | 1.60229 | 1.61047 | 0.000068 | 65.120003 | 41.59 | 0.000002 | 7.3 | 7.04 | 7.1 | 1,260 | 1,625 | FDTD | 0.98 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.581 | 0.86 | -40.799999 | 148.899994 | 1 | 0.000001 | 1.43 | 1.77825 | 1.21014 | 2.463 | 2.914 | 1.51294 | 1.52191 | 0.000047 | 56.400002 | 80.830002 | 0.000004 | 3.01 | 2.79 | 2.77 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.63 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 0.835 | 0.407 | -24.700001 | 99.199997 | 1 | 0.000217 | 0.17 | 1.65338 | 1.431 | 1.774 | 3.216 | 1.78303 | 1.78735 | 0.000035 | 50.07 | 71.599998 | 0.000005 | 5.07 | 4.67 | 4.69 | 1,260 | 1,625 | FDTD | 4.21 |
Silicon Nitride (Si₃N₄) | Air | 1.877 | 0.532 | -32.099998 | 97.900002 | 5 | 0.000003 | 18.07 | 1.51562 | 1.26796 | 0.929 | 1.938 | 1.4869 | 1.49409 | 0.000055 | 54.400002 | 19.530001 | 0.000002 | 2.34 | 2.1 | 2.04 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.5 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 0.764 | 0.98 | -17.299999 | 150.300003 | 10 | 0.000011 | 0.25 | 1.46107 | 1.11749 | 0.255 | 1.081 | 1.82715 | 1.8283 | 0.000007 | 68.690002 | 24.889999 | 0.000005 | 0.85 | 0.54 | 0.58 | 1,260 | 1,625 | FDTD | 3.18 |
Polydimethylsiloxane (PDMS) | Air | 1.603 | 0.544 | -8.5 | 181.100006 | 1 | 0.000252 | 0.17 | 1.80603 | 1.26901 | 2.036 | 2.364 | 1.62966 | 1.63707 | 0.000039 | 76.199997 | 89.279999 | 0.000004 | 6.55 | 6.32 | 6.28 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.02 |
Silicon Dioxide (SiO₂) | Air | 1.092 | 0.747 | -46.700001 | 114.099998 | 1 | 0.000001 | 1.34 | 1.4105 | 1.43476 | 0.267 | 1.034 | 1.42817 | 1.42983 | 0.00001 | 86.639999 | 26.02 | 0 | 3.98 | 3.58 | 3.83 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.44 |
Polymethyl Methacrylate (PMMA) | Air | 1.104 | 0.283 | 7.3 | 197.399994 | 10 | 0.00001 | 0.24 | 1.48955 | 1.45524 | 0.678 | 0.957 | 1.74443 | 1.75403 | 0.00005 | 85.349998 | 32.099998 | 0.000001 | 2.09 | 1.76 | 1.62 | 1,260 | 1,625 | FDTD | 4.4 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 0.531 | 0.273 | 19 | 87.599998 | 1 | 0.000001 | 1.33 | 1.75682 | 1.47672 | 2.57 | 3.286 | 1.71707 | 1.72409 | 0.000102 | 79.57 | 79.580002 | 0 | 6.5 | 6 | 6.35 | 1,260 | 1,625 | FDTD | 4.21 |
Polymethyl Methacrylate (PMMA) | Air | 0.552 | 0.414 | 14.4 | 129.899994 | 5 | 0.000011 | 0.21 | 1.49729 | 1.29287 | 1.929 | 2.08 | 1.42724 | 1.43233 | 0.000044 | 77.18 | 55.880001 | 0.000001 | 1.45 | 0.95 | 1.34 | 1,260 | 1,625 | FDTD | 4.92 |
Silicon Dioxide (SiO₂) | Air | 1.609 | 0.451 | -30.299999 | 103.400002 | 10 | 0.000001 | 1.44 | 1.5598 | 1.35146 | 0.762 | 2.078 | 1.46475 | 1.46695 | 0.000016 | 80.709999 | 94.970001 | 0 | 7.55 | 7.44 | 7.21 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.83 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.484 | 0.626 | -23.9 | 162.5 | 1 | 0.000013 | 0.21 | 1.73873 | 1.14567 | 1.598 | 2.18 | 1.41823 | 1.42601 | 0.000042 | 84.610001 | 58.669998 | 0.000001 | 6.51 | 6.09 | 6.1 | 1,260 | 1,625 | FDTD | 1.85 |
Polymethyl Methacrylate (PMMA) | Air | 1.985 | 0.651 | -18.200001 | 86.400002 | 1 | 0.000014 | 0.21 | 1.44771 | 1.24805 | 0.276 | 1.373 | 1.65463 | 1.66203 | 0.000071 | 67.970001 | 82.080002 | 0.000002 | 5.26 | 5.05 | 4.9 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.29 |
