waveguide_material
stringclasses 5
values | cladding_material
stringclasses 2
values | waveguide_width
float32 0.5
2
| waveguide_height
float32 0.2
1
| temperature_min
float32 -50
20
| temperature_max
float32 80
200
| temperature_step
float32 1
10
| thermal_expansion_coefficient
float32 0
0
| thermal_conductivity
float32 0.15
20
| refractive_index_core
float32 1.4
2
| refractive_index_cladding
float32 1
1.5
| propagation_loss_min
float32 0.1
3
| propagation_loss_max
float32 0.21
4.5
| effective_index_min
float32 1.4
2
| effective_index_max
float32 1.4
2.01
| dn_dT
float32 0
0
| thermal_tuning_efficiency
float32 50
90
| thermal_stress
float32 10
100
| strain_rate
float32 0
0
| optical_power_input
float32 0.5
10
| optical_power_output_min
float32 0
9.89
| optical_power_output_max
float32 0
9.89
| wavelength_min
float32 1.26k
1.26k
| wavelength_max
float32 1.63k
1.63k
| simulation_model
stringclasses 2
values | measurement_uncertainty
float32 0.1
5
|
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
Silicon Nitride (Si₃N₄) | Air | 1.914 | 0.718 | -6.7 | 99.900002 | 1 | 0.000003 | 15.98 | 1.46067 | 1.25151 | 0.175 | 1.577 | 1.91605 | 1.92132 | 0.000049 | 84.739998 | 44.799999 | 0.000003 | 2.52 | 2.37 | 2.06 | 1,260 | 1,625 | FDTD | 4.58 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.647 | 0.714 | -6.4 | 102.300003 | 1 | 0.000001 | 1.33 | 1.77911 | 1.04845 | 2.324 | 3.049 | 1.634 | 1.63618 | 0.00002 | 85.629997 | 75.139999 | 0.000004 | 2.03 | 1.76 | 1.93 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.73 |
Polydimethylsiloxane (PDMS) | Air | 1.295 | 0.526 | -29.4 | 166.100006 | 1 | 0.000127 | 0.17 | 1.99998 | 1.43414 | 0.761 | 2.257 | 1.66755 | 1.67498 | 0.000038 | 89.029999 | 59.599998 | 0.000004 | 4.21 | 4.06 | 3.83 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.14 |
Polymethyl Methacrylate (PMMA) | Air | 0.957 | 0.764 | 14.2 | 87.900002 | 10 | 0.00001 | 0.22 | 1.44141 | 1.11376 | 0.427 | 1.695 | 1.85545 | 1.86319 | 0.000105 | 80.269997 | 91.550003 | 0.000003 | 9.58 | 9.24 | 9.32 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.8 |
SU-8 | Air | 1.718 | 0.598 | -16.5 | 101.300003 | 1 | 0.000012 | 0.24 | 1.57519 | 1.03147 | 2.215 | 3.278 | 1.73608 | 1.73831 | 0.000019 | 70.43 | 60.439999 | 0.000001 | 1.35 | 0.91 | 0.95 | 1,260 | 1,625 | FDTD | 4.92 |
Silicon Dioxide (SiO₂) | Air | 0.813 | 0.838 | -32.099998 | 143.100006 | 5 | 0.000001 | 1.31 | 1.42922 | 1.2259 | 0.829 | 1.868 | 1.94907 | 1.95726 | 0.000047 | 59.759998 | 52.700001 | 0 | 1.13 | 0.84 | 0.67 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.41 |
SU-8 | Air | 1.731 | 0.751 | -47 | 138.800003 | 5 | 0.000009 | 0.22 | 1.78353 | 1.05361 | 2.111 | 2.637 | 1.79478 | 1.79595 | 0.000006 | 75.269997 | 48.029999 | 0.000003 | 9.22 | 8.96 | 8.96 | 1,260 | 1,625 | FDTD | 1.03 |
Polymethyl Methacrylate (PMMA) | Air | 0.851 | 0.286 | -28.1 | 144.600006 | 5 | 0.000013 | 0.21 | 1.83588 | 1.39968 | 2.914 | 3.421 | 1.72526 | 1.7316 | 0.000037 | 63.639999 | 46.130001 | 0.000004 | 6.63 | 6.22 | 6.51 | 1,260 | 1,625 | FDTD | 3.59 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 0.792 | 0.537 | 19.6 | 160.199997 | 1 | 0.000012 | 0.21 | 1.4556 | 1.20576 | 0.754 | 1.338 | 1.63257 | 1.64173 | 0.000065 | 69.199997 | 73.300003 | 0.000005 | 9.88 | 9.56 | 9.72 | 1,260 | 1,625 | FDTD | 4.64 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.542 | 0.679 | -31.700001 | 121.099998 | 5 | 0.000001 | 1.47 | 1.92729 | 1.15582 | 2.329 | 3.051 | 1.80577 | 1.81027 | 0.000029 | 63.169998 | 64.440002 | 0.000004 | 6.96 | 6.6 | 6.6 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.86 |
