waveguide_material
stringclasses 5
values | cladding_material
stringclasses 2
values | waveguide_width
float32 0.5
2
| waveguide_height
float32 0.2
1
| temperature_min
float32 -50
20
| temperature_max
float32 80
200
| temperature_step
float32 1
10
| thermal_expansion_coefficient
float32 0
0
| thermal_conductivity
float32 0.15
20
| refractive_index_core
float32 1.4
2
| refractive_index_cladding
float32 1
1.5
| propagation_loss_min
float32 0.1
3
| propagation_loss_max
float32 0.21
4.5
| effective_index_min
float32 1.4
2
| effective_index_max
float32 1.4
2.01
| dn_dT
float32 0
0
| thermal_tuning_efficiency
float32 50
90
| thermal_stress
float32 10
100
| strain_rate
float32 0
0
| optical_power_input
float32 0.5
10
| optical_power_output_min
float32 0
9.89
| optical_power_output_max
float32 0
9.89
| wavelength_min
float32 1.26k
1.26k
| wavelength_max
float32 1.63k
1.63k
| simulation_model
stringclasses 2
values | measurement_uncertainty
float32 0.1
5
|
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.346 | 0.241 | -23.5 | 130.300003 | 10 | 0.000003 | 19.16 | 1.4205 | 1.384 | 2.128 | 3.136 | 1.74653 | 1.75169 | 0.000034 | 62.57 | 74.720001 | 0.000004 | 6.57 | 6.17 | 6.16 | 1,260 | 1,625 | FDTD | 2.45 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.786 | 0.663 | -16.799999 | 177.699997 | 10 | 0.000001 | 1.48 | 1.60257 | 1.04903 | 0.487 | 1.665 | 1.88076 | 1.88441 | 0.000019 | 61.330002 | 65.75 | 0.000004 | 6.17 | 5.99 | 5.72 | 1,260 | 1,625 | FDTD | 1.34 |
SU-8 | Silicon Dioxide (SiO₂) | 0.77 | 0.573 | 4.9 | 100.800003 | 1 | 0.00001 | 0.22 | 1.92154 | 1.23808 | 1.571 | 1.792 | 1.59099 | 1.60043 | 0.000098 | 51.959999 | 77.809998 | 0 | 7.34 | 7.21 | 7.1 | 1,260 | 1,625 | FDTD | 3.61 |
Silicon Nitride (Si₃N₄) | Air | 1.487 | 0.25 | -24.799999 | 94.800003 | 1 | 0.000003 | 15.19 | 1.48585 | 1.31311 | 1.498 | 2.215 | 1.78578 | 1.79276 | 0.000058 | 66.360001 | 83.889999 | 0.000002 | 9.69 | 9.54 | 9.31 | 1,260 | 1,625 | FDTD | 4.87 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.891 | 0.92 | 14.1 | 192.800003 | 5 | 0.000007 | 0.22 | 1.87807 | 1.10946 | 0.224 | 1.128 | 1.88034 | 1.88948 | 0.000051 | 75.360001 | 48.049999 | 0.000003 | 8.94 | 8.64 | 8.64 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.17 |
Polydimethylsiloxane (PDMS) | Air | 1.617 | 0.226 | -32.900002 | 140.699997 | 5 | 0.000163 | 0.16 | 1.68853 | 1.30083 | 0.498 | 1.498 | 1.86976 | 1.87249 | 0.000016 | 63.48 | 21.27 | 0.000004 | 7.02 | 6.86 | 6.9 | 1,260 | 1,625 | FDTD | 3.45 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.54 | 0.367 | -6.2 | 104.5 | 1 | 0.000003 | 18.24 | 1.87593 | 1.16932 | 1.326 | 2.444 | 1.54431 | 1.54886 | 0.000041 | 50.77 | 31.790001 | 0.000004 | 3.8 | 3.47 | 3.4 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.24 |
Polydimethylsiloxane (PDMS) | Air | 0.747 | 0.542 | -30.700001 | 159.300003 | 10 | 0.000146 | 0.19 | 1.48417 | 1.007 | 2.412 | 2.673 | 1.98867 | 1.99183 | 0.000017 | 84.129997 | 90.519997 | 0.000004 | 5.43 | 5.23 | 5.21 | 1,260 | 1,625 | FDTD | 4.52 |
Polydimethylsiloxane (PDMS) | Air | 1.503 | 0.318 | 6.5 | 133.699997 | 5 | 0.000271 | 0.18 | 1.84637 | 1.4833 | 2.559 | 3.799 | 1.77164 | 1.77524 | 0.000028 | 72.389999 | 19.139999 | 0.000004 | 1.15 | 0.8 | 0.75 | 1,260 | 1,625 | FDTD | 2.68 |
