waveguide_material
stringclasses 5
values | cladding_material
stringclasses 2
values | waveguide_width
float32 0.5
2
| waveguide_height
float32 0.2
1
| temperature_min
float32 -50
20
| temperature_max
float32 80
200
| temperature_step
float32 1
10
| thermal_expansion_coefficient
float32 0
0
| thermal_conductivity
float32 0.15
20
| refractive_index_core
float32 1.4
2
| refractive_index_cladding
float32 1
1.5
| propagation_loss_min
float32 0.1
3
| propagation_loss_max
float32 0.21
4.5
| effective_index_min
float32 1.4
2
| effective_index_max
float32 1.4
2.01
| dn_dT
float32 0
0
| thermal_tuning_efficiency
float32 50
90
| thermal_stress
float32 10
100
| strain_rate
float32 0
0
| optical_power_input
float32 0.5
10
| optical_power_output_min
float32 0
9.89
| optical_power_output_max
float32 0
9.89
| wavelength_min
float32 1.26k
1.26k
| wavelength_max
float32 1.63k
1.63k
| simulation_model
stringclasses 2
values | measurement_uncertainty
float32 0.1
5
|
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.512 | 0.466 | -5.3 | 121.800003 | 1 | 0.000226 | 0.16 | 1.96306 | 1.32465 | 2.865 | 3.697 | 1.94518 | 1.94976 | 0.000036 | 64.199997 | 70.949997 | 0.000005 | 4.02 | 3.61 | 3.88 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.25 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.613 | 0.572 | -2.7 | 155.199997 | 10 | 0.000001 | 1.35 | 1.5617 | 1.15634 | 1.72 | 2.751 | 1.49337 | 1.49711 | 0.000024 | 72.290001 | 96.540001 | 0.000005 | 9.84 | 9.48 | 9.54 | 1,260 | 1,625 | FDTD | 1.32 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 0.879 | 0.855 | -3.9 | 113 | 10 | 0.000241 | 0.17 | 1.87912 | 1.07275 | 2.402 | 3.315 | 1.73656 | 1.74465 | 0.000069 | 75.400002 | 69.370003 | 0.000001 | 5 | 4.5 | 4.9 | 1,260 | 1,625 | FDTD | 2.43 |
Silicon Nitride (Si₃N₄) | Air | 0.588 | 0.364 | -6.1 | 170.100006 | 10 | 0.000003 | 19.23 | 1.70773 | 1.27199 | 0.913 | 2.241 | 1.44414 | 1.4467 | 0.000015 | 71.059998 | 55.970001 | 0.000004 | 1.52 | 1.35 | 1.21 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.23 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.515 | 0.212 | -5.2 | 128.800003 | 10 | 0.000003 | 19.6 | 1.76016 | 1.4672 | 1.866 | 2.147 | 1.7061 | 1.70793 | 0.000014 | 84.75 | 71.879997 | 0 | 5.44 | 5.2 | 5.31 | 1,260 | 1,625 | FDTD | 1.31 |
Silicon Nitride (Si₃N₄) | Air | 1.227 | 0.298 | -0.1 | 161.800003 | 1 | 0.000003 | 19.42 | 1.83914 | 1.49847 | 2.082 | 2.598 | 1.85874 | 1.86144 | 0.000017 | 77.540001 | 48.209999 | 0.000005 | 4.63 | 4.26 | 4.18 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.51 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.953 | 0.89 | -25.700001 | 116.300003 | 1 | 0.000001 | 1.38 | 1.72046 | 1.37169 | 2.159 | 2.938 | 1.78417 | 1.78817 | 0.000028 | 63.02 | 42.650002 | 0.000002 | 4.23 | 4.02 | 3.82 | 1,260 | 1,625 | FDTD | 4.83 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.449 | 0.73 | -26.9 | 95.900002 | 10 | 0.000001 | 1.38 | 1.755 | 1.14676 | 2.334 | 3.327 | 1.53962 | 1.54252 | 0.000024 | 79.050003 | 40.41 | 0.000001 | 3.41 | 2.93 | 3.2 | 1,260 | 1,625 | FDTD | 4.95 |
SU-8 | Silicon Dioxide (SiO₂) | 0.836 | 0.316 | 10.9 | 188.699997 | 5 | 0.000006 | 0.25 | 1.99682 | 1.16406 | 0.262 | 0.895 | 1.54108 | 1.54496 | 0.000022 | 60.59 | 95.160004 | 0.000003 | 7.26 | 6.95 | 7.08 | 1,260 | 1,625 | FDTD | 1.72 |