SU-8 | Air | 1.905 | 0.623 | 10 | 107.5 | 10 | 0.000011 | 0.29 | 1.56973 | 1.07008 | 1.185 | 1.517 | 1.47291 | 1.4789 | 0.000061 | 65.059998 | 44.700001 | 0.000002 | 6.16 | 5.99 | 5.67 | 1,260 | 1,625 | FDTD | 2.3 |
SU-8 | Air | 1.044 | 0.26 | -49.5 | 119.199997 | 1 | 0.000007 | 0.21 | 1.93081 | 1.28316 | 1.702 | 2.586 | 1.87064 | 1.87229 | 0.00001 | 63.209999 | 36.139999 | 0.000004 | 5.42 | 5.23 | 5.03 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.84 |
Polydimethylsiloxane (PDMS) | Air | 1.643 | 0.579 | 14.1 | 97.699997 | 10 | 0.000192 | 0.2 | 1.96932 | 1.41194 | 0.98 | 2.2 | 1.4134 | 1.42063 | 0.000086 | 59.34 | 67.339996 | 0.000001 | 8.47 | 8.03 | 8.24 | 1,260 | 1,625 | FDTD | 0.11 |
Silicon Nitride (Si₃N₄) | Air | 1.71 | 0.891 | -17.9 | 160 | 10 | 0.000003 | 17.139999 | 1.72576 | 1.32273 | 2.112 | 2.772 | 1.56284 | 1.57283 | 0.000056 | 67.089996 | 23.610001 | 0.000004 | 1.74 | 1.55 | 1.34 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.85 |
Silicon Nitride (Si₃N₄) | Air | 1.433 | 0.612 | -27.700001 | 131.399994 | 10 | 0.000003 | 16.969999 | 1.64311 | 1.07842 | 1.391 | 2.266 | 1.7817 | 1.78797 | 0.000039 | 84.879997 | 75.330002 | 0.000004 | 1.33 | 1.14 | 1.09 | 1,260 | 1,625 | FDTD | 4.92 |
SU-8 | Silicon Dioxide (SiO₂) | 0.59 | 0.38 | -1 | 195.5 | 10 | 0.000007 | 0.2 | 1.71377 | 1.14119 | 1.546 | 2.87 | 1.67713 | 1.68442 | 0.000037 | 65.650002 | 67.57 | 0.000004 | 9.9 | 9.49 | 9.73 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.88 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.275 | 0.244 | -30.6 | 99 | 10 | 0.000007 | 0.19 | 1.43029 | 1.38354 | 0.454 | 0.998 | 1.97437 | 1.97649 | 0.000016 | 82.790001 | 13.79 | 0 | 9.68 | 9.41 | 9.49 | 1,260 | 1,625 | FDTD | 2.55 |
SU-8 | Air | 1.69 | 0.234 | 18.700001 | 185.5 | 1 | 0.000011 | 0.22 | 1.64639 | 1.3413 | 1.011 | 2.383 | 1.63217 | 1.63362 | 0.000009 | 72.290001 | 74.809998 | 0 | 4.46 | 4.21 | 4.04 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.53 |
Polymethyl Methacrylate (PMMA) | Air | 1.616 | 0.331 | -27 | 128 | 10 | 0.000014 | 0.22 | 1.75458 | 1.16692 | 2.985 | 4.168 | 1.62672 | 1.63456 | 0.000051 | 52.900002 | 13.23 | 0.000002 | 6.07 | 5.66 | 5.66 | 1,260 | 1,625 | FDTD | 0.15 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.739 | 0.457 | -40.799999 | 109 | 5 | 0.000003 | 19.9 | 1.84878 | 1.1061 | 0.569 | 1.783 | 1.95505 | 1.9569 | 0.000012 | 61.700001 | 85.699997 | 0 | 3.8 | 3.35 | 3.56 | 1,260 | 1,625 | FDTD | 0.33 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.836 | 0.759 | -22.700001 | 192.100006 | 10 | 0.000013 | 0.19 | 1.47584 | 1.44696 | 2.373 | 2.953 | 1.80749 | 1.80913 | 0.000008 | 66.419998 | 97.150002 | 0.000005 | 9.76 | 9.5 | 9.6 | 1,260 | 1,625 | FDTD | 4.61 |
Silicon Nitride (Si₃N₄) | Air | 0.574 | 0.235 | -3 | 173 | 5 | 0.000003 | 16.709999 | 1.77315 | 1.13058 | 2.014 | 2.734 | 1.79528 | 1.8024 | 0.00004 | 70.68 | 83.040001 | 0.000004 | 7.8 | 7.43 | 7.69 | 1,260 | 1,625 | FDTD | 4.84 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.53 | 0.825 | 15.4 | 192 | 10 | 0.000001 | 1.33 | 1.96324 | 1.08777 | 2.108 | 2.372 | 1.48208 | 1.4919 | 0.000056 | 70.07 | 62.59 | 0.000001 | 3.87 | 3.53 | 3.44 | 1,260 | 1,625 | FDTD | 3.64 |