Silicon Nitride (Si₃N₄) | Air | 1.39 | 0.939 | 9.7 | 130.300003 | 10 | 0.000003 | 17.68 | 1.95977 | 1.26077 | 0.307 | 0.744 | 1.95694 | 1.95872 | 0.000015 | 61.509998 | 23.75 | 0.000003 | 5.51 | 5.4 | 5.08 | 1,260 | 1,625 | FDTD | 0.77 |
SU-8 | Air | 1.567 | 0.91 | 16.200001 | 117.599998 | 10 | 0.00001 | 0.28 | 1.52552 | 1.49987 | 2.161 | 3.199 | 1.57557 | 1.57871 | 0.000031 | 74.040001 | 86.029999 | 0.000002 | 0.96 | 0.85 | 0.72 | 1,260 | 1,625 | FDTD | 3.63 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.197 | 0.682 | -18.799999 | 161.699997 | 10 | 0.000001 | 1.39 | 1.50133 | 1.03511 | 1.332 | 2.458 | 1.59682 | 1.60004 | 0.000018 | 61.380001 | 74.370003 | 0.000001 | 4.84 | 4.51 | 4.66 | 1,260 | 1,625 | FDTD | 0.65 |
Polydimethylsiloxane (PDMS) | Air | 1.032 | 0.873 | -21.799999 | 96.699997 | 1 | 0.000211 | 0.2 | 1.44873 | 1.31643 | 2.601 | 3.258 | 1.71984 | 1.72125 | 0.000012 | 69.800003 | 67.129997 | 0 | 1.6 | 1.25 | 1.2 | 1,260 | 1,625 | FDTD | 1.23 |
SU-8 | Silicon Dioxide (SiO₂) | 1.577 | 0.201 | 12.4 | 87.099998 | 1 | 0.000007 | 0.21 | 1.97246 | 1.06665 | 2.771 | 3.086 | 1.66338 | 1.66515 | 0.000024 | 82.129997 | 67.019997 | 0.000001 | 9.86 | 9.7 | 9.73 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.03 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.601 | 0.627 | -27 | 167.5 | 1 | 0.00016 | 0.16 | 1.96674 | 1.00696 | 1.062 | 1.497 | 1.6951 | 1.70404 | 0.000046 | 72.839996 | 16.9 | 0.000005 | 3.46 | 3.1 | 3.04 | 1,260 | 1,625 | FDTD | 4.09 |
Polydimethylsiloxane (PDMS) | Air | 1.686 | 0.238 | -16.299999 | 135.5 | 5 | 0.000206 | 0.19 | 1.74498 | 1.05394 | 2.852 | 2.988 | 1.46367 | 1.47062 | 0.000046 | 61.279999 | 10.48 | 0.000003 | 2.41 | 2.12 | 2.25 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.08 |
Polydimethylsiloxane (PDMS) | Air | 1.507 | 0.274 | -21.6 | 185.399994 | 5 | 0.0002 | 0.19 | 1.54664 | 1.32829 | 1.083 | 1.543 | 1.67537 | 1.67985 | 0.000022 | 78.419998 | 60 | 0.000001 | 5.29 | 5.16 | 5 | 1,260 | 1,625 | FDTD | 0.92 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.846 | 0.412 | -44.700001 | 97.099998 | 1 | 0.000003 | 16.09 | 1.6065 | 1.30645 | 1.649 | 2.324 | 1.62974 | 1.63821 | 0.00006 | 52.389999 | 74.589996 | 0.000004 | 8.16 | 7.84 | 7.69 | 1,260 | 1,625 | FDTD | 3.46 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.889 | 0.553 | -0.8 | 108.800003 | 1 | 0.000014 | 0.23 | 1.90187 | 1.30105 | 2.963 | 3.365 | 1.88233 | 1.89066 | 0.000076 | 78.269997 | 48.34 | 0.000004 | 1.96 | 1.62 | 1.57 | 1,260 | 1,625 | FDTD | 1.78 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.488 | 0.513 | -18.1 | 156.100006 | 10 | 0.000007 | 0.2 | 1.68484 | 1.05002 | 2.944 | 3.229 | 1.89241 | 1.89836 | 0.000034 | 83.739998 | 25.98 | 0.000005 | 2.29 | 2.13 | 1.95 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.98 |
SU-8 | Air | 0.939 | 0.564 | -39.099998 | 183.899994 | 1 | 0.000006 | 0.28 | 1.70165 | 1.39319 | 2.611 | 3.197 | 1.91742 | 1.92616 | 0.000039 | 64.389999 | 25.66 | 0.000004 | 4.34 | 4.22 | 4.14 | 1,260 | 1,625 | FDTD | 1 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.242 | 0.224 | -11.8 | 134.5 | 10 | 0.000011 | 0.24 | 1.66894 | 1.23801 | 0.662 | 0.775 | 1.40761 | 1.40997 | 0.000016 | 68.419998 | 46.450001 | 0.000001 | 3 | 2.88 | 2.61 | 1,260 | 1,625 | FDTD | 0.43 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.082 | 0.896 | -16.799999 | 191 | 5 | 0.000003 | 19.73 | 1.98589 | 1.29307 | 1.975 | 2.583 | 1.8582 | 1.86576 | 0.000036 | 63.419998 | 32.18 | 0.000001 | 9.75 | 9.39 | 9.55 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.14 |