Polymethyl Methacrylate (PMMA) | Air | 1.847 | 0.565 | -18.799999 | 101 | 5 | 0.000013 | 0.21 | 1.94186 | 1.17258 | 1.213 | 1.802 | 1.68883 | 1.69841 | 0.00008 | 59.459999 | 58.220001 | 0 | 8.82 | 8.57 | 8.44 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.27 |
SU-8 | Silicon Dioxide (SiO₂) | 1.018 | 0.61 | -36 | 180.300003 | 10 | 0.000007 | 0.21 | 1.75343 | 1.14939 | 0.296 | 0.846 | 1.80551 | 1.80806 | 0.000012 | 73.07 | 39.02 | 0 | 4.4 | 4.24 | 4.29 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.87 |
Polymethyl Methacrylate (PMMA) | Air | 0.969 | 0.815 | -16.9 | 185.899994 | 1 | 0.000014 | 0.2 | 1.64969 | 1.16881 | 2.752 | 4.103 | 1.78191 | 1.78495 | 0.000015 | 78.470001 | 76.93 | 0.000001 | 7.13 | 7 | 6.92 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.88 |
Polydimethylsiloxane (PDMS) | Air | 0.808 | 0.31 | 18.799999 | 196.899994 | 1 | 0.000121 | 0.2 | 1.43054 | 1.21916 | 0.276 | 0.573 | 1.85701 | 1.85948 | 0.000014 | 75.529999 | 48.849998 | 0.000004 | 7.47 | 7.1 | 7.01 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.76 |
Polydimethylsiloxane (PDMS) | Air | 1.795 | 0.877 | 16 | 110.199997 | 10 | 0.000208 | 0.19 | 1.67965 | 1.01518 | 1.899 | 2.443 | 1.94487 | 1.95468 | 0.000104 | 57.279999 | 96.160004 | 0.000003 | 7.36 | 7.22 | 7.13 | 1,260 | 1,625 | FDTD | 4.95 |
SU-8 | Air | 0.817 | 0.634 | -8.4 | 89.300003 | 5 | 0.00001 | 0.21 | 1.94807 | 1.23541 | 1.153 | 2.645 | 1.44599 | 1.44924 | 0.000033 | 78.510002 | 65.709999 | 0.000004 | 8.71 | 8.54 | 8.28 | 1,260 | 1,625 | FDTD | 4.99 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 0.707 | 0.309 | 17.9 | 190.699997 | 1 | 0.000011 | 0.23 | 1.74614 | 1.35304 | 0.235 | 0.505 | 1.71062 | 1.7169 | 0.000036 | 54.040001 | 18.24 | 0.000003 | 5.14 | 4.81 | 4.86 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.06 |
Polymethyl Methacrylate (PMMA) | Air | 1.63 | 0.393 | -21.299999 | 87.300003 | 1 | 0.000014 | 0.22 | 1.85895 | 1.05289 | 2.3 | 2.945 | 1.4544 | 1.45987 | 0.00005 | 62.91 | 27.139999 | 0.000002 | 5.18 | 4.87 | 4.78 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.58 |
Polydimethylsiloxane (PDMS) | Air | 1.918 | 0.688 | -47.200001 | 90.900002 | 1 | 0.000149 | 0.17 | 1.86065 | 1.27497 | 1.363 | 1.95 | 1.58438 | 1.59313 | 0.000063 | 50.98 | 15.58 | 0.000004 | 8.37 | 7.96 | 8.12 | 1,260 | 1,625 | FDTD | 2.87 |
Silicon Dioxide (SiO₂) | Air | 1.175 | 0.83 | -5.4 | 108.400002 | 5 | 0.000001 | 1.43 | 1.78396 | 1.32466 | 2.08 | 2.354 | 1.58867 | 1.59621 | 0.000066 | 78.150002 | 69.110001 | 0.000002 | 6.6 | 6.2 | 6.33 | 1,260 | 1,625 | FDTD | 0.42 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.64 | 0.273 | -2.4 | 104.800003 | 1 | 0.00001 | 0.21 | 1.68514 | 1.40238 | 2.334 | 2.743 | 1.6263 | 1.63608 | 0.000091 | 69.959999 | 54.93 | 0.000002 | 4.28 | 4.1 | 4.05 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.07 |
Polymethyl Methacrylate (PMMA) | Air | 0.784 | 0.615 | 18.700001 | 188.399994 | 10 | 0.000011 | 0.25 | 1.49102 | 1.10766 | 2.136 | 3.575 | 1.4871 | 1.49532 | 0.000048 | 84.529999 | 76.449997 | 0.000002 | 1.57 | 1.27 | 1.26 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.63 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.387 | 0.465 | 3 | 155.399994 | 1 | 0.000003 | 15.8 | 1.57683 | 1.13617 | 1.275 | 2.29 | 1.49554 | 1.5015 | 0.000039 | 61.240002 | 43.09 | 0.000003 | 0.91 | 0.81 | 0.69 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.7 |