SU-8 | Air | 1.176 | 0.924 | -25.9 | 162.5 | 1 | 0.000008 | 0.27 | 1.84384 | 1.09426 | 0.197 | 0.966 | 1.82645 | 1.83432 | 0.000042 | 71.75 | 42.18 | 0.000001 | 4.08 | 3.62 | 3.82 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.55 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.734 | 0.37 | -17.6 | 167.100006 | 1 | 0.000001 | 1.45 | 1.48961 | 1.44739 | 2.215 | 2.754 | 1.627 | 1.63211 | 0.000028 | 72.220001 | 44.200001 | 0 | 3.53 | 3.37 | 3.37 | 1,260 | 1,625 | FDTD | 4.26 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 0.836 | 0.319 | -6.8 | 187.600006 | 10 | 0.000179 | 0.15 | 1.85578 | 1.4847 | 0.843 | 1.484 | 1.69479 | 1.69584 | 0.000005 | 71.330002 | 86.559998 | 0.000002 | 6.83 | 6.46 | 6.38 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.62 |
Silicon Nitride (Si₃N₄) | Air | 0.895 | 0.822 | 9.4 | 188.199997 | 5 | 0.000003 | 19.549999 | 1.66674 | 1.18289 | 1.204 | 1.861 | 1.64918 | 1.65409 | 0.000027 | 63.040001 | 12.36 | 0.000001 | 7 | 6.62 | 6.52 | 1,260 | 1,625 | FDTD | 3 |
SU-8 | Silicon Dioxide (SiO₂) | 1.44 | 0.827 | -33.200001 | 186.5 | 10 | 0.000007 | 0.23 | 1.52815 | 1.08425 | 2.165 | 2.402 | 1.71074 | 1.72019 | 0.000043 | 88.550003 | 69.919998 | 0.000003 | 2.91 | 2.56 | 2.49 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.57 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 0.537 | 0.844 | -7.9 | 172.899994 | 1 | 0.000001 | 1.46 | 1.67587 | 1.30365 | 2.993 | 4.147 | 1.44367 | 1.44598 | 0.000013 | 62.240002 | 42.200001 | 0.000003 | 7.51 | 7.04 | 7.34 | 1,260 | 1,625 | FDTD | 2.71 |
SU-8 | Air | 1.706 | 0.664 | 16.700001 | 188.800003 | 5 | 0.000011 | 0.24 | 1.62841 | 1.16805 | 0.241 | 1.449 | 1.89243 | 1.8957 | 0.000019 | 85.980003 | 69.160004 | 0.000003 | 1.89 | 1.48 | 1.69 | 1,260 | 1,625 | FDTD | 3.82 |
SU-8 | Air | 1.63 | 0.589 | 0 | 101.900002 | 5 | 0.000006 | 0.25 | 1.54914 | 1.44938 | 0.678 | 0.922 | 1.65094 | 1.65454 | 0.000035 | 64.919998 | 15.42 | 0.000005 | 8.57 | 8.17 | 8.07 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.91 |
Silicon Dioxide (SiO₂) | Air | 0.882 | 0.892 | -1.8 | 176.300003 | 10 | 0.000001 | 1.33 | 1.54287 | 1.04424 | 0.357 | 0.561 | 1.49633 | 1.50446 | 0.000046 | 85.910004 | 51.959999 | 0.000002 | 6.84 | 6.35 | 6.61 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.61 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.089 | 0.912 | -27.6 | 190.600006 | 10 | 0.000137 | 0.18 | 1.57978 | 1.00883 | 2.051 | 2.87 | 1.67968 | 1.68077 | 0.000005 | 56.369999 | 63.18 | 0.000001 | 2.65 | 2.31 | 2.4 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.21 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.884 | 0.276 | 12.6 | 169.100006 | 10 | 0.000174 | 0.15 | 1.72307 | 1.02714 | 2.972 | 3.624 | 1.55952 | 1.56468 | 0.000033 | 71.739998 | 80.050003 | 0.000004 | 9.01 | 8.64 | 8.58 | 1,260 | 1,625 | FDTD | 0.6 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.745 | 0.802 | 17.9 | 95.699997 | 10 | 0.000013 | 0.23 | 1.76509 | 1.16041 | 1.616 | 2.348 | 1.98709 | 1.99497 | 0.000101 | 85.360001 | 54.830002 | 0.000001 | 3.93 | 3.45 | 3.76 | 1,260 | 1,625 | FDTD | 0.84 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 0.987 | 0.811 | -19.1 | 193.899994 | 5 | 0.000001 | 1.33 | 1.90471 | 1.42587 | 1.176 | 1.872 | 1.85242 | 1.86055 | 0.000038 | 56.400002 | 79.339996 | 0.000004 | 4.02 | 3.86 | 3.64 | 1,260 | 1,625 | FDTD | 4.06 |