SU-8 | Silicon Dioxide (SiO₂) | 1.727 | 0.924 | 8.6 | 163.300003 | 5 | 0.000007 | 0.27 | 1.67944 | 1.44693 | 1.501 | 2.001 | 1.67251 | 1.67896 | 0.000042 | 66.82 | 85.230003 | 0.000001 | 2.44 | 2.33 | 2.18 | 1,260 | 1,625 | FDTD | 0.62 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.379 | 0.274 | -14 | 133.899994 | 1 | 0.000009 | 0.23 | 1.99432 | 1.05058 | 2.457 | 2.65 | 1.65193 | 1.65436 | 0.000016 | 59.310001 | 18.42 | 0.000003 | 2.67 | 2.43 | 2.43 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.12 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.673 | 0.421 | 12.2 | 112.5 | 10 | 0.000114 | 0.19 | 1.81991 | 1.20106 | 1.168 | 2.644 | 1.89984 | 1.90584 | 0.00006 | 73.809998 | 26.6 | 0.000001 | 4.81 | 4.37 | 4.6 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.17 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.767 | 0.559 | -4.7 | 100.900002 | 1 | 0.000003 | 15.55 | 1.47594 | 1.33826 | 0.219 | 0.522 | 1.60398 | 1.61074 | 0.000064 | 68.559998 | 68.68 | 0.000001 | 8.06 | 7.6 | 7.67 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.47 |
Polymethyl Methacrylate (PMMA) | Air | 1.788 | 0.539 | 11.4 | 190.699997 | 10 | 0.000014 | 0.21 | 1.40522 | 1.23105 | 1.943 | 3.201 | 1.61396 | 1.61614 | 0.000012 | 59.610001 | 32.330002 | 0.000002 | 7.16 | 7 | 6.95 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.33 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.153 | 0.469 | -42.5 | 106.599998 | 10 | 0.000251 | 0.19 | 1.62923 | 1.41527 | 0.395 | 1.361 | 1.78809 | 1.7966 | 0.000057 | 68.080002 | 73.660004 | 0.000001 | 4.79 | 4.56 | 4.38 | 1,260 | 1,625 | FDTD | 1.08 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.155 | 0.793 | -2.7 | 195 | 5 | 0.000001 | 1.5 | 1.69375 | 1.01705 | 2.223 | 2.54 | 1.69199 | 1.69745 | 0.000028 | 63.5 | 23.77 | 0.000003 | 2.18 | 1.92 | 1.89 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.94 |
Silicon Dioxide (SiO₂) | Air | 1.001 | 0.245 | 7 | 140.5 | 10 | 0.000001 | 1.46 | 1.40738 | 1.09942 | 2.257 | 3.165 | 1.40793 | 1.41535 | 0.000056 | 77.129997 | 15.67 | 0.000005 | 8.89 | 8.48 | 8.64 | 1,260 | 1,625 | FDTD | 2.86 |
Silicon Dioxide (SiO₂) | Air | 1.123 | 0.652 | -28.1 | 108.699997 | 1 | 0.000001 | 1.33 | 1.86318 | 1.11998 | 2.231 | 2.387 | 1.41549 | 1.42285 | 0.000054 | 84.809998 | 40.950001 | 0.000004 | 2.21 | 1.79 | 2.06 | 1,260 | 1,625 | FDTD | 1.14 |
SU-8 | Silicon Dioxide (SiO₂) | 0.74 | 0.952 | -43.5 | 164 | 10 | 0.000007 | 0.22 | 1.48165 | 1.22007 | 2.2 | 2.896 | 1.8648 | 1.86927 | 0.000022 | 57.700001 | 16.49 | 0.000002 | 7.77 | 7.64 | 7.38 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.01 |
Silicon Dioxide (SiO₂) | Air | 0.878 | 0.95 | -10.4 | 122.900002 | 10 | 0.000001 | 1.32 | 1.61487 | 1.33245 | 1.433 | 2.591 | 1.41073 | 1.42002 | 0.00007 | 69.910004 | 65.93 | 0.000001 | 6.13 | 5.71 | 5.95 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.26 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 0.715 | 0.846 | 17.700001 | 157 | 5 | 0.00001 | 0.23 | 1.89542 | 1.36771 | 2.314 | 3.648 | 1.58663 | 1.59095 | 0.000031 | 61.139999 | 18.41 | 0.000001 | 8.57 | 8.35 | 8.35 | 1,260 | 1,625 | FDTD | 4.6 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 0.991 | 0.438 | -29.799999 | 132.100006 | 10 | 0.000001 | 1.39 | 1.58892 | 1.28271 | 2.542 | 2.976 | 1.4316 | 1.43675 | 0.000032 | 85.099998 | 76.739998 | 0.000001 | 6.4 | 6 | 6.29 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.51 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 0.679 | 0.208 | -12.2 | 192.399994 | 5 | 0.000108 | 0.19 | 1.63693 | 1.32736 | 2.688 | 3.372 | 1.54286 | 1.54602 | 0.000015 | 85.730003 | 68 | 0.000002 | 7.25 | 6.77 | 6.82 | 1,260 | 1,625 | FDTD | 1.03 |