Silicon Dioxide (SiO₂) | Air | 1.084 | 0.615 | -15.8 | 131.800003 | 5 | 0.000001 | 1.31 | 1.94146 | 1.19178 | 2.624 | 3.428 | 1.8537 | 1.8635 | 0.000066 | 86.650002 | 48.220001 | 0.000005 | 9.83 | 9.49 | 9.52 | 1,260 | 1,625 | FDTD | 1.07 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.474 | 0.201 | -0.7 | 124.199997 | 5 | 0.000007 | 0.23 | 1.60415 | 1.46271 | 0.284 | 1.07 | 1.55032 | 1.55921 | 0.000071 | 81.470001 | 96.639999 | 0.000002 | 5.16 | 4.77 | 5.01 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.44 |
Polymethyl Methacrylate (PMMA) | Air | 0.711 | 0.676 | -3.8 | 131.800003 | 10 | 0.000014 | 0.2 | 1.96742 | 1.08559 | 1.526 | 2.099 | 1.5422 | 1.54429 | 0.000015 | 57.209999 | 76.139999 | 0.000003 | 3.14 | 2.66 | 2.71 | 1,260 | 1,625 | FDTD | 4.19 |
SU-8 | Silicon Dioxide (SiO₂) | 0.895 | 0.756 | 8.7 | 81.800003 | 1 | 0.000008 | 0.22 | 1.77002 | 1.45421 | 2.765 | 3.068 | 1.70256 | 1.70643 | 0.000053 | 55.470001 | 59.48 | 0.000004 | 8.8 | 8.61 | 8.55 | 1,260 | 1,625 | FDTD | 0.57 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.616 | 0.389 | -20.1 | 168.100006 | 1 | 0.000003 | 16.809999 | 1.89584 | 1.45961 | 2.433 | 3.155 | 1.52671 | 1.52803 | 0.000007 | 71.120003 | 77.5 | 0.000004 | 7.66 | 7.49 | 7.37 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.59 |
SU-8 | Air | 1.427 | 0.901 | -24.700001 | 85.099998 | 10 | 0.000011 | 0.25 | 1.62722 | 1.25383 | 2.239 | 3.657 | 1.92211 | 1.92472 | 0.000024 | 74.959999 | 14.38 | 0.000005 | 6.53 | 6.17 | 6.38 | 1,260 | 1,625 | FDTD | 3.12 |
Silicon Dioxide (SiO₂) | Air | 0.564 | 0.979 | -34.400002 | 105.300003 | 1 | 0.000001 | 1.49 | 1.85537 | 1.11084 | 0.143 | 1.104 | 1.54893 | 1.55189 | 0.000021 | 69.580002 | 73.599998 | 0 | 4.65 | 4.55 | 4.16 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.22 |
Silicon Nitride (Si₃N₄) | Air | 0.608 | 0.236 | -39.599998 | 169.699997 | 5 | 0.000003 | 19.65 | 1.98046 | 1.32082 | 0.879 | 2.181 | 1.59394 | 1.59546 | 0.000007 | 59.560001 | 59.200001 | 0.000002 | 6.02 | 5.6 | 5.66 | 1,260 | 1,625 | FDTD | 2.33 |
Polydimethylsiloxane (PDMS) | Air | 1.393 | 0.798 | 9.2 | 152.100006 | 5 | 0.000255 | 0.17 | 1.63279 | 1.24032 | 2.116 | 2.561 | 1.42144 | 1.42682 | 0.000038 | 84.32 | 22.52 | 0.000004 | 9.08 | 8.78 | 8.61 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.46 |
Polydimethylsiloxane (PDMS) | Air | 1.883 | 0.211 | -18 | 80.199997 | 10 | 0.000151 | 0.19 | 1.78269 | 1.1853 | 2.181 | 3.145 | 1.78934 | 1.79805 | 0.000089 | 70.889999 | 21.27 | 0.000002 | 6.33 | 6.13 | 6.01 | 1,260 | 1,625 | FDTD | 4.05 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.074 | 0.408 | -38.700001 | 87.699997 | 5 | 0.000215 | 0.16 | 1.77111 | 1.00824 | 0.914 | 1.634 | 1.55117 | 1.55643 | 0.000042 | 52.869999 | 13.72 | 0.000004 | 2.8 | 2.38 | 2.55 | 1,260 | 1,625 | FDTD | 2.93 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 0.883 | 0.339 | -16.5 | 167.199997 | 1 | 0.000013 | 0.21 | 1.70712 | 1.44172 | 0.798 | 1.144 | 1.75224 | 1.75464 | 0.000013 | 60.849998 | 21.690001 | 0.000002 | 3.53 | 3.39 | 3.42 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.2 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 0.547 | 0.519 | 4.8 | 102 | 1 | 0.000001 | 1.43 | 1.59529 | 1.39362 | 0.598 | 1.488 | 1.7601 | 1.76703 | 0.000071 | 81.540001 | 40.299999 | 0.000004 | 9.07 | 8.87 | 8.69 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.84 