SU-8 | Silicon Dioxide (SiO₂) | 1.224 | 0.662 | -37.200001 | 96.599998 | 10 | 0.000009 | 0.26 | 1.72846 | 1.06901 | 0.485 | 0.723 | 1.5187 | 1.52071 | 0.000015 | 76.709999 | 83.510002 | 0.000002 | 7.54 | 7.25 | 7.4 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.86 |
Polymethyl Methacrylate (PMMA) | Air | 1.783 | 0.599 | 1.1 | 171.100006 | 5 | 0.000014 | 0.19 | 1.70868 | 1.30351 | 1.148 | 2.316 | 1.416 | 1.42134 | 0.000031 | 89.209999 | 34.639999 | 0.000001 | 1.91 | 1.6 | 1.73 | 1,260 | 1,625 | FDTD | 2.59 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.441 | 0.951 | 6.5 | 110 | 1 | 0.000216 | 0.15 | 1.79102 | 1.09147 | 1.684 | 2.092 | 1.51532 | 1.52072 | 0.000052 | 85.099998 | 74.800003 | 0.000003 | 8.5 | 8.1 | 8.17 | 1,260 | 1,625 | FDTD | 4.98 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.849 | 0.384 | 4.3 | 174.300003 | 10 | 0.000003 | 18 | 1.64049 | 1.28552 | 1.831 | 2.029 | 1.79412 | 1.7981 | 0.000023 | 66.82 | 90.849998 | 0.000004 | 4.54 | 4.08 | 4.1 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.05 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.535 | 0.276 | -7.1 | 127 | 10 | 0.000003 | 17.209999 | 1.63794 | 1.12531 | 1.052 | 1.882 | 1.48285 | 1.4867 | 0.000029 | 70.089996 | 58.060001 | 0.000002 | 4.55 | 4.32 | 4.09 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.06 |
Silicon Nitride (Si₃N₄) | Air | 1.544 | 0.432 | -40.5 | 130.100006 | 1 | 0.000003 | 15.84 | 1.7423 | 1.16836 | 2.334 | 2.961 | 1.595 | 1.59723 | 0.000013 | 55.630001 | 47.84 | 0.000004 | 0.93 | 0.7 | 0.54 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.64 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.406 | 0.349 | -47 | 120.900002 | 1 | 0.000014 | 0.21 | 1.96885 | 1.28647 | 0.991 | 1.985 | 1.86113 | 1.86391 | 0.000017 | 60.119999 | 24.700001 | 0.000002 | 3.28 | 2.85 | 2.82 | 1,260 | 1,625 | FDTD | 0.75 |
Silicon Dioxide (SiO₂) | Air | 0.733 | 0.799 | -44.099998 | 147.600006 | 5 | 0.000001 | 1.32 | 1.59227 | 1.32004 | 0.762 | 1.685 | 1.79402 | 1.80076 | 0.000035 | 65.580002 | 96.050003 | 0.000002 | 1.97 | 1.62 | 1.69 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.28 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.271 | 0.23 | -49.5 | 166 | 5 | 0.000013 | 0.21 | 1.5447 | 1.40325 | 1.061 | 2.24 | 1.81379 | 1.8224 | 0.00004 | 58.41 | 22.49 | 0.000001 | 2.46 | 2.32 | 2.29 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.55 |
Silicon Nitride (Si₃N₄) | Air | 1.162 | 0.851 | 17.200001 | 136.300003 | 10 | 0.000003 | 18.18 | 1.5475 | 1.12341 | 0.247 | 1.397 | 1.53193 | 1.5332 | 0.000011 | 77.940002 | 46.919998 | 0.000002 | 5.55 | 5.33 | 5.3 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.08 |
SU-8 | Silicon Dioxide (SiO₂) | 0.764 | 0.93 | 15.6 | 152.600006 | 5 | 0.00001 | 0.22 | 1.97338 | 1.41722 | 0.432 | 0.85 | 1.56907 | 1.57372 | 0.000034 | 55.330002 | 30.75 | 0.000005 | 0.83 | 0.64 | 0.69 | 1,260 | 1,625 | FDTD | 1.59 |
SU-8 | Silicon Dioxide (SiO₂) | 1.199 | 0.935 | -41.5 | 164.5 | 1 | 0.000009 | 0.25 | 1.59517 | 1.02079 | 1.003 | 1.444 | 1.8729 | 1.87422 | 0.000006 | 87.629997 | 10.21 | 0.000004 | 5.03 | 4.89 | 4.91 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.35 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 0.894 | 0.209 | -2.1 | 155.199997 | 1 | 0.000299 | 0.2 | 1.5268 | 1.07608 | 2.291 | 3.701 | 1.62877 | 1.63145 | 0.000017 | 54 | 30.469999 | 0.000004 | 2.41 | 2.16 | 1.93 | 1,260 | 1,625 | FDTD | 1.16 |