Silicon Dioxide (SiO₂) | Air | 1.921 | 0.935 | 14.6 | 119.300003 | 1 | 0.000001 | 1.35 | 1.67872 | 1.09949 | 2.16 | 3.496 | 1.67438 | 1.68222 | 0.000075 | 82.459999 | 68.739998 | 0.000003 | 1.41 | 1.3 | 1.08 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.85 |
SU-8 | Silicon Dioxide (SiO₂) | 0.646 | 0.57 | -28.4 | 136.699997 | 1 | 0.000012 | 0.21 | 1.72609 | 1.0921 | 2.432 | 2.598 | 1.85625 | 1.86621 | 0.00006 | 52.77 | 73.839996 | 0.000004 | 5.66 | 5.19 | 5.54 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.12 |
SU-8 | Air | 1.005 | 0.507 | -26.6 | 96.300003 | 1 | 0.000009 | 0.21 | 1.95935 | 1.03227 | 2.915 | 4.066 | 1.6457 | 1.65091 | 0.000042 | 66.910004 | 16.98 | 0.000004 | 3.64 | 3.4 | 3.27 | 1,260 | 1,625 | FDTD | 3.37 |
SU-8 | Air | 0.651 | 0.762 | -35.299999 | 89.5 | 5 | 0.000008 | 0.22 | 1.84875 | 1.24408 | 0.91 | 2.002 | 1.97686 | 1.9801 | 0.000026 | 72.190002 | 86.290001 | 0.000005 | 9.17 | 9.04 | 8.79 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.67 |
Polymethyl Methacrylate (PMMA) | Air | 0.535 | 0.962 | -2.7 | 180.600006 | 1 | 0.000009 | 0.2 | 1.68859 | 1.33441 | 2.041 | 2.986 | 1.41418 | 1.42264 | 0.000046 | 57.119999 | 75.43 | 0.000004 | 9.06 | 8.58 | 8.81 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.22 |
Polydimethylsiloxane (PDMS) | Air | 1.342 | 0.627 | -7 | 164.5 | 5 | 0.000116 | 0.19 | 1.65078 | 1.25508 | 0.331 | 1.14 | 1.91122 | 1.91716 | 0.000035 | 89.230003 | 21.719999 | 0.000002 | 3.37 | 2.97 | 2.95 | 1,260 | 1,625 | FDTD | 4.05 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 0.692 | 0.666 | -9.2 | 118.5 | 10 | 0.000001 | 1.37 | 1.53436 | 1.49221 | 0.921 | 1.983 | 1.4507 | 1.45656 | 0.000046 | 65.239998 | 29.07 | 0.000001 | 2.54 | 2.07 | 2.38 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.6 |
Silicon Nitride (Si₃N₄) | Air | 1.206 | 0.425 | -30.1 | 112.599998 | 10 | 0.000003 | 17.58 | 1.41729 | 1.35647 | 0.63 | 1.372 | 1.86873 | 1.87213 | 0.000024 | 82.870003 | 74.370003 | 0.000003 | 4.44 | 4.21 | 4.29 | 1,260 | 1,625 | FDTD | 3.46 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.784 | 0.334 | -36.400002 | 140.899994 | 5 | 0.000003 | 17.190001 | 1.90388 | 1.23457 | 1.221 | 2.402 | 1.53924 | 1.54872 | 0.000053 | 64.389999 | 47.279999 | 0.000001 | 6.82 | 6.61 | 6.7 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.2 |
Polydimethylsiloxane (PDMS) | Air | 0.991 | 0.797 | 10.9 | 162.399994 | 10 | 0.000235 | 0.15 | 1.43185 | 1.37193 | 1.388 | 2.884 | 1.47219 | 1.4819 | 0.000064 | 66.139999 | 50.200001 | 0.000004 | 8.78 | 8.57 | 8.51 | 1,260 | 1,625 | FDTD | 0.62 |
Polydimethylsiloxane (PDMS) | Air | 1.135 | 0.871 | -44.099998 | 143.699997 | 10 | 0.000127 | 0.19 | 1.59478 | 1.08002 | 0.775 | 1.65 | 1.91469 | 1.92363 | 0.000048 | 53.77 | 92.849998 | 0.000003 | 6.93 | 6.7 | 6.57 | 1,260 | 1,625 | FDTD | 1.83 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.216 | 0.858 | -43.299999 | 98.900002 | 1 | 0.000003 | 16.219999 | 1.67778 | 1.091 | 1.234 | 1.496 | 1.73169 | 1.74061 | 0.000063 | 64.18 | 58.990002 | 0.000004 | 9.67 | 9.36 | 9.38 | 1,260 | 1,625 | FDTD | 4.32 |