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.539 | 0.551 | -21.6 | 159.600006 | 5 | 0.000012 | 0.24 | 1.43333 | 1.20216 | 0.417 | 1.343 | 1.70953 | 1.71586 | 0.000035 | 54.77 | 23.370001 | 0.000002 | 8.9 | 8.52 | 8.71 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.04 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.466 | 0.708 | -1.4 | 81.699997 | 10 | 0.000003 | 16.540001 | 1.90075 | 1.49484 | 0.481 | 1.785 | 1.80751 | 1.81663 | 0.00011 | 81.970001 | 19.620001 | 0.000001 | 4.57 | 4.39 | 4.45 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.24 |
Polymethyl Methacrylate (PMMA) | Air | 0.689 | 0.694 | 13.4 | 143.199997 | 10 | 0.000009 | 0.19 | 1.57211 | 1.18087 | 0.183 | 1.339 | 1.86188 | 1.86472 | 0.000022 | 63.610001 | 66.610001 | 0.000004 | 2.78 | 2.5 | 2.32 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.73 |
SU-8 | Silicon Dioxide (SiO₂) | 1.98 | 0.239 | 19.799999 | 149.5 | 1 | 0.00001 | 0.2 | 1.52045 | 1.09252 | 0.707 | 1.507 | 1.62854 | 1.63004 | 0.000012 | 60.73 | 72.510002 | 0 | 1.73 | 1.41 | 1.24 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.74 |
Polymethyl Methacrylate (PMMA) | Air | 1.556 | 0.563 | 1.7 | 158.399994 | 1 | 0.000011 | 0.22 | 1.6182 | 1.43013 | 2.724 | 3.15 | 1.92142 | 1.92577 | 0.000028 | 54.240002 | 67.940002 | 0.000001 | 9.2 | 9.09 | 8.75 | 1,260 | 1,625 | FDTD | 1.18 |
Polydimethylsiloxane (PDMS) | Air | 0.772 | 0.682 | -27.799999 | 145.800003 | 10 | 0.000171 | 0.2 | 1.84569 | 1.0129 | 1.485 | 2.978 | 1.62894 | 1.63294 | 0.000023 | 74.849998 | 65.529999 | 0.000002 | 8.09 | 7.69 | 7.61 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.33 |
Silicon Nitride (Si₃N₄) | Air | 0.544 | 0.977 | -27.4 | 111 | 1 | 0.000003 | 15.48 | 1.81546 | 1.03701 | 2.996 | 3.816 | 1.87837 | 1.8815 | 0.000023 | 88.660004 | 90.57 | 0.000004 | 3.36 | 3.22 | 3 | 1,260 | 1,625 | FDTD | 0.71 |
Polymethyl Methacrylate (PMMA) | Air | 1.419 | 0.576 | -26.9 | 135.399994 | 10 | 0.000012 | 0.19 | 1.95581 | 1.19331 | 2.907 | 4.072 | 1.73241 | 1.739 | 0.000041 | 87.419998 | 42.650002 | 0.000004 | 1.85 | 1.74 | 1.75 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.7 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.572 | 0.919 | -18.4 | 115.900002 | 5 | 0.000003 | 19.450001 | 1.54201 | 1.14315 | 2.764 | 3.728 | 1.77327 | 1.77432 | 0.000008 | 54.869999 | 44.18 | 0.000005 | 5.04 | 4.9 | 4.82 | 1,260 | 1,625 | FDTD | 1.76 |
SU-8 | Silicon Dioxide (SiO₂) | 1.466 | 0.216 | -49.200001 | 129.300003 | 5 | 0.000011 | 0.29 | 1.62786 | 1.14952 | 2.28 | 3.023 | 1.46439 | 1.46918 | 0.000027 | 54.220001 | 49.990002 | 0.000005 | 5.08 | 4.6 | 4.92 | 1,260 | 1,625 | FDTD | 4.14 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.069 | 0.917 | 19.4 | 188 | 10 | 0.00001 | 0.2 | 1.60649 | 1.19787 | 1.008 | 1.761 | 1.81912 | 1.82697 | 0.000047 | 52.880001 | 15.79 | 0 | 7.88 | 7.62 | 7.65 | 1,260 | 1,625 | FDTD | 2.16 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 0.503 | 0.341 | -20.700001 | 132.699997 | 10 | 0.000001 | 1.33 | 1.86449 | 1.18202 | 0.377 | 1.819 | 1.41464 | 1.41679 | 0.000014 | 51.439999 | 58.52 | 0.000001 | 6.79 | 6.54 | 6.58 | 1,260 | 1,625 | FDTD | 4.58 |