SU-8 | Air | 1.106 | 0.928 | -17.1 | 141.899994 | 10 | 0.000011 | 0.29 | 1.80816 | 1.19855 | 1.237 | 1.637 | 1.46232 | 1.4709 | 0.000054 | 52.849998 | 91.5 | 0.000003 | 3.94 | 3.48 | 3.44 | 1,260 | 1,625 | FDTD | 1.53 |
Silicon Nitride (Si₃N₄) | Air | 0.622 | 0.254 | -29.4 | 186 | 10 | 0.000003 | 19.02 | 1.73314 | 1.26599 | 1.102 | 1.655 | 1.6354 | 1.63653 | 0.000005 | 89.75 | 86.480003 | 0.000002 | 6.75 | 6.63 | 6.36 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.62 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 0.83 | 0.726 | -7.9 | 85.5 | 1 | 0.000007 | 0.21 | 1.57365 | 1.48669 | 0.464 | 1.575 | 1.67141 | 1.67867 | 0.000078 | 83.709999 | 37.259998 | 0.000005 | 6.59 | 6.29 | 6.1 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.85 |
Polymethyl Methacrylate (PMMA) | Air | 1.467 | 0.763 | -6.8 | 107.300003 | 1 | 0.000012 | 0.23 | 1.58939 | 1.23787 | 2.224 | 2.921 | 1.56133 | 1.56314 | 0.000016 | 89.379997 | 52.669998 | 0 | 4.34 | 3.91 | 4.16 | 1,260 | 1,625 | FDTD | 2.82 |
SU-8 | Silicon Dioxide (SiO₂) | 1.305 | 0.207 | -37.299999 | 89 | 10 | 0.000007 | 0.24 | 1.96741 | 1.31293 | 0.714 | 1.185 | 1.99614 | 2.0022 | 0.000048 | 56.09 | 76.489998 | 0.000003 | 1.65 | 1.38 | 1.55 | 1,260 | 1,625 | FDTD | 4.38 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.193 | 0.699 | -32.400002 | 131.699997 | 1 | 0.000001 | 1.36 | 1.64155 | 1.05091 | 2.542 | 3.042 | 1.89319 | 1.90312 | 0.000061 | 79.779999 | 35.290001 | 0.000001 | 8.98 | 8.57 | 8.63 | 1,260 | 1,625 | FDTD | 2.69 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.46 | 0.67 | 5.5 | 150.199997 | 5 | 0.000001 | 1.41 | 1.57409 | 1.25375 | 2.231 | 2.357 | 1.46152 | 1.46792 | 0.000044 | 70.959999 | 87.110001 | 0.000002 | 2.1 | 1.84 | 1.61 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.86 |
SU-8 | Silicon Dioxide (SiO₂) | 1.488 | 0.428 | -44.900002 | 150.800003 | 5 | 0.00001 | 0.24 | 1.47848 | 1.49884 | 1.134 | 2.107 | 1.75692 | 1.76192 | 0.000026 | 89.309998 | 38.799999 | 0.000002 | 1.02 | 0.61 | 0.78 | 1,260 | 1,625 | FDTD | 2.49 |
Polydimethylsiloxane (PDMS) | Air | 1.316 | 0.579 | -28.5 | 160.899994 | 5 | 0.000296 | 0.2 | 1.81291 | 1.2342 | 2.769 | 3.796 | 1.85825 | 1.86601 | 0.000041 | 62.009998 | 94.959999 | 0 | 8.03 | 7.6 | 7.81 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.35 |
SU-8 | Air | 0.918 | 0.432 | -13.8 | 83.900002 | 10 | 0.000008 | 0.24 | 1.56836 | 1.44866 | 2.367 | 2.677 | 1.66104 | 1.66703 | 0.000061 | 63.009998 | 70.339996 | 0.000001 | 2.91 | 2.51 | 2.48 | 1,260 | 1,625 | FDTD | 3.49 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 0.638 | 0.874 | -43 | 162.100006 | 5 | 0.000142 | 0.16 | 1.87777 | 1.32457 | 1.917 | 2.832 | 1.46266 | 1.46939 | 0.000033 | 55.73 | 58.66 | 0.000001 | 9.88 | 9.72 | 9.62 | 1,260 | 1,625 | FDTD | 3.06 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.083 | 0.719 | -2.1 | 101.300003 | 1 | 0.00001 | 0.21 | 1.41669 | 1.48093 | 1.703 | 1.889 | 1.79661 | 1.80304 | 0.000062 | 53.169998 | 78.879997 | 0 | 8.34 | 7.97 | 7.91 | 1,260 | 1,625 | FDTD | 1.19 |