Polymethyl Methacrylate (PMMA) | Air | 1.529 | 0.912 | -0 | 188.399994 | 5 | 0.000014 | 0.2 | 1.54265 | 1.48928 | 1.483 | 1.948 | 1.44536 | 1.45139 | 0.000032 | 57.09 | 68.480003 | 0.000001 | 5.74 | 5.38 | 5.58 | 1,260 | 1,625 | FDTD | 2.49 |
SU-8 | Air | 1.816 | 0.34 | 10.7 | 133.699997 | 1 | 0.000007 | 0.23 | 1.42856 | 1.35705 | 2.907 | 3.529 | 1.43557 | 1.43709 | 0.000012 | 51.439999 | 36.5 | 0.000001 | 1.43 | 1.32 | 1.27 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.79 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.048 | 0.472 | -44.900002 | 186.699997 | 5 | 0.000003 | 16.940001 | 1.68696 | 1.3601 | 0.899 | 1.844 | 1.55672 | 1.5651 | 0.000036 | 72.290001 | 73.989998 | 0.000002 | 9.45 | 9.13 | 8.96 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.4 |
Silicon Nitride (Si₃N₄) | Air | 1.968 | 0.952 | 2.9 | 144.600006 | 1 | 0.000003 | 19.74 | 1.97667 | 1.45842 | 1.361 | 2.448 | 1.80625 | 1.80885 | 0.000018 | 82.699997 | 75.889999 | 0.000002 | 5.67 | 5.49 | 5.55 | 1,260 | 1,625 | FDTD | 3.64 |
Silicon Dioxide (SiO₂) | Air | 0.75 | 0.332 | 2.1 | 126.900002 | 5 | 0.000001 | 1.35 | 1.9911 | 1.17554 | 2.56 | 3.667 | 1.63333 | 1.63518 | 0.000015 | 61.349998 | 33.560001 | 0.000001 | 9.07 | 8.79 | 8.59 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.79 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.67 | 0.8 | -30.4 | 150.600006 | 10 | 0.000013 | 0.2 | 1.55343 | 1.43417 | 0.361 | 0.935 | 1.70986 | 1.71605 | 0.000034 | 71.919998 | 83.870003 | 0.000003 | 9.14 | 8.71 | 8.68 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.21 |
SU-8 | Air | 1.582 | 0.464 | -36.900002 | 177.699997 | 1 | 0.000008 | 0.21 | 1.75092 | 1.28856 | 0.779 | 1.499 | 1.53883 | 1.54186 | 0.000014 | 72.540001 | 29.02 | 0.000004 | 3.85 | 3.38 | 3.57 | 1,260 | 1,625 | FDTD | 0.44 |
Silicon Dioxide (SiO₂) | Air | 1.241 | 0.885 | -25 | 94.300003 | 10 | 0.000001 | 1.34 | 1.7798 | 1.28167 | 0.966 | 1.238 | 1.6378 | 1.63898 | 0.00001 | 61.889999 | 60.650002 | 0.000004 | 1.42 | 1.1 | 1.11 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.62 |
Silicon Dioxide (SiO₂) | Air | 1.655 | 0.665 | 13.8 | 118.300003 | 10 | 0.000001 | 1.41 | 1.82948 | 1.07903 | 2.468 | 2.879 | 1.56142 | 1.56782 | 0.000061 | 70.150002 | 64.709999 | 0.000005 | 7.89 | 7.78 | 7.52 | 1,260 | 1,625 | FDTD | 3.31 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.732 | 0.427 | 1.4 | 92.300003 | 1 | 0.000001 | 1.41 | 1.40668 | 1.24773 | 0.387 | 0.524 | 1.64025 | 1.64145 | 0.000013 | 87.459999 | 80.199997 | 0.000004 | 4.4 | 4.05 | 4.11 | 1,260 | 1,625 | FDTD | 2.14 |
SU-8 | Air | 1.568 | 0.211 | 16.700001 | 158.100006 | 1 | 0.00001 | 0.24 | 1.40004 | 1.301 | 2.879 | 3.49 | 1.85752 | 1.85907 | 0.000011 | 74.150002 | 13.24 | 0.000001 | 9.29 | 9.08 | 9.13 | 1,260 | 1,625 | FDTD | 1.59 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.95 | 0.619 | -18.799999 | 81.099998 | 10 | 0.000278 | 0.15 | 1.86957 | 1.15031 | 1.298 | 1.691 | 1.49484 | 1.49906 | 0.000042 | 54.720001 | 52.77 | 0.000003 | 4.59 | 4.48 | 4.23 | 1,260 | 1,625 | FDTD | 4.56 |