Silicon Nitride (Si₃N₄) | Air | 0.872 | 0.476 | -6.2 | 198.5 | 10 | 0.000003 | 19.93 | 1.51685 | 1.03584 | 0.672 | 1.639 | 1.60774 | 1.61192 | 0.00002 | 78.489998 | 62.349998 | 0.000003 | 3.27 | 2.82 | 2.84 | 1,260 | 1,625 | FDTD | 3.12 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.214 | 0.725 | -21.1 | 101 | 1 | 0.000009 | 0.23 | 1.79326 | 1.47929 | 2.22 | 2.462 | 1.8571 | 1.86299 | 0.000048 | 56.650002 | 13 | 0.000001 | 8.92 | 8.61 | 8.67 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.76 |
Silicon Dioxide (SiO₂) | Air | 1.651 | 0.992 | -39.599998 | 193.300003 | 5 | 0.000001 | 1.33 | 1.74415 | 1.40559 | 1.838 | 2.978 | 1.47869 | 1.48389 | 0.000022 | 69.650002 | 31.1 | 0 | 9.38 | 9.22 | 9.23 | 1,260 | 1,625 | FDTD | 0.16 |
Polydimethylsiloxane (PDMS) | Air | 1.65 | 0.709 | 9.7 | 142.800003 | 1 | 0.000242 | 0.16 | 1.64517 | 1.14897 | 1.272 | 2.272 | 1.53803 | 1.54061 | 0.000019 | 77.18 | 80.389999 | 0.000002 | 4.87 | 4.67 | 4.75 | 1,260 | 1,625 | FDTD | 2.7 |
SU-8 | Silicon Dioxide (SiO₂) | 1.615 | 0.644 | -48.200001 | 100.599998 | 5 | 0.000011 | 0.29 | 1.53151 | 1.16792 | 2.097 | 2.904 | 1.877 | 1.88505 | 0.000054 | 68.949997 | 73.040001 | 0.000004 | 7.74 | 7.54 | 7.46 | 1,260 | 1,625 | FDTD | 1.57 |
Polydimethylsiloxane (PDMS) | Air | 0.953 | 0.864 | 12.6 | 169.199997 | 1 | 0.000269 | 0.17 | 1.50846 | 1.21187 | 0.591 | 1.487 | 1.90025 | 1.90489 | 0.00003 | 51.919998 | 26.700001 | 0.000004 | 9.49 | 9.23 | 9.07 | 1,260 | 1,625 | FDTD | 4.9 |
SU-8 | Air | 1.172 | 0.644 | 15.1 | 191.399994 | 10 | 0.00001 | 0.21 | 1.8671 | 1.14842 | 1.124 | 1.237 | 1.6862 | 1.69302 | 0.000039 | 57.080002 | 82.610001 | 0.000004 | 8.63 | 8.36 | 8.49 | 1,260 | 1,625 | FDTD | 0.37 |
SU-8 | Air | 1.532 | 0.785 | 16 | 182.199997 | 10 | 0.000009 | 0.22 | 1.99982 | 1.44257 | 1.7 | 2.989 | 1.53247 | 1.5371 | 0.000028 | 74.910004 | 55.610001 | 0.000004 | 4.42 | 4.03 | 4.18 | 1,260 | 1,625 | FDTD | 4.63 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.42 | 0.97 | -8.1 | 141.5 | 5 | 0.000011 | 0.2 | 1.91902 | 1.38776 | 1.523 | 2.071 | 1.83234 | 1.84059 | 0.000055 | 57.23 | 27.709999 | 0 | 2.93 | 2.57 | 2.53 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.6 |
Silicon Nitride (Si₃N₄) | Air | 1.488 | 0.691 | -27.5 | 143.899994 | 5 | 0.000003 | 18.790001 | 1.83541 | 1.00256 | 1.341 | 2.236 | 1.65203 | 1.65386 | 0.000011 | 69.419998 | 46.110001 | 0.000001 | 1.4 | 0.96 | 1.03 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.73 |
Silicon Nitride (Si₃N₄) | Air | 0.879 | 0.322 | 14.9 | 167.5 | 5 | 0.000003 | 18.799999 | 1.97527 | 1.06301 | 2.525 | 3.205 | 1.70188 | 1.70487 | 0.00002 | 64.839996 | 24.719999 | 0.000002 | 4.04 | 3.82 | 3.58 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.59 |
Polydimethylsiloxane (PDMS) | Air | 0.977 | 0.247 | -45.299999 | 107.800003 | 5 | 0.000272 | 0.15 | 1.53587 | 1.13436 | 2.653 | 3.89 | 1.92018 | 1.9262 | 0.000039 | 53.98 | 93.82 | 0.000004 | 8.71 | 8.52 | 8.36 | 1,260 | 1,625 | FDTD | 2.1 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.874 | 0.723 | 8.7 | 194.199997 | 10 | 0.00017 | 0.19 | 1.67207 | 1.12165 | 0.84 | 1.382 | 1.43879 | 1.44298 | 0.000023 | 52.080002 | 51.709999 | 0.000003 | 0.74 | 0.32 | 0.36 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.1 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 0.664 | 0.528 | 8.6 | 101.199997 | 5 | 0.000001 | 1.48 | 1.47783 | 1.15335 | 2.706 | 3.952 | 1.78809 | 1.79538 | 0.000079 | 87.839996 | 62.619999 | 0.000001 | 7.47 | 7.02 | 7.03 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.51 |