Silicon Nitride (Si₃N₄) | Air | 1.602 | 0.455 | 0.7 | 147.399994 | 5 | 0.000003 | 17.139999 | 1.61606 | 1.16794 | 1.939 | 3.43 | 1.98745 | 1.98885 | 0.00001 | 56.720001 | 52.099998 | 0.000004 | 7.06 | 6.88 | 6.91 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.27 |
Polymethyl Methacrylate (PMMA) | Air | 0.83 | 0.56 | 17.700001 | 80.900002 | 5 | 0.000014 | 0.22 | 1.41938 | 1.17577 | 2.808 | 3.64 | 1.59342 | 1.59875 | 0.000084 | 50.169998 | 51.41 | 0.000002 | 0.6 | 0.13 | 0.27 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.91 |
SU-8 | Silicon Dioxide (SiO₂) | 1.185 | 0.652 | -12.5 | 186.399994 | 1 | 0.000012 | 0.3 | 1.91225 | 1.42067 | 0.856 | 1.988 | 1.8873 | 1.89439 | 0.000036 | 58.68 | 39.849998 | 0.000002 | 6.52 | 6.36 | 6.39 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.05 |
SU-8 | Air | 1.842 | 0.289 | -28.1 | 126.199997 | 5 | 0.000011 | 0.26 | 1.4597 | 1.32704 | 1.918 | 2.227 | 1.84109 | 1.84211 | 0.000007 | 53.150002 | 94.889999 | 0.000004 | 9.39 | 9.04 | 9.21 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.98 |
SU-8 | Silicon Dioxide (SiO₂) | 1.529 | 0.754 | -45.099998 | 159 | 10 | 0.000007 | 0.28 | 1.72683 | 1.2271 | 0.207 | 0.748 | 1.47005 | 1.47205 | 0.00001 | 84.690002 | 82.580002 | 0 | 7.67 | 7.19 | 7.44 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.72 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.29 | 0.406 | -8.2 | 118.099998 | 1 | 0.000001 | 1.34 | 1.74123 | 1.25983 | 0.629 | 1.338 | 1.97251 | 1.98181 | 0.000074 | 60.790001 | 72.919998 | 0.000003 | 3.68 | 3.44 | 3.43 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.11 |
Polymethyl Methacrylate (PMMA) | Air | 1.928 | 0.49 | -16.700001 | 145.300003 | 5 | 0.00001 | 0.24 | 1.70206 | 1.09827 | 1.226 | 1.64 | 1.40464 | 1.40711 | 0.000015 | 88.389999 | 57.77 | 0.000002 | 7.45 | 7.27 | 7.1 | 1,260 | 1,625 | FDTD | 1.26 |
Polymethyl Methacrylate (PMMA) | Air | 1.29 | 0.953 | -12.3 | 112.199997 | 10 | 0.000015 | 0.2 | 1.76219 | 1.22298 | 0.388 | 1.726 | 1.88508 | 1.89296 | 0.000063 | 52.419998 | 73.410004 | 0.000005 | 5.22 | 4.89 | 5.02 | 1,260 | 1,625 | FDTD | 0.26 |
Polymethyl Methacrylate (PMMA) | Air | 1.918 | 0.842 | -49 | 84.599998 | 10 | 0.000014 | 0.25 | 1.81574 | 1.43862 | 0.195 | 0.943 | 1.51959 | 1.52562 | 0.000045 | 67.82 | 50.07 | 0.000002 | 3.3 | 2.95 | 2.91 | 1,260 | 1,625 | FDTD | 2.89 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.796 | 0.502 | -4.4 | 193.300003 | 5 | 0.000111 | 0.18 | 1.58616 | 1.34049 | 1.665 | 2.417 | 1.72687 | 1.72957 | 0.000014 | 53.240002 | 95.57 | 0.000001 | 2.71 | 2.54 | 2.22 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.49 |
SU-8 | Silicon Dioxide (SiO₂) | 0.884 | 0.768 | 12.9 | 100.300003 | 5 | 0.000008 | 0.29 | 1.6184 | 1.15638 | 0.711 | 2.084 | 1.78584 | 1.78901 | 0.000036 | 79.860001 | 15.17 | 0.000002 | 2.38 | 2.08 | 1.97 | 1,260 | 1,625 | FDTD | 2 |
Silicon Dioxide (SiO₂) | Air | 1.492 | 0.489 | -2.8 | 196 | 10 | 0.000001 | 1.36 | 1.82439 | 1.221 | 2.897 | 3.919 | 1.56993 | 1.57198 | 0.00001 | 51.119999 | 82.919998 | 0.000001 | 4.37 | 4.26 | 4.22 | 1,260 | 1,625 | FDTD | 4.58 |
Silicon Dioxide (SiO₂) | Air | 1.075 | 0.886 | -4 | 198.399994 | 1 | 0.000001 | 1.4 | 1.60515 | 1.46243 | 0.442 | 0.936 | 1.5856 | 1.58775 | 0.000011 | 64.589996 | 36.700001 | 0.000004 | 3.97 | 3.65 | 3.49 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.6 |