Silicon Dioxide (SiO₂) | Air | 0.549 | 0.506 | -16.799999 | 119.900002 | 1 | 0.000001 | 1.43 | 1.57722 | 1.48685 | 0.82 | 1.473 | 1.96061 | 1.96578 | 0.000038 | 87.160004 | 34.259998 | 0.000001 | 4.9 | 4.72 | 4.43 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.74 |
Polydimethylsiloxane (PDMS) | Air | 1.508 | 0.919 | -16 | 80.599998 | 5 | 0.000247 | 0.18 | 1.40705 | 1.18637 | 0.349 | 0.995 | 1.94161 | 1.94331 | 0.000018 | 89.879997 | 88.849998 | 0.000005 | 1.18 | 1.06 | 0.76 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.58 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.995 | 0.609 | -21.200001 | 84.400002 | 1 | 0.000001 | 1.42 | 1.41035 | 1.20873 | 0.278 | 0.653 | 1.53458 | 1.54323 | 0.000082 | 65.169998 | 82.550003 | 0.000001 | 6.49 | 6.22 | 6.35 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.84 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.395 | 0.969 | -13.1 | 127 | 5 | 0.000001 | 1.46 | 1.67234 | 1.06833 | 1.334 | 2.238 | 1.78438 | 1.7911 | 0.000048 | 84.629997 | 71.550003 | 0.000002 | 4.55 | 4.06 | 4.13 | 1,260 | 1,625 | FDTD | 2.66 |
Polydimethylsiloxane (PDMS) | Air | 1.19 | 0.228 | 3.3 | 105.099998 | 5 | 0.000247 | 0.19 | 1.77443 | 1.00713 | 0.932 | 1.647 | 1.48642 | 1.49051 | 0.00004 | 87.330002 | 66.230003 | 0.000004 | 8.98 | 8.8 | 8.53 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.81 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.031 | 0.878 | -11.3 | 157.699997 | 5 | 0.000001 | 1.31 | 1.96722 | 1.26618 | 0.54 | 0.936 | 1.62229 | 1.63115 | 0.000052 | 58.75 | 63.369999 | 0.000003 | 3.46 | 2.99 | 3.04 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.36 |
Silicon Nitride (Si₃N₄) | Air | 1.485 | 0.673 | -9.4 | 122.400002 | 5 | 0.000003 | 15.25 | 1.78567 | 1.04969 | 1.671 | 2.578 | 1.64037 | 1.64736 | 0.000053 | 83.139999 | 19.59 | 0.000005 | 5.33 | 4.83 | 5.21 | 1,260 | 1,625 | FDTD | 0.26 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 0.925 | 0.626 | 14.2 | 83.099998 | 10 | 0.000001 | 1.41 | 1.74786 | 1.31735 | 1.157 | 2.342 | 1.50255 | 1.50404 | 0.000022 | 66.029999 | 89.779999 | 0.000002 | 2.08 | 1.7 | 1.86 | 1,260 | 1,625 | FDTD | 2.84 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.133 | 0.559 | 1.2 | 177.600006 | 1 | 0.000003 | 19.42 | 1.40626 | 1.22029 | 1.796 | 3.115 | 1.87735 | 1.88633 | 0.000051 | 74.379997 | 14.49 | 0.000005 | 5.2 | 5.08 | 4.81 | 1,260 | 1,625 | FDTD | 3.94 |
Silicon Nitride (Si₃N₄) | Air | 1.452 | 0.948 | -6 | 109.400002 | 5 | 0.000003 | 19.639999 | 1.73998 | 1.12332 | 2.748 | 3.227 | 1.57217 | 1.57811 | 0.000051 | 61.759998 | 91.959999 | 0.000003 | 3.62 | 3.4 | 3.41 | 1,260 | 1,625 | FDTD | 3.51 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.207 | 0.241 | -43.599998 | 151.100006 | 5 | 0.000116 | 0.2 | 1.95313 | 1.41161 | 0.767 | 1.134 | 1.74145 | 1.74608 | 0.000024 | 50.040001 | 45.060001 | 0.000001 | 4.35 | 4.15 | 4.02 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.49 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.706 | 0.203 | -49.700001 | 131.199997 | 10 | 0.000147 | 0.16 | 1.80553 | 1.40437 | 0.686 | 1.12 | 1.49237 | 1.49994 | 0.000042 | 57.23 | 49.450001 | 0.000001 | 1.96 | 1.48 | 1.75 | 1,260 | 1,625 | FDTD | 2.62 |