SU-8 | Air | 1.86 | 0.929 | -9.8 | 129.300003 | 10 | 0.000008 | 0.29 | 1.62388 | 1.15087 | 0.344 | 1.625 | 1.63077 | 1.63887 | 0.000058 | 78.07 | 25.190001 | 0.000001 | 0.59 | 0.47 | 0.41 | 1,260 | 1,625 | FDTD | 3.79 |
SU-8 | Silicon Dioxide (SiO₂) | 1.609 | 0.741 | -12.3 | 90.400002 | 10 | 0.000008 | 0.27 | 1.93009 | 1.29461 | 1.836 | 2.385 | 1.44552 | 1.45023 | 0.000046 | 77.040001 | 47.59 | 0.000003 | 7.82 | 7.7 | 7.42 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.69 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.505 | 0.811 | -49.099998 | 133.199997 | 1 | 0.000003 | 18.219999 | 1.43313 | 1.47962 | 0.751 | 1.992 | 1.49123 | 1.49312 | 0.00001 | 58.75 | 63.900002 | 0.000001 | 5.6 | 5.19 | 5.13 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.3 |
SU-8 | Silicon Dioxide (SiO₂) | 1.481 | 0.937 | 7 | 83.900002 | 5 | 0.000009 | 0.27 | 1.96184 | 1.43953 | 0.283 | 1.093 | 1.90463 | 1.90679 | 0.000028 | 54.09 | 66.559998 | 0 | 4.72 | 4.39 | 4.41 | 1,260 | 1,625 | FDTD | 4.18 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 0.905 | 0.606 | -30.799999 | 119.800003 | 5 | 0.000012 | 0.25 | 1.42003 | 1.35342 | 1.129 | 2.047 | 1.52602 | 1.52835 | 0.000015 | 74.75 | 50.93 | 0.000003 | 0.55 | 0.38 | 0.25 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.52 |
Silicon Nitride (Si₃N₄) | Air | 1.632 | 0.684 | 18.299999 | 137.199997 | 10 | 0.000003 | 15.51 | 1.41504 | 1.03125 | 0.861 | 1.777 | 1.74438 | 1.75338 | 0.000076 | 80.160004 | 13.12 | 0.000002 | 0.63 | 0.27 | 0.18 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.51 |
Silicon Nitride (Si₃N₄) | Air | 1.575 | 0.524 | -31.5 | 144.899994 | 10 | 0.000003 | 17.700001 | 1.94274 | 1.35183 | 0.262 | 0.812 | 1.77053 | 1.77713 | 0.000037 | 89.470001 | 31.35 | 0.000002 | 1.81 | 1.64 | 1.52 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.73 |
Silicon Nitride (Si₃N₄) | Air | 1.668 | 0.293 | 6 | 100.5 | 10 | 0.000003 | 19.65 | 1.99577 | 1.42974 | 1.307 | 2.19 | 1.72614 | 1.73264 | 0.000069 | 76.010002 | 81.110001 | 0.000004 | 1.1 | 0.69 | 0.84 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.15 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.378 | 0.637 | 14.4 | 149.699997 | 1 | 0.000001 | 1.34 | 1.88036 | 1.07048 | 2.473 | 3.549 | 1.48655 | 1.49495 | 0.000062 | 60.130001 | 35.799999 | 0.000004 | 6.36 | 6.12 | 5.86 | 1,260 | 1,625 | FDTD | 4.44 |
Polydimethylsiloxane (PDMS) | Air | 0.998 | 0.937 | -39.799999 | 184.300003 | 10 | 0.000146 | 0.16 | 1.95626 | 1.16414 | 1.992 | 2.687 | 1.97519 | 1.97718 | 0.000009 | 52.450001 | 57.869999 | 0.000002 | 0.94 | 0.57 | 0.67 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.2 |
Silicon Dioxide (SiO₂) | Air | 1.786 | 0.539 | -3.2 | 136.5 | 10 | 0.000001 | 1.44 | 1.76686 | 1.10357 | 1.982 | 2.477 | 1.8656 | 1.86798 | 0.000017 | 86.110001 | 18.76 | 0.000003 | 8.24 | 7.93 | 7.8 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.4 |
Polymethyl Methacrylate (PMMA) | Air | 0.623 | 0.209 | -21.6 | 172 | 1 | 0.000008 | 0.23 | 1.6665 | 1.10843 | 1.281 | 1.752 | 1.48782 | 1.4935 | 0.000029 | 68.339996 | 40.290001 | 0.000005 | 8.7 | 8.32 | 8.53 | 1,260 | 1,625 | FDTD | 4.57 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.964 | 0.789 | -34.099998 | 157.300003 | 1 | 0.000003 | 17.559999 | 1.82188 | 1.26629 | 0.357 | 0.463 | 1.98337 | 1.98615 | 0.000015 | 89.279999 | 44.830002 | 0.000002 | 1.57 | 1.24 | 1.39 | 1,260 | 1,625 | FDTD | 4.88 |