Silicon Dioxide (SiO₂) | Air | 0.795 | 0.285 | -33.5 | 137.5 | 5 | 0.000001 | 1.39 | 1.96331 | 1.41617 | 1.197 | 2.428 | 1.56439 | 1.57222 | 0.000046 | 72.099998 | 92.68 | 0.000004 | 3.78 | 3.34 | 3.37 | 1,260 | 1,625 | FDTD | 1.57 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 0.865 | 0.22 | -25.5 | 105.699997 | 1 | 0.000001 | 1.34 | 1.5528 | 1.00628 | 0.768 | 1.283 | 1.60535 | 1.61148 | 0.000047 | 66.629997 | 92.589996 | 0.000003 | 4 | 3.77 | 3.68 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.39 |
SU-8 | Silicon Dioxide (SiO₂) | 0.684 | 0.942 | 16.799999 | 155.800003 | 1 | 0.000012 | 0.3 | 1.87053 | 1.2563 | 1.528 | 2.57 | 1.77902 | 1.7827 | 0.000026 | 78.209999 | 69.739998 | 0.000003 | 8.28 | 8.11 | 7.82 | 1,260 | 1,625 | FDTD | 3.46 |
Silicon Dioxide (SiO₂) | Air | 1.645 | 0.943 | 2.9 | 174.800003 | 5 | 0.000001 | 1.48 | 1.66946 | 1.0461 | 2.975 | 3.789 | 1.47951 | 1.48471 | 0.00003 | 88.599998 | 52.720001 | 0.000003 | 2.89 | 2.68 | 2.55 | 1,260 | 1,625 | FDTD | 2.34 |
Silicon Dioxide (SiO₂) | Air | 1.402 | 0.467 | -11.2 | 89.099998 | 5 | 0.000001 | 1.44 | 1.78959 | 1.23987 | 2.483 | 3.219 | 1.46672 | 1.46778 | 0.000011 | 79.32 | 69.959999 | 0.000002 | 7.39 | 7.1 | 7.19 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.55 |
Polydimethylsiloxane (PDMS) | Air | 1.77 | 0.692 | -39.5 | 111.099998 | 5 | 0.000219 | 0.18 | 1.62895 | 1.34597 | 1.559 | 2.887 | 1.74583 | 1.7533 | 0.00005 | 71.519997 | 49.459999 | 0.000004 | 7.44 | 6.96 | 7.2 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.48 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.673 | 0.373 | -37.700001 | 152.5 | 1 | 0.000153 | 0.2 | 1.73512 | 1.10403 | 1.462 | 2.056 | 1.98899 | 1.99493 | 0.000031 | 86.309998 | 22.530001 | 0.000004 | 9.81 | 9.54 | 9.7 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.73 |
SU-8 | Air | 1.378 | 0.57 | 7.7 | 107.5 | 1 | 0.000009 | 0.23 | 1.49334 | 1.20842 | 2.463 | 3.93 | 1.82812 | 1.83716 | 0.000091 | 61.32 | 76.019997 | 0.000001 | 6.6 | 6.18 | 6.48 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.71 |
Silicon Nitride (Si₃N₄) | Air | 1.563 | 0.597 | -1.2 | 99.099998 | 10 | 0.000003 | 16.809999 | 1.95627 | 1.4339 | 1.046 | 2.342 | 1.51791 | 1.51899 | 0.000011 | 89.080002 | 30.02 | 0.000002 | 5.14 | 4.84 | 5.02 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.23 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.414 | 0.714 | -8.1 | 97.599998 | 5 | 0.000233 | 0.19 | 1.86447 | 1.00841 | 1.528 | 2.073 | 1.74823 | 1.75711 | 0.000084 | 88.699997 | 74.540001 | 0.000004 | 1.84 | 1.42 | 1.57 | 1,260 | 1,625 | FDTD | 2.79 |
Polydimethylsiloxane (PDMS) | Air | 1.375 | 0.886 | -40 | 94.199997 | 10 | 0.000195 | 0.16 | 1.65733 | 1.48533 | 2.563 | 3.978 | 1.94164 | 1.94542 | 0.000028 | 67.480003 | 52.27 | 0 | 8.22 | 7.86 | 7.85 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.92 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.527 | 0.38 | -9.7 | 83.699997 | 1 | 0.000003 | 18.27 | 1.48813 | 1.03814 | 2.963 | 3.894 | 1.87529 | 1.87987 | 0.000049 | 64.870003 | 10.71 | 0.000002 | 7.52 | 7.38 | 7.17 | 1,260 | 1,625 | FDTD | 3.75 |