Silicon Dioxide (SiO₂) | Air | 0.869 | 0.466 | 7.1 | 184.399994 | 1 | 0.000001 | 1.3 | 1.92662 | 1.0488 | 2.202 | 3.063 | 1.93684 | 1.93951 | 0.000015 | 86.18 | 83.080002 | 0.000003 | 8.64 | 8.27 | 8.4 | 1,260 | 1,625 | FDTD | 4.93 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.28 | 0.803 | -9.2 | 80.599998 | 5 | 0.000176 | 0.18 | 1.65774 | 1.4486 | 0.47 | 1.439 | 1.8391 | 1.84158 | 0.000028 | 75.209999 | 85.940002 | 0.000002 | 7.96 | 7.64 | 7.72 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.97 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 0.548 | 0.761 | 1.7 | 141 | 10 | 0.000112 | 0.15 | 1.92551 | 1.21032 | 1.868 | 2.411 | 1.67044 | 1.67847 | 0.000058 | 83.139999 | 81.800003 | 0.000002 | 3.57 | 3.21 | 3.4 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.02 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.001 | 0.376 | 18.4 | 163.800003 | 10 | 0.000003 | 18.190001 | 1.8503 | 1.45537 | 1.299 | 2.261 | 1.93128 | 1.93439 | 0.000021 | 73.129997 | 35.189999 | 0.000003 | 7.7 | 7.48 | 7.33 | 1,260 | 1,625 | FDTD | 2.87 |
Polymethyl Methacrylate (PMMA) | Air | 1.252 | 0.74 | -2.7 | 138.899994 | 10 | 0.000012 | 0.19 | 1.54477 | 1.45134 | 1.092 | 1.673 | 1.53004 | 1.53365 | 0.000025 | 58.560001 | 39.459999 | 0.000004 | 9.96 | 9.68 | 9.77 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.91 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.474 | 0.631 | 0.9 | 86.300003 | 5 | 0.000234 | 0.16 | 1.69574 | 1.00492 | 0.308 | 1.452 | 1.87054 | 1.87278 | 0.000026 | 52.299999 | 67.760002 | 0.000003 | 4.74 | 4.5 | 4.3 | 1,260 | 1,625 | FDTD | 4 |
SU-8 | Air | 1.953 | 0.221 | -19.799999 | 94.900002 | 5 | 0.000009 | 0.2 | 1.85369 | 1.06494 | 0.449 | 1.697 | 1.61954 | 1.62531 | 0.00005 | 60.34 | 44.119999 | 0.000002 | 4.92 | 4.75 | 4.67 | 1,260 | 1,625 | FDTD | 4.89 |
Polydimethylsiloxane (PDMS) | Air | 0.678 | 0.901 | -11.9 | 141.199997 | 5 | 0.000271 | 0.16 | 1.45299 | 1.21774 | 1.952 | 2.736 | 1.41809 | 1.41931 | 0.000008 | 55.240002 | 21.209999 | 0 | 0.97 | 0.63 | 0.64 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.2 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.288 | 0.404 | -22.5 | 83.099998 | 10 | 0.000241 | 0.19 | 1.66796 | 1.03689 | 2.81 | 3.509 | 1.57479 | 1.57822 | 0.000032 | 85.57 | 61.259998 | 0.000003 | 2.29 | 1.89 | 1.89 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.2 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.829 | 0.772 | -8 | 128.399994 | 5 | 0.000003 | 16.629999 | 1.76368 | 1.10385 | 0.956 | 1.232 | 1.69872 | 1.70316 | 0.000033 | 53.029999 | 67.919998 | 0 | 2.94 | 2.59 | 2.79 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.33 |
SU-8 | Silicon Dioxide (SiO₂) | 0.935 | 0.851 | 14.3 | 181.800003 | 10 | 0.000012 | 0.3 | 1.84125 | 1.27036 | 0.523 | 0.646 | 1.52406 | 1.52697 | 0.000017 | 67.360001 | 38.060001 | 0.000001 | 7.98 | 7.48 | 7.52 | 1,260 | 1,625 | FDTD | 4.34 |
Silicon Dioxide (SiO₂) | Air | 1.749 | 0.351 | 15.1 | 128.899994 | 1 | 0.000001 | 1.42 | 1.87395 | 1.36481 | 0.623 | 2.111 | 1.54867 | 1.55169 | 0.000027 | 77.370003 | 43.939999 | 0.000004 | 9.31 | 8.81 | 9.17 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.06 |
Polymethyl Methacrylate (PMMA) | Air | 1.489 | 0.831 | -18.5 | 178 | 1 | 0.000009 | 0.21 | 1.90756 | 1.00557 | 2.458 | 2.612 | 1.81531 | 1.82435 | 0.000046 | 71.879997 | 28.200001 | 0.000002 | 1.72 | 1.39 | 1.4 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.35 |