Silicon Nitride (Si₃N₄) | Air | 1.734 | 0.84 | -41.5 | 94.900002 | 1 | 0.000004 | 19.41 | 1.86937 | 1.14784 | 1.822 | 2.472 | 1.94925 | 1.95217 | 0.000021 | 70.410004 | 25.02 | 0.000004 | 4.49 | 4.08 | 4.09 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.58 |
Silicon Dioxide (SiO₂) | Air | 0.966 | 0.622 | -39.299999 | 172.899994 | 5 | 0 | 1.33 | 1.40674 | 1.22374 | 2.572 | 4.067 | 1.83 | 1.83521 | 0.000025 | 72.57 | 10.67 | 0.000003 | 3.87 | 3.7 | 3.49 | 1,260 | 1,625 | FDTD | 1.42 |
SU-8 | Silicon Dioxide (SiO₂) | 1.551 | 0.878 | 14.2 | 169.300003 | 1 | 0.000008 | 0.29 | 1.94931 | 1.23827 | 1.004 | 1.202 | 1.51686 | 1.52575 | 0.000057 | 59.560001 | 56.259998 | 0.000005 | 3.16 | 2.73 | 2.79 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.12 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 0.668 | 0.727 | -43.200001 | 155.199997 | 5 | 0.000001 | 1.31 | 1.64198 | 1.24591 | 0.334 | 0.602 | 1.45558 | 1.46375 | 0.000041 | 89.330002 | 11.39 | 0.000002 | 8.47 | 8.21 | 7.99 | 1,260 | 1,625 | FDTD | 0.21 |
Silicon Dioxide (SiO₂) | Air | 1.828 | 0.601 | -39.799999 | 156.800003 | 10 | 0.000001 | 1.41 | 1.65348 | 1.48903 | 2.381 | 3.816 | 1.58285 | 1.59256 | 0.000049 | 66.650002 | 82.110001 | 0.000004 | 8.35 | 8.03 | 7.87 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.17 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.876 | 0.978 | -39.5 | 122.199997 | 5 | 0.000003 | 15.29 | 1.68677 | 1.40009 | 2.619 | 3.13 | 1.87787 | 1.88659 | 0.000054 | 52.09 | 11.78 | 0.000002 | 7.49 | 7.27 | 7.35 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.02 |
SU-8 | Air | 0.939 | 0.719 | -17.299999 | 198.800003 | 5 | 0.000007 | 0.26 | 1.51689 | 1.34332 | 1.547 | 2.622 | 1.4927 | 1.4995 | 0.000031 | 54.84 | 50.439999 | 0.000001 | 1.49 | 1.03 | 1.28 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.91 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.119 | 0.636 | -8.5 | 156.399994 | 1 | 0.000263 | 0.17 | 1.87154 | 1.31385 | 2.79 | 4.268 | 1.43284 | 1.43924 | 0.000039 | 89.120003 | 35.389999 | 0.000004 | 6.58 | 6.42 | 6.14 | 1,260 | 1,625 | FDTD | 3.77 |
Silicon Nitride (Si₃N₄) | Air | 1.731 | 0.724 | 12.9 | 184.699997 | 10 | 0.000003 | 16.690001 | 1.56415 | 1.05065 | 2.898 | 3.024 | 1.84391 | 1.85065 | 0.000039 | 50.549999 | 65.720001 | 0.000005 | 3.66 | 3.47 | 3.53 | 1,260 | 1,625 | FDTD | 4.66 |
Silicon Nitride (Si₃N₄) | Air | 0.649 | 0.244 | -40 | 168 | 10 | 0.000003 | 15.62 | 1.95747 | 1.05988 | 0.341 | 0.983 | 1.70734 | 1.71284 | 0.000026 | 74.360001 | 38.700001 | 0.000002 | 5.85 | 5.4 | 5.68 | 1,260 | 1,625 | FDTD | 3.51 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 0.631 | 0.701 | -39.5 | 107.800003 | 10 | 0.000011 | 0.25 | 1.59252 | 1.04627 | 0.663 | 1.08 | 1.64657 | 1.65571 | 0.000062 | 65.309998 | 52 | 0 | 7.62 | 7.16 | 7.37 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.71 |
SU-8 | Air | 1.067 | 0.342 | -40.599998 | 160.399994 | 1 | 0.000009 | 0.25 | 1.73163 | 1.13101 | 2.765 | 3.505 | 1.7449 | 1.75011 | 0.000026 | 77.139999 | 11.04 | 0.000001 | 4.47 | 4.15 | 4.05 | 1,260 | 1,625 | FDTD | 1.04 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.698 | 0.909 | -3.1 | 85.5 | 5 | 0.000003 | 18.540001 | 1.80638 | 1.38308 | 1.258 | 2.611 | 1.71768 | 1.72342 | 0.000065 | 81.639999 | 14.79 | 0.000003 | 0.55 | 0.13 | 0.24 | 1,260 | 1,625 | FDTD | 1.32 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 0.64 | 0.758 | -8.3 | 82.199997 | 5 | 0.000229 | 0.16 | 1.45581 | 1.13489 | 1.084 | 1.641 | 1.73859 | 1.74825 | 0.000107 | 58.369999 | 83.949997 | 0 | 9.14 | 9.03 | 8.87 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.7 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.936 | 0.556 | -46.799999 | 153.699997 | 10 | 0.000204 | 0.16 | 1.62057 | 1.24249 | 2.348 | 3.607 | 1.82211 | 1.82871 | 0.000033 | 60.220001 | 50.400002 | 0.000004 | 3.46 | 2.97 | 3.19 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.9 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 0.814 | 0.843 | -22.4 | 145.600006 | 10 | 0.00001 | 0.23 | 1.50638 | 1.14739 | 0.875 | 1.131 | 1.45743 | 1.46169 | 0.000025 | 74.599998 | 47.34 | 0.000001 | 1.97 | 1.67 | 1.6 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.71 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.685 | 0.843 | -15.6 | 91.300003 | 1 | 0.000009 | 0.21 | 1.60098 | 1.25376 | 1.089 | 1.334 | 1.85602 | 1.85848 | 0.000023 | 67.32 | 32.59 | 0.000002 | 6.01 | 5.9 | 5.76 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.43 |
Silicon Nitride (Si₃N₄) | Air | 1.419 | 0.653 | -0.3 | 157.600006 | 1 | 0.000003 | 18.49 | 1.80948 | 1.0801 | 2.888 | 3.384 | 1.64491 | 1.6461 | 0.000008 | 80.010002 | 20.610001 | 0.000004 | 9.27 | 9.14 | 9.13 | 1,260 | 1,625 | FDTD | 4.53 |
SU-8 | Air | 1.021 | 0.299 | 14.1 | 168.800003 | 1 | 0.000007 | 0.26 | 1.672 | 1.48849 | 0.878 | 1.693 | 1.41735 | 1.42708 | 0.000063 | 78.919998 | 13.19 | 0.000002 | 7.89 | 7.47 | 7.75 | 1,260 | 1,625 | FDTD | 2.36 |
Polydimethylsiloxane (PDMS) | Air | 1.053 | 0.896 | -44.099998 | 143.899994 | 1 | 0.000163 | 0.15 | 1.95885 | 1.20176 | 1.104 | 2.135 | 1.74085 | 1.74944 | 0.000046 | 63.310001 | 98.910004 | 0.000004 | 7.01 | 6.62 | 6.72 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.36 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.045 | 0.901 | -14 | 124.900002 | 5 | 0.000001 | 1.44 | 1.65866 | 1.29673 | 2.272 | 3.382 | 1.78146 | 1.78392 | 0.000018 | 78.690002 | 45.18 | 0.000002 | 5.38 | 5.13 | 5.26 | 1,260 | 1,625 | FDTD | 0.5 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 0.742 | 0.487 | 19.700001 | 196.899994 | 10 | 0.000008 | 0.22 | 1.41702 | 1.14143 | 0.184 | 1.609 | 1.79356 | 1.80192 | 0.000047 | 77.400002 | 29.549999 | 0.000004 | 2.91 | 2.54 | 2.44 | 1,260 | 1,625 | FDTD | 2.34 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.722 | 0.765 | -28.200001 | 105.199997 | 1 | 0.000122 | 0.17 | 1.93788 | 1.1723 | 0.923 | 1.741 | 1.89634 | 1.90448 | 0.000061 | 86.300003 | 76.860001 | 0.000002 | 2.63 | 2.17 | 2.24 | 1,260 | 1,625 | FDTD | 2.48 |
SU-8 | Silicon Dioxide (SiO₂) | 1.17 | 0.215 | 1.2 | 131.899994 | 1 | 0.000007 | 0.3 | 1.44156 | 1.20602 | 1.321 | 2.511 | 1.97546 | 1.97904 | 0.000027 | 62.009998 | 94.599998 | 0.000004 | 5.37 | 5.13 | 5.13 | 1,260 | 1,625 | FDTD | 3.89 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 0.978 | 0.835 | -2.9 | 160.5 | 1 | 0.000145 | 0.2 | 1.44254 | 1.456 | 0.389 | 1.373 | 1.91688 | 1.92359 | 0.000041 | 64.43 | 99.110001 | 0.000001 | 1.92 | 1.8 | 1.42 | 1,260 | 1,625 | FDTD | 0.77 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.781 | 0.823 | -24.6 | 83.900002 | 5 | 0.000003 | 17.75 | 1.87444 | 1.3979 | 2.301 | 3.732 | 1.71281 | 1.72013 | 0.000067 | 89.800003 | 47.169998 | 0.000002 | 5.94 | 5.44 | 5.79 | 1,260 | 1,625 | FDTD | 0.44 |