Polymethyl Methacrylate (PMMA) | Air | 1.131 | 0.255 | -28.700001 | 148.699997 | 10 | 0.000007 | 0.23 | 1.51327 | 1.20658 | 0.105 | 0.555 | 1.59619 | 1.60129 | 0.000029 | 60.48 | 70.339996 | 0.000004 | 1.78 | 1.4 | 1.37 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.68 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 0.935 | 0.984 | 2.8 | 192.800003 | 5 | 0.000009 | 0.22 | 1.44979 | 1.03154 | 1.318 | 2.303 | 1.81595 | 1.82094 | 0.000026 | 60.060001 | 26.860001 | 0.000001 | 7.33 | 6.92 | 6.97 | 1,260 | 1,625 | FDTD | 2.03 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.538 | 0.298 | 14.2 | 174.800003 | 5 | 0.000003 | 18.049999 | 1.43466 | 1.35084 | 1.558 | 1.732 | 1.95169 | 1.95857 | 0.000043 | 68.620003 | 43.200001 | 0.000002 | 6.66 | 6.27 | 6.23 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.2 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.379 | 0.337 | 7.4 | 100.599998 | 10 | 0.000003 | 15.2 | 1.9975 | 1.30526 | 0.423 | 1.357 | 1.88001 | 1.8857 | 0.000061 | 56.82 | 77.410004 | 0.000003 | 6.3 | 5.88 | 5.97 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.3 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.503 | 0.264 | 14.2 | 184.899994 | 10 | 0.000003 | 16.200001 | 1.84345 | 1.17904 | 0.908 | 1.884 | 1.81114 | 1.81303 | 0.000011 | 55.75 | 53.66 | 0.000005 | 6.96 | 6.76 | 6.82 | 1,260 | 1,625 | FDTD | 2.53 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.246 | 0.249 | 11.4 | 184.800003 | 5 | 0.000008 | 0.24 | 1.56737 | 1.29297 | 1.579 | 2.468 | 1.843 | 1.84594 | 0.000017 | 69.709999 | 75.540001 | 0.000004 | 3.95 | 3.72 | 3.68 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.16 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.497 | 0.426 | -46 | 175 | 1 | 0.000001 | 1.36 | 1.4452 | 1.44755 | 1.827 | 3.313 | 1.95757 | 1.95885 | 0.000006 | 64.949997 | 83.910004 | 0.000004 | 4.28 | 3.81 | 4.11 | 1,260 | 1,625 | FDTD | 3.91 |
SU-8 | Silicon Dioxide (SiO₂) | 1.322 | 0.568 | 16.6 | 147 | 10 | 0.00001 | 0.27 | 1.6208 | 1.35192 | 0.967 | 1.149 | 1.8824 | 1.88924 | 0.000052 | 83.970001 | 26.450001 | 0.000004 | 3.73 | 3.6 | 3.24 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.34 |
SU-8 | Silicon Dioxide (SiO₂) | 0.829 | 0.847 | -3.9 | 174.399994 | 1 | 0.000011 | 0.28 | 1.86487 | 1.03801 | 0.709 | 1.613 | 1.50853 | 1.51708 | 0.000048 | 67.25 | 72.940002 | 0.000003 | 1.54 | 1.37 | 1.05 | 1,260 | 1,625 | FDTD | 4.08 |
SU-8 | Silicon Dioxide (SiO₂) | 1.165 | 0.409 | -9 | 93.199997 | 10 | 0.000008 | 0.23 | 1.70114 | 1.20665 | 0.988 | 1.966 | 1.92886 | 1.93547 | 0.000065 | 82.690002 | 34.939999 | 0.000001 | 6.79 | 6.41 | 6.3 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.68 |
Polydimethylsiloxane (PDMS) | Air | 1.373 | 0.664 | 2.8 | 129.5 | 1 | 0.00021 | 0.17 | 1.49572 | 1.41348 | 1.431 | 2.229 | 1.63332 | 1.63758 | 0.000034 | 63.18 | 64.120003 | 0.000003 | 1.51 | 1.21 | 1.22 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.85 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.492 | 0.22 | 4.3 | 133.399994 | 1 | 0.00015 | 0.18 | 1.78325 | 1.4409 | 0.5 | 0.753 | 1.85703 | 1.86292 | 0.000046 | 76.800003 | 55.759998 | 0.000001 | 3.53 | 3.13 | 3.07 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.61 |
SU-8 | Air | 1.473 | 0.612 | 17.6 | 91.599998 | 5 | 0.000008 | 0.24 | 1.67697 | 1.2772 | 0.838 | 1.304 | 1.69727 | 1.70518 | 0.000107 | 65.739998 | 26.23 | 0.000003 | 2.79 | 2.46 | 2.36 | 1,260 | 1,625 | FDTD | 3.47 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.868 | 0.52 | -35.799999 | 119.400002 | 5 | 0.000013 | 0.24 | 1.47864 | 1.43192 | 1.504 | 2.726 | 1.69721 | 1.70214 | 0.000032 | 83.010002 | 31.18 | 0.000001 | 3.13 | 2.9 | 3.01 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.86 |