SU-8 | Air | 0.616 | 0.627 | -40.599998 | 112.300003 | 1 | 0.000007 | 0.29 | 1.66743 | 1.16948 | 0.133 | 1.065 | 1.63109 | 1.63343 | 0.000015 | 67.629997 | 99.989998 | 0.000002 | 1.67 | 1.24 | 1.45 | 1,260 | 1,625 | FDTD | 3.02 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 0.773 | 0.979 | -6.9 | 165.199997 | 5 | 0.000008 | 0.2 | 1.90808 | 1.25379 | 0.758 | 1.746 | 1.89442 | 1.89671 | 0.000013 | 60.889999 | 71.779999 | 0.000001 | 4.87 | 4.43 | 4.59 | 1,260 | 1,625 | FDTD | 1.69 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.525 | 0.369 | -10.5 | 94 | 5 | 0.000003 | 16.370001 | 1.60745 | 1.00748 | 2.629 | 3.08 | 1.92931 | 1.93309 | 0.000036 | 69.860001 | 13.39 | 0.000001 | 4.92 | 4.48 | 4.74 | 1,260 | 1,625 | FDTD | 3.83 |
Polydimethylsiloxane (PDMS) | Air | 1.577 | 0.333 | -19.4 | 161.699997 | 1 | 0.000198 | 0.19 | 1.90719 | 1.29358 | 2.139 | 2.803 | 1.52657 | 1.5308 | 0.000023 | 65.449997 | 57.900002 | 0.000001 | 7.11 | 6.81 | 6.93 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.2 |
SU-8 | Silicon Dioxide (SiO₂) | 1.832 | 0.798 | 19.799999 | 84.599998 | 1 | 0.000007 | 0.28 | 1.43454 | 1.33693 | 2.782 | 3.151 | 1.63132 | 1.63412 | 0.000043 | 84.150002 | 80.019997 | 0.000002 | 3.8 | 3.58 | 3.6 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.14 |
Silicon Nitride (Si₃N₄) | Air | 1.303 | 0.423 | -1.5 | 115.099998 | 5 | 0.000003 | 15.22 | 1.56179 | 1.31443 | 0.238 | 1.605 | 1.96276 | 1.96518 | 0.000021 | 70.400002 | 58.209999 | 0.000005 | 6.54 | 6.28 | 6.33 | 1,260 | 1,625 | FDTD | 2.84 |
Polydimethylsiloxane (PDMS) | Air | 1.202 | 0.586 | 13.8 | 179.399994 | 1 | 0.0001 | 0.17 | 1.78315 | 1.13012 | 0.488 | 0.878 | 1.73518 | 1.73824 | 0.000018 | 83.379997 | 64.900002 | 0.000001 | 6.47 | 6.01 | 6.37 | 1,260 | 1,625 | FDTD | 4.54 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.8 | 0.709 | -15 | 92 | 5 | 0.000008 | 0.22 | 1.86015 | 1.03016 | 1.755 | 1.944 | 1.69981 | 1.70713 | 0.000068 | 64.349998 | 52.23 | 0.000002 | 9.08 | 8.73 | 8.86 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.77 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 0.502 | 0.81 | 10.6 | 164.199997 | 1 | 0.000012 | 0.22 | 1.98325 | 1.00276 | 1.91 | 2.119 | 1.71523 | 1.71738 | 0.000014 | 86.370003 | 13.66 | 0.000002 | 8.48 | 8 | 8.37 | 1,260 | 1,625 | FDTD | 1.31 |
SU-8 | Air | 1.565 | 0.717 | -48 | 116.800003 | 10 | 0.00001 | 0.25 | 1.75146 | 1.22348 | 1.775 | 3.246 | 1.55731 | 1.56526 | 0.000048 | 72.839996 | 53.060001 | 0.000003 | 5.78 | 5.36 | 5.33 | 1,260 | 1,625 | FDTD | 0.73 |
Silicon Nitride (Si₃N₄) | Air | 1.307 | 0.268 | 17 | 159.399994 | 10 | 0.000003 | 18.27 | 1.57761 | 1.22472 | 0.613 | 0.932 | 1.66413 | 1.66663 | 0.000018 | 78.480003 | 70.800003 | 0.000003 | 1.1 | 0.82 | 0.67 | 1,260 | 1,625 | FDTD | 0.15 |
Polymethyl Methacrylate (PMMA) | Air | 1.865 | 0.804 | -25.799999 | 162.800003 | 1 | 0.000009 | 0.22 | 1.80782 | 1.03836 | 2.747 | 3.734 | 1.5142 | 1.5175 | 0.000018 | 72.900002 | 70.099998 | 0.000003 | 6.09 | 5.78 | 5.82 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.28 |
SU-8 | Silicon Dioxide (SiO₂) | 1.195 | 0.316 | -16.200001 | 108.300003 | 5 | 0.000009 | 0.21 | 1.83627 | 1.12208 | 1.383 | 2.529 | 1.6813 | 1.68332 | 0.000016 | 71.519997 | 34.919998 | 0.000005 | 9.72 | 9.27 | 9.3 | 1,260 | 1,625 | FDTD | 3.29 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.679 | 0.784 | -0.7 | 174.5 | 10 | 0.000012 | 0.21 | 1.84294 | 1.18687 | 1.123 | 1.433 | 1.52236 | 1.52809 | 0.000033 | 75.82 | 45.150002 | 0.000003 | 2.24 | 2.05 | 2.12 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.39 |