Silicon Nitride (Si₃N₄) | Air | 1.232 | 0.916 | 18.5 | 152 | 1 | 0.000003 | 19.389999 | 1.50463 | 1.44291 | 2.899 | 3.527 | 1.4112 | 1.41559 | 0.000033 | 59.330002 | 57.869999 | 0.000003 | 4.18 | 3.79 | 3.92 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.84 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.799 | 0.932 | 13.7 | 173.100006 | 1 | 0.000003 | 18.58 | 1.52603 | 1.02903 | 1.305 | 2.004 | 1.4182 | 1.42447 | 0.000039 | 89.660004 | 52.669998 | 0.000003 | 3.32 | 3.02 | 2.99 | 1,260 | 1,625 | FDTD | 0.31 |
Silicon Dioxide (SiO₂) | Air | 0.817 | 0.715 | -20.700001 | 158.399994 | 5 | 0.000001 | 1.36 | 1.43796 | 1.00302 | 2.104 | 2.856 | 1.91678 | 1.92016 | 0.000019 | 78.580002 | 34.259998 | 0.000003 | 4.08 | 3.82 | 3.88 | 1,260 | 1,625 | FDTD | 1.86 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.452 | 0.764 | 1.4 | 98.800003 | 1 | 0.000003 | 18.950001 | 1.66678 | 1.23974 | 2.892 | 3.742 | 1.85201 | 1.85416 | 0.000022 | 70.349998 | 60.209999 | 0.000002 | 3.45 | 3.01 | 3.06 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.67 |
Silicon Dioxide (SiO₂) | Air | 1.623 | 0.998 | 11 | 155.5 | 10 | 0.000001 | 1.41 | 1.95351 | 1.05087 | 0.909 | 1.151 | 1.43221 | 1.43868 | 0.000045 | 50.43 | 18.6 | 0.000003 | 5.67 | 5.27 | 5.33 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.44 |
Silicon Nitride (Si₃N₄) | Air | 0.7 | 0.885 | -39 | 99.199997 | 5 | 0.000003 | 19.860001 | 1.50917 | 1.3992 | 1.65 | 1.805 | 1.8102 | 1.81225 | 0.000015 | 50.48 | 75.540001 | 0.000001 | 6.57 | 6.38 | 6.33 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.67 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.958 | 0.636 | -40.099998 | 156.699997 | 1 | 0.000003 | 19.559999 | 1.51003 | 1.32073 | 1.49 | 2.802 | 1.56207 | 1.56523 | 0.000016 | 78.470001 | 17.879999 | 0.000001 | 6.6 | 6.34 | 6.42 | 1,260 | 1,625 | FDTD | 2.57 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.058 | 0.732 | -9.7 | 130.199997 | 5 | 0.000003 | 18.32 | 1.45718 | 1.34328 | 1.495 | 2.908 | 1.4616 | 1.46901 | 0.000053 | 72.839996 | 59.439999 | 0.000002 | 2.8 | 2.66 | 2.36 | 1,260 | 1,625 | FDTD | 4.69 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 0.747 | 0.341 | -29.700001 | 183 | 5 | 0.00001 | 0.22 | 1.76624 | 1.17696 | 1.717 | 2.099 | 1.79012 | 1.79644 | 0.00003 | 79.300003 | 91.93 | 0.000002 | 0.62 | 0.24 | 0.39 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.9 |
Silicon Nitride (Si₃N₄) | Air | 1.98 | 0.958 | 4.5 | 159.899994 | 10 | 0.000003 | 17.309999 | 1.43771 | 1.46722 | 2.402 | 3.342 | 1.53846 | 1.54841 | 0.000064 | 62.349998 | 60.150002 | 0.000004 | 6.33 | 5.94 | 6.12 | 1,260 | 1,625 | FDTD | 4.03 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.13 | 0.346 | -12.7 | 92.800003 | 5 | 0.000003 | 15.1 | 1.59286 | 1.20742 | 2.161 | 3.003 | 1.70497 | 1.71035 | 0.000051 | 72.769997 | 67.599998 | 0.000002 | 1.81 | 1.65 | 1.34 | 1,260 | 1,625 | FDTD | 2.65 |
Polydimethylsiloxane (PDMS) | Air | 1.005 | 0.676 | 9.6 | 193 | 1 | 0.000184 | 0.17 | 1.81952 | 1.07649 | 0.57 | 1.049 | 1.86753 | 1.86854 | 0.000006 | 82.089996 | 18.370001 | 0.000001 | 4.47 | 4.14 | 4.28 | 1,260 | 1,625 | FDTD | 0.2 |
SU-8 | Silicon Dioxide (SiO₂) | 1.277 | 0.264 | -2.2 | 128.899994 | 5 | 0.00001 | 0.29 | 1.94689 | 1.42331 | 2.863 | 4.242 | 1.40918 | 1.41491 | 0.000044 | 88.919998 | 66.800003 | 0.000002 | 0.69 | 0.58 | 0.58 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.13 |
Silicon Dioxide (SiO₂) | Air | 1.903 | 0.203 | 9.8 | 131.699997 | 1 | 0.000001 | 1.42 | 1.92029 | 1.22491 | 2.712 | 3.109 | 1.55501 | 1.55655 | 0.000013 | 79.57 | 10.21 | 0.000002 | 3.49 | 3.03 | 3.28 | 1,260 | 1,625 | FDTD | 0.75 |
SU-8 | Silicon Dioxide (SiO₂) | 1.622 | 0.382 | -12 | 185.399994 | 10 | 0.000011 | 0.2 | 1.78997 | 1.18683 | 0.184 | 1.592 | 1.4117 | 1.42134 | 0.000049 | 63.279999 | 75.629997 | 0.000001 | 0.87 | 0.75 | 0.69 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.63 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.216 | 0.466 | 0.1 | 138.699997 | 5 | 0.000009 | 0.21 | 1.96514 | 1.15639 | 0.808 | 1.913 | 1.47462 | 1.47771 | 0.000022 | 80.410004 | 39.709999 | 0.000004 | 2.55 | 2.42 | 2.06 | 1,260 | 1,625 | FDTD | 2.47 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.538 | 0.25 | -21.1 | 129.399994 | 1 | 0.000003 | 15.37 | 1.59702 | 1.37519 | 2.144 | 2.305 | 1.57607 | 1.58352 | 0.000049 | 67.18 | 99.169998 | 0 | 7.43 | 7.13 | 7.22 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.52 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.788 | 0.531 | -11.9 | 157.5 | 1 | 0.000014 | 0.25 | 1.66601 | 1.26742 | 1.873 | 2.569 | 1.45334 | 1.46215 | 0.000052 | 60.889999 | 25.42 | 0.000003 | 6.13 | 5.82 | 5.68 | 1,260 | 1,625 | FDTD | 0.56 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 0.693 | 0.471 | -12.4 | 134.399994 | 5 | 0.000007 | 0.25 | 1.56416 | 1.47421 | 1.501 | 2.908 | 1.77978 | 1.78957 | 0.000067 | 77.230003 | 62.84 | 0.000001 | 7.72 | 7.25 | 7.48 | 1,260 | 1,625 | FDTD | 0.4 |
Polydimethylsiloxane (PDMS) | Air | 0.529 | 0.897 | -49.700001 | 131.699997 | 10 | 0.000186 | 0.19 | 1.55536 | 1.47589 | 2.527 | 2.875 | 1.81314 | 1.81652 | 0.000019 | 83.580002 | 50.790001 | 0.000001 | 3.98 | 3.83 | 3.77 | 1,260 | 1,625 | FDTD | 3.83 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 0.72 | 0.295 | -7.8 | 95.800003 | 5 | 0.000188 | 0.16 | 1.51126 | 1.34262 | 1.28 | 2.619 | 1.96208 | 1.96924 | 0.000069 | 80.5 | 51.900002 | 0.000003 | 9.25 | 8.99 | 9.08 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.83 |
Polydimethylsiloxane (PDMS) | Air | 1.936 | 0.97 | -38.200001 | 173 | 10 | 0.000226 | 0.17 | 1.69405 | 1.20774 | 1.122 | 2.559 | 1.56944 | 1.57672 | 0.000034 | 77.669998 | 24.940001 | 0 | 6.84 | 6.69 | 6.65 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.71 |
SU-8 | Air | 0.738 | 0.36 | -41.099998 | 130.5 | 5 | 0.000011 | 0.25 | 1.85923 | 1.07106 | 0.262 | 0.541 | 1.66106 | 1.66609 | 0.000029 | 62.75 | 21.77 | 0.000001 | 6.19 | 5.88 | 5.79 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.52 |
Silicon Dioxide (SiO₂) | Air | 1.738 | 0.272 | 18 | 150.699997 | 1 | 0.000001 | 1.46 | 1.77267 | 1.28832 | 0.397 | 1.22 | 1.8545 | 1.86262 | 0.000061 | 69.599998 | 56.060001 | 0 | 3.1 | 2.79 | 2.7 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.12 |
SU-8 | Air | 1.218 | 0.557 | -43.599998 | 196 | 1 | 0.000009 | 0.27 | 1.46652 | 1.42971 | 0.748 | 1.806 | 1.67196 | 1.68171 | 0.000041 | 64.07 | 90.239998 | 0.000004 | 9.5 | 9.01 | 9.14 | 1,260 | 1,625 | FDTD | 3.67 |
Polydimethylsiloxane (PDMS) | Air | 0.963 | 0.203 | 16.4 | 134.300003 | 10 | 0.000282 | 0.19 | 1.68901 | 1.06859 | 1.127 | 1.356 | 1.41185 | 1.41542 | 0.00003 | 78.459999 | 38.830002 | 0.000001 | 6.76 | 6.64 | 6.36 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.82 |